CH373193A - Device for monitoring and / or regulating the melting process of a semiconductor rod - Google Patents

Device for monitoring and / or regulating the melting process of a semiconductor rod

Info

Publication number
CH373193A
CH373193A CH7677659A CH7677659A CH373193A CH 373193 A CH373193 A CH 373193A CH 7677659 A CH7677659 A CH 7677659A CH 7677659 A CH7677659 A CH 7677659A CH 373193 A CH373193 A CH 373193A
Authority
CH
Switzerland
Prior art keywords
regulating
monitoring
melting process
semiconductor rod
semiconductor
Prior art date
Application number
CH7677659A
Other languages
German (de)
Inventor
Reimer Dipl Phys Emeis
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH373193A publication Critical patent/CH373193A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Arc Welding Control (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
CH7677659A 1958-08-16 1959-08-10 Device for monitoring and / or regulating the melting process of a semiconductor rod CH373193A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES59437A DE1141086B (en) 1958-08-16 1958-08-16 Device for monitoring the melted state of a melting zone during crucible-free zone melting

Publications (1)

Publication Number Publication Date
CH373193A true CH373193A (en) 1963-11-15

Family

ID=7493311

Family Applications (1)

Application Number Title Priority Date Filing Date
CH7677659A CH373193A (en) 1958-08-16 1959-08-10 Device for monitoring and / or regulating the melting process of a semiconductor rod

Country Status (7)

Country Link
US (1) US3009973A (en)
BE (1) BE581687A (en)
CH (1) CH373193A (en)
DE (1) DE1141086B (en)
FR (1) FR1232565A (en)
GB (1) GB907478A (en)
NL (2) NL240020A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL247741A (en) * 1959-01-27
NL255130A (en) 1959-09-11
DE1165882B (en) * 1960-02-05 1964-03-19 Philips Patentverwaltung Device for executing rotary movements on rod-shaped bodies, in particular on semiconductor bodies
US3211881A (en) * 1962-08-28 1965-10-12 Westinghouse Electric Corp Apparatus for zone heating
US4176002A (en) * 1974-08-21 1979-11-27 Agence Nationale De Valorisation De La Recherche (Anvar) Controlling the melt temperature during zone refining and Czochralski crystal growth by sensing the viscous torque of the melt zone during operation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2362398A (en) * 1942-08-01 1944-11-07 Ralph R Pittman Thermally responsive device
DE1061527B (en) * 1953-02-14 1959-07-16 Siemens Ag Process for zone-wise remelting of rods and other elongated workpieces
US2764027A (en) * 1954-04-19 1956-09-25 Otto Walter Thermal fuse
US2870309A (en) * 1957-06-11 1959-01-20 Emil R Capita Zone purification device
DE1092576B (en) * 1957-11-15 1960-11-10 Siemens Ag Power supply for the movable heating coil of a crucible-free zone pulling device inside a vessel

Also Published As

Publication number Publication date
BE581687A (en)
DE1141086B (en) 1962-12-13
US3009973A (en) 1961-11-21
FR1232565A (en) 1960-10-10
NL240020A (en)
NL113487C (en)
GB907478A (en) 1962-10-03

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