CH410263A - Disque pour pompe à vide turbomoléculaire - Google Patents
Disque pour pompe à vide turbomoléculaireInfo
- Publication number
- CH410263A CH410263A CH838462A CH838462A CH410263A CH 410263 A CH410263 A CH 410263A CH 838462 A CH838462 A CH 838462A CH 838462 A CH838462 A CH 838462A CH 410263 A CH410263 A CH 410263A
- Authority
- CH
- Switzerland
- Prior art keywords
- vacuum pump
- turbomolecular vacuum
- pump disc
- disc
- turbomolecular
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR870094A FR1306013A (fr) | 1961-08-04 | 1961-08-04 | Perfectionnements aux pompes à vide turbomoléculaires |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH410263A true CH410263A (fr) | 1966-03-31 |
Family
ID=8760781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH838462A CH410263A (fr) | 1961-08-04 | 1962-07-12 | Disque pour pompe à vide turbomoléculaire |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE619945A (fr) |
| CH (1) | CH410263A (fr) |
| DE (1) | DE1428238B2 (fr) |
| FR (1) | FR1306013A (fr) |
| GB (1) | GB1019272A (fr) |
| LU (1) | LU42061A1 (fr) |
| NL (1) | NL139579B (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3507274A1 (de) * | 1985-03-01 | 1986-09-04 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen |
| JPH1089284A (ja) * | 1996-09-12 | 1998-04-07 | Seiko Seiki Co Ltd | ターボ分子ポンプ |
| JP3047292B1 (ja) | 1998-11-24 | 2000-05-29 | セイコー精機株式会社 | ターボ分子ポンプ及び真空装置 |
| DE10103230A1 (de) * | 2001-01-25 | 2002-08-01 | Leybold Vakuum Gmbh | Turbomolekularvakuumpumpe mit Rotor-und Statorschaufeln |
| DE102007006915A1 (de) * | 2007-02-13 | 2008-08-14 | Oerlikon Leybold Vacuum Gmbh | Rotorelement für Turbopumpenrotoren sowie Turbopumpenrotor |
-
1961
- 1961-08-04 FR FR870094A patent/FR1306013A/fr not_active Expired
-
1962
- 1962-07-09 BE BE619945A patent/BE619945A/fr unknown
- 1962-07-12 CH CH838462A patent/CH410263A/fr unknown
- 1962-07-14 LU LU42061D patent/LU42061A1/xx unknown
- 1962-07-23 NL NL281280A patent/NL139579B/xx not_active IP Right Cessation
- 1962-08-01 DE DE19621428238 patent/DE1428238B2/de active Pending
- 1962-08-02 GB GB2968962A patent/GB1019272A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1019272A (en) | 1966-02-02 |
| NL139579B (nl) | 1973-08-15 |
| BE619945A (fr) | 1963-01-09 |
| LU42061A1 (fr) | 1962-09-14 |
| FR1306013A (fr) | 1962-10-13 |
| DE1428238A1 (de) | 1969-08-07 |
| DE1428238B2 (de) | 1971-11-25 |
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