CH408587A - A method for producing an etchant and an etchant produced by this method - Google Patents

A method for producing an etchant and an etchant produced by this method

Info

Publication number
CH408587A
CH408587A CH851061A CH851061A CH408587A CH 408587 A CH408587 A CH 408587A CH 851061 A CH851061 A CH 851061A CH 851061 A CH851061 A CH 851061A CH 408587 A CH408587 A CH 408587A
Authority
CH
Switzerland
Prior art keywords
etchant
producing
produced
etchant produced
Prior art date
Application number
CH851061A
Other languages
German (de)
Inventor
Reimer Dipl Phys Emeis
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH408587A publication Critical patent/CH408587A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
CH851061A 1960-11-26 1961-07-20 A method for producing an etchant and an etchant produced by this method CH408587A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES71426A DE1246353B (en) 1960-11-26 1960-11-26 Use of a viscosity-increasing agent in a caustic liquid

Publications (1)

Publication Number Publication Date
CH408587A true CH408587A (en) 1966-02-28

Family

ID=7502457

Family Applications (1)

Application Number Title Priority Date Filing Date
CH851061A CH408587A (en) 1960-11-26 1961-07-20 A method for producing an etchant and an etchant produced by this method

Country Status (3)

Country Link
CH (1) CH408587A (en)
DE (1) DE1246353B (en)
GB (1) GB967246A (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1993920A (en) * 1933-09-18 1935-03-12 Costa Frank Etching compound
US2687345A (en) * 1950-11-22 1954-08-24 Printing Dev Inc Etching composition for lithographic plates
FR1105508A (en) * 1953-05-20 1955-12-05 Dow Chemical Co Improvements to a metal etching process and to an etching bath used in this process

Also Published As

Publication number Publication date
GB967246A (en) 1964-08-19
DE1246353B (en) 1967-08-03

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