CA954487A - Turbo-molecular pump having improved rotor and stator construction - Google Patents

Turbo-molecular pump having improved rotor and stator construction

Info

Publication number
CA954487A
CA954487A CA094,791A CA94791A CA954487A CA 954487 A CA954487 A CA 954487A CA 94791 A CA94791 A CA 94791A CA 954487 A CA954487 A CA 954487A
Authority
CA
Canada
Prior art keywords
turbo
molecular pump
improved rotor
stator construction
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA094,791A
Other languages
English (en)
Other versions
CA94791S (en
Inventor
Ascher H. Shapiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sargent Welch Scientific Co
Original Assignee
Sargent Welch Scientific Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sargent Welch Scientific Co filed Critical Sargent Welch Scientific Co
Application granted granted Critical
Publication of CA954487A publication Critical patent/CA954487A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CA094,791A 1969-10-27 1970-10-05 Turbo-molecular pump having improved rotor and stator construction Expired CA954487A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86984869A 1969-10-27 1969-10-27

Publications (1)

Publication Number Publication Date
CA954487A true CA954487A (en) 1974-09-10

Family

ID=25354369

Family Applications (1)

Application Number Title Priority Date Filing Date
CA094,791A Expired CA954487A (en) 1969-10-27 1970-10-05 Turbo-molecular pump having improved rotor and stator construction

Country Status (8)

Country Link
US (1) US3644051A (de)
BE (1) BE757354A (de)
CA (1) CA954487A (de)
CH (1) CH532199A (de)
DE (1) DE2046693A1 (de)
FR (1) FR2065419A5 (de)
GB (1) GB1332004A (de)
NL (1) NL7014593A (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
FR2355177A1 (fr) * 1975-06-17 1978-01-13 Bradbury Inventions Pty Ltd Turbine axiale a plusieurs etages
US4025225A (en) * 1975-08-04 1977-05-24 Robert R. Reed Disc pump or turbine
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3079367B2 (ja) * 1997-10-03 2000-08-21 セイコー精機株式会社 ターボ分子ポンプ
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
US6224325B1 (en) * 1999-01-08 2001-05-01 Wayne Ernest Conrad Prandtl layer turbine
US6261052B1 (en) 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
WO2000042291A1 (en) * 1999-01-08 2000-07-20 Fantom Technologies Inc. Friction turbine
US6238177B1 (en) 1999-01-08 2001-05-29 Fantom Technologies Inc. Prandtl layer turbine
US6174127B1 (en) * 1999-01-08 2001-01-16 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6250071B1 (en) 1999-08-27 2001-06-26 Schmoll & Halquiss Housing for a disk propulsion system and a method of using the same
US6368078B1 (en) * 2000-11-27 2002-04-09 John F. Palumbo Bladeless turbocharger
EP1249612B1 (de) * 2001-03-15 2004-01-28 VARIAN S.p.A. Herstellungsverfahren einer Statorstufe für eine Turbinenpumpe
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
DE102004012713A1 (de) † 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US7251260B2 (en) * 2004-08-24 2007-07-31 Coherent, Inc. Wavelength-locked fiber-coupled diode-laser bar
US20060291997A1 (en) * 2004-10-26 2006-12-28 Wilson Erich A Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps
US20060216149A1 (en) * 2004-10-26 2006-09-28 Wilson Erich A Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps
CN2752494Y (zh) * 2004-11-04 2006-01-18 梁和胜 鼓风机
US20070258824A1 (en) * 2005-02-01 2007-11-08 1134934 Alberta Ltd. Rotor for viscous or abrasive fluids
US7478990B2 (en) * 2005-10-25 2009-01-20 Wilson Erich A Bracket/spacer optimization in bladeless turbines, compressors and pumps
CN2856502Y (zh) * 2005-11-04 2007-01-10 梁和胜 风机
JP5369591B2 (ja) * 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP3091235B1 (de) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotorscheibe
DE102018211808A1 (de) * 2018-07-16 2020-01-16 Ziehl-Abegg Se Ventilator und Leiteinrichtung für einen Ventilator
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
US11286779B2 (en) 2020-06-03 2022-03-29 Honeywell International Inc. Characteristic distribution for rotor blade of booster rotor
CN119982295B (zh) * 2025-03-14 2025-10-28 大连理工大学 一种内置导流叶轮结构的自驱型旋转式压力能回收装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (de) *
US1668462A (en) * 1924-05-09 1928-05-01 Richard W Oswald Disk fan wheel
CH227403A (de) * 1942-04-07 1943-06-15 Sulzer Ag Mehrstufige Turbomaschine.
US2706451A (en) * 1948-10-20 1955-04-19 Mayer-Ortiz Carlos Axial flow pump
US2774307A (en) * 1952-02-19 1956-12-18 Heinrich Schloz Rotary pump
US2803945A (en) * 1954-05-04 1957-08-27 Werner I Staaf Gas turbine construction
US2918208A (en) * 1956-02-02 1959-12-22 Becker Willi Molecular pump
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
FR1297182A (fr) * 1961-05-15 1962-06-29 Snecma Pompe à vide turbomoléculaire
US3138318A (en) * 1961-05-15 1964-06-23 Snecma Turbo-molecular vacuum pump
FR84320E (fr) * 1963-06-05 1965-01-22 Snecma Perfectionnements aux pompes à vide turbomoléculaires

Also Published As

Publication number Publication date
US3644051A (en) 1972-02-22
FR2065419A5 (de) 1971-07-23
BE757354A (fr) 1971-03-16
DE2046693A1 (de) 1971-05-06
GB1332004A (en) 1973-10-03
NL7014593A (de) 1971-04-29
CH532199A (de) 1972-12-31

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