CA985039A - Optical inspection - Google Patents

Optical inspection

Info

Publication number
CA985039A
CA985039A CA145,293A CA145293A CA985039A CA 985039 A CA985039 A CA 985039A CA 145293 A CA145293 A CA 145293A CA 985039 A CA985039 A CA 985039A
Authority
CA
Canada
Prior art keywords
optical inspection
inspection
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA145,293A
Other languages
English (en)
Other versions
CA145293S (en
Inventor
John N. Butters
Jack A. Leendertz
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Application granted granted Critical
Publication of CA985039A publication Critical patent/CA985039A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/164—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by holographic interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Holo Graphy (AREA)
CA145,293A 1971-06-22 1972-06-21 Optical inspection Expired CA985039A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2921371A GB1392448A (en) 1971-06-22 1971-06-22 Optical indpection

Publications (1)

Publication Number Publication Date
CA985039A true CA985039A (en) 1976-03-09

Family

ID=10287949

Family Applications (1)

Application Number Title Priority Date Filing Date
CA145,293A Expired CA985039A (en) 1971-06-22 1972-06-21 Optical inspection

Country Status (7)

Country Link
US (1) US3816649A (fr)
AU (1) AU471611B2 (fr)
CA (1) CA985039A (fr)
DE (1) DE2230650C2 (fr)
FR (1) FR2143204B1 (fr)
GB (1) GB1392448A (fr)
IT (1) IT960440B (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1460861A (en) * 1974-03-05 1977-01-06 Nat Res Dev Interferrometers
US4025195A (en) * 1974-07-22 1977-05-24 Itek Corporation Image subtraction/addition system
GB1593284A (en) * 1977-03-15 1981-07-15 Nat Res Dev Optical inspection
US4277127A (en) * 1979-12-03 1981-07-07 The United States Of America As Represented By The Secretary Of The Army Dopler extended depth of field imaging system with coherent object illumination
US4425039A (en) 1982-05-07 1984-01-10 Industrial Holographics, Inc. Apparatus for the practice of double exposure interferometric non-destructive testing
US4620223A (en) * 1982-09-03 1986-10-28 Industrial Holographics, Inc. Interferometric deformation analysis system
DE3426056A1 (de) * 1983-07-16 1985-01-24 Leicester Polytechnic, Leicester Verfahren und vorrichtung zur kontrolle von textilien
GB8331248D0 (en) * 1983-11-23 1983-12-29 Kearney & Trecker Marwin Ltd Inspecting articles
GB8522820D0 (en) * 1985-09-16 1985-10-23 Montgomery P C Interferometric measurement
GB8529429D0 (en) * 1985-11-29 1986-01-08 Preater R W T Test apparatus
US4747683A (en) * 1986-01-17 1988-05-31 Eye Research Institute Of Retina Foundation Method and device for in vivo wetting determinations
US4818110A (en) * 1986-05-06 1989-04-04 Kla Instruments Corporation Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
US4815856A (en) * 1986-06-05 1989-03-28 Storage Technology Partners Ii Method and apparatus for measuring the absolute thickness of dust defocus layers
GB8613635D0 (en) * 1986-06-05 1986-07-09 Tyrer J R Optical inspection
US4887899A (en) * 1987-12-07 1989-12-19 Hung Yau Y Apparatus and method for electronic analysis of test objects
US4913547A (en) * 1988-01-29 1990-04-03 Moran Steven E Optically phased-locked speckle pattern interferometer
US5004345A (en) * 1988-12-05 1991-04-02 Hung Yau Y Dual-lens shearing interferometer
US5094528A (en) * 1990-05-25 1992-03-10 Laser Technology, Inc. Apparatus and method for performing electronic shearography
DE4039972A1 (de) * 1990-12-14 1992-06-17 Man Technologie Gmbh Verfahren und einrichtung zur erfassung der oberflaechendeformation von bauteilen mittels elektronischer speckle-interferometrie
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
US5245409A (en) * 1991-11-27 1993-09-14 Arvin Industries, Inc. Tube seam weld inspection device
US5671042A (en) * 1992-02-18 1997-09-23 Illinois Institute Of Technology Holomoire strain analyzer
US5257089A (en) * 1992-06-15 1993-10-26 United Technologies Corporation Optical head for shearography
GB2309777B (en) * 1996-02-05 2000-09-06 Secretary Trade Ind Brit Interferometer
DE19650325A1 (de) * 1996-12-04 1998-06-10 Ettemeyer Gmbh & Co Mes Und Pr Verfahren und Vorrichtung zur Ermittlung von Verformungen und Dehnungen an gekrümmten Körpern
US6188483B1 (en) 1997-12-03 2001-02-13 Dr. Ettemeyer Gmbh & Co. Method and apparatus for determining deformation and elongation on curved bodies
US6580514B1 (en) * 1999-04-28 2003-06-17 Nec Corporation Non-contact silicon melt surface evaluation method and system
US20030067537A1 (en) * 2001-10-04 2003-04-10 Myers Kenneth J. System and method for three-dimensional data acquisition
FR2849245B1 (fr) * 2002-12-20 2006-02-24 Thales Sa Procede d'authentification et d'identification optique d'objets et dispositif de mise en oeuvre
US7436504B2 (en) * 2003-09-10 2008-10-14 Shear Graphics, Llc Non-destructive testing and imaging
GB0809037D0 (en) * 2008-05-19 2008-06-25 Renishaw Plc Video Probe
CN110793453B (zh) * 2019-10-10 2021-02-26 北京科技大学 适用于三维曲面异形结构的简易快速人工散斑制备方法

Also Published As

Publication number Publication date
FR2143204A1 (fr) 1973-02-02
DE2230650A1 (de) 1972-12-28
AU471611B2 (en) 1976-04-29
IT960440B (it) 1973-11-20
US3816649A (en) 1974-06-11
FR2143204B1 (fr) 1973-07-13
AU4375272A (en) 1974-01-03
DE2230650C2 (de) 1983-09-22
GB1392448A (en) 1975-04-30

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