CH365362A - Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem Halbleitermaterial - Google Patents

Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem Halbleitermaterial

Info

Publication number
CH365362A
CH365362A CH6595358A CH6595358A CH365362A CH 365362 A CH365362 A CH 365362A CH 6595358 A CH6595358 A CH 6595358A CH 6595358 A CH6595358 A CH 6595358A CH 365362 A CH365362 A CH 365362A
Authority
CH
Switzerland
Prior art keywords
crucible
rod
semiconductor material
shaped semiconductor
free zone
Prior art date
Application number
CH6595358A
Other languages
English (en)
Inventor
Reimer Dipl Phys Emeis
Haus Joachim
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH365362A publication Critical patent/CH365362A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CH6595358A 1957-11-15 1958-11-08 Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem Halbleitermaterial CH365362A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES55905A DE1076623B (de) 1957-11-15 1957-11-15 Vorrichtung zum tiegelfreien Zonenziehen von stabfoermigem Halbleitermaterial

Publications (1)

Publication Number Publication Date
CH365362A true CH365362A (de) 1962-11-15

Family

ID=7490747

Family Applications (1)

Application Number Title Priority Date Filing Date
CH6595358A CH365362A (de) 1957-11-15 1958-11-08 Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem Halbleitermaterial

Country Status (5)

Country Link
US (1) US2904663A (de)
CH (1) CH365362A (de)
DE (1) DE1076623B (de)
FR (1) FR1204149A (de)
GB (1) GB844570A (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1061527B (de) * 1953-02-14 1959-07-16 Siemens Ag Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken
BE581195A (de) * 1958-07-30
US2957064A (en) * 1958-09-30 1960-10-18 Westinghouse Electric Corp Stabilizing of levitation melting
NL253526A (de) * 1959-08-14
NL249360A (de) * 1960-03-12
DE1204196B (de) 1960-03-31 1965-11-04 Siemens Ag Einrichtung zum Regeln des Durchmessers von stabfoermigen Schmelzkoerpern bei tiegelfreien Zonenschmelzen im Vakuum
US3203768A (en) * 1961-08-01 1965-08-31 Westinghouse Electric Corp Apparatus of zone refining and controlling solute segregation in solidifying melts by electromagnetic means
DE1916318C3 (de) * 1969-03-29 1975-07-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Stromdurchführung für eine Vorrichtung zum Zonenschmelzen
DE1916317C3 (de) * 1969-03-29 1975-07-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Stromzuführung für eine Induktionsspule beim tiegelfreien Zonenschmelzen
DE2141188C3 (de) * 1971-08-17 1979-09-13 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung für das tiegellose Zonenschmelzen
DE2308136C3 (de) * 1973-02-19 1982-03-25 Siemens AG, 1000 Berlin und 8000 München Gasdichte Stromzuführung
DE2700856A1 (de) * 1977-01-11 1978-07-13 Raphael Dr Leonhardt Vorrichtung zum zuechten von kristallen oder fuer dgl. verfahren
DE2823611C2 (de) * 1978-05-30 1986-09-11 Siemens AG, 1000 Berlin und 8000 München Stromzuführung für eine Induktionsheizspule
DE2919988A1 (de) * 1979-05-17 1980-11-27 Siemens Ag Stromzufuehrung in koaxialbauweise
US5554836A (en) * 1994-05-23 1996-09-10 The Boc Group, Inc. Induction heating in low oxygen-containing atmosphere

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
NL89230C (de) * 1952-12-17 1900-01-01
US2743199A (en) * 1955-03-30 1956-04-24 Westinghouse Electric Corp Process of zone refining an elongated body of metal
US2870309A (en) * 1957-06-11 1959-01-20 Emil R Capita Zone purification device

Also Published As

Publication number Publication date
DE1076623B (de) 1960-03-03
GB844570A (en) 1960-08-17
FR1204149A (fr) 1960-01-22
US2904663A (en) 1959-09-15

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