CH297601A - Electrostatic electron lens. - Google Patents

Electrostatic electron lens.

Info

Publication number
CH297601A
CH297601A CH297601DA CH297601A CH 297601 A CH297601 A CH 297601A CH 297601D A CH297601D A CH 297601DA CH 297601 A CH297601 A CH 297601A
Authority
CH
Switzerland
Prior art keywords
electron lens
electrostatic electron
electrostatic
lens
electron
Prior art date
Application number
Other languages
German (de)
Inventor
Gmbh Zeiss-Opton Op Oberkochen
Original Assignee
Zeiss Opton Optische Werke
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Opton Optische Werke filed Critical Zeiss Opton Optische Werke
Publication of CH297601A publication Critical patent/CH297601A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CH297601D 1951-03-14 1952-03-05 Electrostatic electron lens. CH297601A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE297601X 1951-03-14

Publications (1)

Publication Number Publication Date
CH297601A true CH297601A (en) 1954-03-31

Family

ID=6090738

Family Applications (1)

Application Number Title Priority Date Filing Date
CH297601D CH297601A (en) 1951-03-14 1952-03-05 Electrostatic electron lens.

Country Status (2)

Country Link
CH (1) CH297601A (en)
FR (1) FR1052208A (en)

Also Published As

Publication number Publication date
FR1052208A (en) 1954-01-22

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