CH404018A - Elektronenstrahlgerät hoher Leistung - Google Patents

Elektronenstrahlgerät hoher Leistung

Info

Publication number
CH404018A
CH404018A CH1055663A CH1055663A CH404018A CH 404018 A CH404018 A CH 404018A CH 1055663 A CH1055663 A CH 1055663A CH 1055663 A CH1055663 A CH 1055663A CH 404018 A CH404018 A CH 404018A
Authority
CH
Switzerland
Prior art keywords
electron beam
high power
beam machine
power electron
machine
Prior art date
Application number
CH1055663A
Other languages
English (en)
Inventor
Francois Dr Gaydou
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Publication of CH404018A publication Critical patent/CH404018A/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301Arrangements enabling beams to pass between regions of different pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CH1055663A 1962-09-08 1963-08-27 Elektronenstrahlgerät hoher Leistung CH404018A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT717762A AT238464B (de) 1962-09-08 1962-09-08 Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum

Publications (1)

Publication Number Publication Date
CH404018A true CH404018A (de) 1965-12-15

Family

ID=3593449

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1055663A CH404018A (de) 1962-09-08 1963-08-27 Elektronenstrahlgerät hoher Leistung

Country Status (3)

Country Link
AT (1) AT238464B (de)
CH (1) CH404018A (de)
GB (1) GB982446A (de)

Also Published As

Publication number Publication date
GB982446A (en) 1965-02-03
AT238464B (de) 1965-02-10

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