CA856388A - Method and apparatus for machining by a beam of charged particles - Google Patents

Method and apparatus for machining by a beam of charged particles

Info

Publication number
CA856388A
CA856388A CA856388A CA856388DA CA856388A CA 856388 A CA856388 A CA 856388A CA 856388 A CA856388 A CA 856388A CA 856388D A CA856388D A CA 856388DA CA 856388 A CA856388 A CA 856388A
Authority
CA
Canada
Prior art keywords
machining
charged particles
charged
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA856388A
Inventor
H. Steigerwald Karl
Meyer Edgar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
K H STEIGERWALD GmbH
Original Assignee
K H STEIGERWALD GmbH
Publication date
Application granted granted Critical
Publication of CA856388A publication Critical patent/CA856388A/en
Expired legal-status Critical Current

Links

CA856388A Method and apparatus for machining by a beam of charged particles Expired CA856388A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA856388T

Publications (1)

Publication Number Publication Date
CA856388A true CA856388A (en) 1970-11-17

Family

ID=36341929

Family Applications (1)

Application Number Title Priority Date Filing Date
CA856388A Expired CA856388A (en) Method and apparatus for machining by a beam of charged particles

Country Status (1)

Country Link
CA (1) CA856388A (en)

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