CA821497A - Method and apparatus for thin film deposition - Google Patents

Method and apparatus for thin film deposition

Info

Publication number
CA821497A
CA821497A CA821497A CA821497DA CA821497A CA 821497 A CA821497 A CA 821497A CA 821497 A CA821497 A CA 821497A CA 821497D A CA821497D A CA 821497DA CA 821497 A CA821497 A CA 821497A
Authority
CA
Canada
Prior art keywords
thin film
film deposition
deposition
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA821497A
Inventor
J. Mccarthy John
Firestone Stanley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Department of the Army
Original Assignee
United States Department of the Army
Publication date
Application granted granted Critical
Publication of CA821497A publication Critical patent/CA821497A/en
Expired legal-status Critical Current

Links

CA821497A Method and apparatus for thin film deposition Expired CA821497A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA821497T

Publications (1)

Publication Number Publication Date
CA821497A true CA821497A (en) 1969-08-26

Family

ID=36298897

Family Applications (1)

Application Number Title Priority Date Filing Date
CA821497A Expired CA821497A (en) Method and apparatus for thin film deposition

Country Status (1)

Country Link
CA (1) CA821497A (en)

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