CH413146A - electron microscope - Google Patents

electron microscope

Info

Publication number
CH413146A
CH413146A CH822963A CH822963A CH413146A CH 413146 A CH413146 A CH 413146A CH 822963 A CH822963 A CH 822963A CH 822963 A CH822963 A CH 822963A CH 413146 A CH413146 A CH 413146A
Authority
CH
Switzerland
Prior art keywords
electron microscope
microscope
electron
Prior art date
Application number
CH822963A
Other languages
German (de)
Inventor
Pictari Wilska Alvar
Original Assignee
Philips Electronic Pharma
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic Pharma filed Critical Philips Electronic Pharma
Publication of CH413146A publication Critical patent/CH413146A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CH822963A 1962-07-05 1963-07-03 electron microscope CH413146A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US207680A US3150256A (en) 1962-07-05 1962-07-05 Column for electron microscopes

Publications (1)

Publication Number Publication Date
CH413146A true CH413146A (en) 1966-05-15

Family

ID=22771559

Family Applications (1)

Application Number Title Priority Date Filing Date
CH822963A CH413146A (en) 1962-07-05 1963-07-03 electron microscope

Country Status (7)

Country Link
US (1) US3150256A (en)
BE (1) BE634472A (en)
CH (1) CH413146A (en)
DE (1) DE1464352B2 (en)
GB (1) GB1049327A (en)
NL (1) NL294725A (en)
SE (1) SE320444B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3299308A (en) * 1963-07-19 1967-01-17 Temescal Metallurgical Corp Electron beam traverse of narrow aperture in barrier separating regions of differentpressure
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements
DE3328172A1 (en) * 1983-08-04 1985-02-14 Leybold-Heraeus GmbH, 5000 Köln ELECTRON BEAM CANNON

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE904096C (en) * 1940-10-09 1954-02-15 Siemens Ag Corpuscular beam microscope
DE926266C (en) * 1948-10-02 1955-04-14 Manfred Von Ardenne Electron microscope with exchangeable pole shoe insert body transversely to the beam direction
DE903017C (en) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Manufacture of small balls from high-fusible materials
CH332306A (en) * 1955-05-10 1958-08-31 Ardenne Manfred Von Polarization charge-free screen for electron and ion devices

Also Published As

Publication number Publication date
US3150256A (en) 1964-09-22
DE1464352A1 (en) 1969-03-13
DE1464352B2 (en) 1972-04-06
NL294725A (en)
GB1049327A (en) 1966-11-23
SE320444B (en) 1970-02-09
BE634472A (en) 1964-01-03

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