CH379013A - Verstellbarer Präparattisch in einem Korpuskularstrahlapparat, insbesondere Elektronenmikroskop oder Elektronenbeugungsgerät - Google Patents

Verstellbarer Präparattisch in einem Korpuskularstrahlapparat, insbesondere Elektronenmikroskop oder Elektronenbeugungsgerät

Info

Publication number
CH379013A
CH379013A CH8042059A CH8042059A CH379013A CH 379013 A CH379013 A CH 379013A CH 8042059 A CH8042059 A CH 8042059A CH 8042059 A CH8042059 A CH 8042059A CH 379013 A CH379013 A CH 379013A
Authority
CH
Switzerland
Prior art keywords
particle beam
beam apparatus
diffraction device
electron
preparation table
Prior art date
Application number
CH8042059A
Other languages
English (en)
Inventor
Wolfgang-Dieter Dipl Ph Riecke
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Publication of CH379013A publication Critical patent/CH379013A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CH8042059A 1959-07-24 1959-11-09 Verstellbarer Präparattisch in einem Korpuskularstrahlapparat, insbesondere Elektronenmikroskop oder Elektronenbeugungsgerät CH379013A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEM42231A DE1226228B (de) 1959-07-24 1959-07-24 Bewegbarer Praeparattisch fuer einen Korpus-kularstrahlapparat, insbesondere Elektronen-mikroskop oder Elektronenbeugungsgeraet

Publications (1)

Publication Number Publication Date
CH379013A true CH379013A (de) 1964-06-30

Family

ID=7304266

Family Applications (1)

Application Number Title Priority Date Filing Date
CH8042059A CH379013A (de) 1959-07-24 1959-11-09 Verstellbarer Präparattisch in einem Korpuskularstrahlapparat, insbesondere Elektronenmikroskop oder Elektronenbeugungsgerät

Country Status (3)

Country Link
US (1) US3086112A (de)
CH (1) CH379013A (de)
DE (1) DE1226228B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3230365A (en) * 1962-02-21 1966-01-18 Jeol Ltd Tiltable specimen holding device for electron beam apparatus
US3179799A (en) * 1962-05-02 1965-04-20 Valdre Ugo Goniometric apparatus for orientation of a specimen in an electron microscope
US3180987A (en) * 1963-06-20 1965-04-27 Robert L Cunningham Ion bombardment camera for crystal orientation determination
US3289311A (en) * 1964-11-02 1966-12-06 George J Wolga Micrometer device
US3488493A (en) * 1966-05-17 1970-01-06 Commw Scient Ind Res Org Mechanism for tilting specimens in electron microscopes and electron diffraction cameras
US3486020A (en) * 1967-04-24 1969-12-23 Jackson & Church Electronics C Field ion or field emission microscope having a fiber optic face plate
DE1789019B1 (de) * 1968-09-23 1972-04-27 Siemens Ag Verfahren zur erzeugung eines stereobildes mittels der elektronenstrahlmikroskopie
GB1320346A (en) * 1970-05-22 1973-06-13 Ass Elect Ind Specimen stages for electron microscopes
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
US3952203A (en) * 1972-07-21 1976-04-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Object adjustment device for a charged particle beam apparatus
US3911282A (en) * 1973-11-01 1975-10-07 Dresser Ind Axial ion beam accelerator tube having a wobbled target
DE3128814A1 (de) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie
DE8328167U1 (de) * 1983-09-30 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Probenhalterung für Sekundärionen-Massenspektrometrie und andere empfindliche Teilchenstrahl-Analysenmethoden
DE4041029C1 (en) * 1990-12-20 1992-02-06 Siemens Nixdorf Informationssysteme Ag, 4790 Paderborn, De Component cooler for vacuum chamber - has stamper-like heat sink inserted in sealed opening and directly contacting base of component
DE4140710A1 (de) * 1991-12-10 1993-06-17 Integrated Circuit Testing Positioniersystem
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE724183C (de) * 1940-08-20 1942-08-20 Aeg Anordnung zum Justieren von Objekttraegern, Blenden u. dgl. in Elektronenmikroskopen
US2418903A (en) * 1943-08-31 1947-04-15 Rca Corp Electron optical instrument with adjustable specimen support
US2762123A (en) * 1948-05-26 1956-09-11 Sperry Rand Corp Navigation system
US2499019A (en) * 1949-01-29 1950-02-28 Rca Corp Adjustable specimen support for electron-optical instruments
US2715007A (en) * 1953-07-31 1955-08-09 Eli A Zeitlin Gimbal mounting
GB847264A (en) * 1957-09-11 1960-09-07 Ass Elect Ind Improvements relating to x-ray apparatus

Also Published As

Publication number Publication date
DE1226228B (de) 1966-10-06
US3086112A (en) 1963-04-16

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