CH396430A - Anordnung zur photoelektrischen Messung der Lage einer Messmarke - Google Patents

Anordnung zur photoelektrischen Messung der Lage einer Messmarke

Info

Publication number
CH396430A
CH396430A CH878862A CH878862A CH396430A CH 396430 A CH396430 A CH 396430A CH 878862 A CH878862 A CH 878862A CH 878862 A CH878862 A CH 878862A CH 396430 A CH396430 A CH 396430A
Authority
CH
Switzerland
Prior art keywords
arrangement
measuring mark
photoelectric measurement
photoelectric
measurement
Prior art date
Application number
CH878862A
Other languages
English (en)
Inventor
Fromund Dipl Phys Hock
Original Assignee
Leitz Ernst Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leitz Ernst Gmbh filed Critical Leitz Ernst Gmbh
Publication of CH396430A publication Critical patent/CH396430A/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Transform (AREA)
CH878862A 1961-08-30 1962-07-23 Anordnung zur photoelektrischen Messung der Lage einer Messmarke CH396430A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL39904A DE1247036B (de) 1961-08-30 1961-08-30 Anordnung zur fotoelektrischen Messung der Lage einer Messmarke

Publications (1)

Publication Number Publication Date
CH396430A true CH396430A (de) 1965-07-31

Family

ID=7268848

Family Applications (1)

Application Number Title Priority Date Filing Date
CH878862A CH396430A (de) 1961-08-30 1962-07-23 Anordnung zur photoelektrischen Messung der Lage einer Messmarke

Country Status (4)

Country Link
US (1) US3254227A (de)
CH (1) CH396430A (de)
DE (1) DE1247036B (de)
GB (1) GB997915A (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1448854B1 (de) * 1963-02-23 1970-01-15 Leitz Ernst Gmbh Anordnung zur Bestimmung der Lage von Marken
GB1087132A (en) * 1963-06-05 1967-10-11 Hilger & Watts Ltd Improvements in or relating to scale reading means
US3360655A (en) * 1964-03-23 1967-12-26 Bell Aerospace Corp Angular motion sensor
US3418037A (en) * 1964-07-02 1968-12-24 Bausch & Lomb Optical system for angular measuring instruments
DE1296396B (de) * 1965-07-24 1969-05-29 Leitz Ernst Gmbh Optisches Mehrzweckmessgeraet
DE1498147A1 (de) * 1965-09-09 1968-12-12 Leitz Ernst Gmbh Anordnung zur digitalen Anzeige
US3519830A (en) * 1966-01-17 1970-07-07 Ibm Method and means for maintaining the resolution of a scanning system having an undefined object plane
US3448284A (en) * 1966-06-28 1969-06-03 Bolkow Gmbh Light beam direction detector with reciprocating lens
CH463130A (fr) * 1966-08-25 1968-09-30 Genevoise Instr Physique Dispositif de lecture de haute précision de la graduation d'une règle de précision
CH465250A (fr) * 1966-10-18 1968-11-15 Genevoise Instr Physique Microscope photoélectrique
US3540040A (en) * 1966-12-29 1970-11-10 Electro Dynamics & Telecom Ltd Digital telemetry transducers
US3463931A (en) * 1967-05-16 1969-08-26 Gen Signal Corp Shutter control of illumination of photoelectric transducer within light-transmitting block
JPS50101980U (de) * 1974-01-28 1975-08-22
US4050789A (en) * 1976-04-15 1977-09-27 Edward Herbert Tracking lens system for solar collectors and skylights
JPS6034728B2 (ja) * 1976-10-29 1985-08-10 オリンパス光学工業株式会社 シフトレンズ
US4218112A (en) * 1978-07-03 1980-08-19 C. Reichert Optische Werke, Ag Photometer microscope for microphotometer scanning of fine specimen structures
FR2615280B1 (fr) * 1987-05-11 1996-07-19 Canon Kk Dispositif de mesure de la distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
FR2615281B1 (fr) * 1987-05-11 1996-08-23 Canon Kk Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2393631A (en) * 1940-11-27 1946-01-29 Ilford Ltd Testing of photographic films, plates, and papers
DE853657C (de) * 1944-09-05 1952-10-27 Leitz Ernst Gmbh Vorrichtung zur Berichtigung der aus dem Geraet sich ergebenden Mess-fehler von mit optischen Messeinrichtungen versehenen Maschinen und Instrumenten
CH266408A (de) * 1945-09-01 1950-01-31 Gmbh Ernst Leitz Vorrichtung zur Berichtigung der Messfehler von mit optischen Messeinrichtungen versehenen Maschinen und Instrumenten.
US2924768A (en) * 1956-08-27 1960-02-09 Inductosyn Corp Machine tool control with compensation for non-linear guide ways
CH349799A (fr) * 1958-09-24 1960-10-31 Genevoise Instr Physique Dispositif de commande pour la mise en position exacte d'un organe mobile d'une machine par rapport au bâti de celle-ci
US3079507A (en) * 1959-01-29 1963-02-26 Quartz & Silice S A Optical pyrometers
US3033987A (en) * 1959-03-23 1962-05-08 Optron Corp Electronic displacement follower apparatus
DE1181932B (de) * 1960-04-14 1964-11-19 Continental Elektro Ind Ag Automatisches optisches Mikrometer, insbesondere zur Ablesung von Massstaeben
US3116886A (en) * 1960-08-02 1964-01-07 Keuffel & Esser Co Photosensitive electro-optical micrometers for rotary axles
SE344366B (de) * 1967-04-20 1972-04-10 J Carlson

Also Published As

Publication number Publication date
DE1247036B (de) 1967-08-10
US3254227A (en) 1966-05-31
GB997915A (en) 1965-07-14

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