CA920794A - Metal oxide deposition system - Google Patents

Metal oxide deposition system

Info

Publication number
CA920794A
CA920794A CA077651A CA77651A CA920794A CA 920794 A CA920794 A CA 920794A CA 077651 A CA077651 A CA 077651A CA 77651 A CA77651 A CA 77651A CA 920794 A CA920794 A CA 920794A
Authority
CA
Canada
Prior art keywords
metal oxide
deposition system
oxide deposition
metal
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA077651A
Inventor
M. Skooglund Carl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of CA920794A publication Critical patent/CA920794A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Chemical Vapour Deposition (AREA)
CA077651A 1969-03-20 1970-03-17 Metal oxide deposition system Expired CA920794A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80889469A 1969-03-20 1969-03-20

Publications (1)

Publication Number Publication Date
CA920794A true CA920794A (en) 1973-02-13

Family

ID=25200033

Family Applications (1)

Application Number Title Priority Date Filing Date
CA077651A Expired CA920794A (en) 1969-03-20 1970-03-17 Metal oxide deposition system

Country Status (5)

Country Link
JP (1) JPS50723B1 (en)
CA (1) CA920794A (en)
DE (1) DE2012940A1 (en)
FR (1) FR2039692A5 (en)
NL (1) NL7003933A (en)

Also Published As

Publication number Publication date
JPS50723B1 (en) 1975-01-11
DE2012940A1 (en) 1970-10-08
NL7003933A (en) 1970-09-22
FR2039692A5 (en) 1971-01-15

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