CH431131A - Kaltkathodenionisationsmanometer - Google Patents

Kaltkathodenionisationsmanometer

Info

Publication number
CH431131A
CH431131A CH149966A CH149966A CH431131A CH 431131 A CH431131 A CH 431131A CH 149966 A CH149966 A CH 149966A CH 149966 A CH149966 A CH 149966A CH 431131 A CH431131 A CH 431131A
Authority
CH
Switzerland
Prior art keywords
cold cathode
cathode ionization
ionization manometer
manometer
cold
Prior art date
Application number
CH149966A
Other languages
English (en)
Inventor
Schaedler Walter
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH149966A priority Critical patent/CH431131A/de
Priority to NL6604138A priority patent/NL6604138A/xx
Priority to DE1648352A priority patent/DE1648352B2/de
Priority to GB4634/67A priority patent/GB1131576A/en
Priority to US613312A priority patent/US3382389A/en
Priority to FR93410A priority patent/FR1509847A/fr
Publication of CH431131A publication Critical patent/CH431131A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
CH149966A 1966-02-02 1966-02-02 Kaltkathodenionisationsmanometer CH431131A (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH149966A CH431131A (de) 1966-02-02 1966-02-02 Kaltkathodenionisationsmanometer
NL6604138A NL6604138A (de) 1966-02-02 1966-03-29
DE1648352A DE1648352B2 (de) 1966-02-02 1967-01-27 Kaltkathodenionisationsmanometer
GB4634/67A GB1131576A (en) 1966-02-02 1967-01-31 Improvements in and relating to cold cathode ionisation manometers
US613312A US3382389A (en) 1966-02-02 1967-02-01 Cold cathode ionization gauge with a separate ionization chamber connected to the measuring chamber
FR93410A FR1509847A (fr) 1966-02-02 1967-02-02 Manomètre à ionisation à cathode froide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH149966A CH431131A (de) 1966-02-02 1966-02-02 Kaltkathodenionisationsmanometer

Publications (1)

Publication Number Publication Date
CH431131A true CH431131A (de) 1967-02-28

Family

ID=4211874

Family Applications (1)

Application Number Title Priority Date Filing Date
CH149966A CH431131A (de) 1966-02-02 1966-02-02 Kaltkathodenionisationsmanometer

Country Status (6)

Country Link
US (1) US3382389A (de)
CH (1) CH431131A (de)
DE (1) DE1648352B2 (de)
FR (1) FR1509847A (de)
GB (1) GB1131576A (de)
NL (1) NL6604138A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10243634B4 (de) * 2002-09-19 2005-02-03 Otto-Von-Guericke-Universität Magdeburg Kaltkatoden-Ionisationsmanometer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9111747D0 (en) * 1991-05-31 1991-07-24 Boc Group Plc Improvements relating to vacuum pumps
FR2920539B1 (fr) * 2007-08-27 2010-05-28 Alcatel Lucent Systeme d'analyse de gaz a basse pression par spectroscopie d'emission optique

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2941099A (en) * 1958-11-17 1960-06-14 Central Scientific Co Cold cathode ionization gauge
US3267313A (en) * 1961-11-03 1966-08-16 Gca Corp Cold cathode magnetron type ionization gauge
US3171081A (en) * 1962-02-19 1965-02-23 Donald C Garwood Ionization vacuum gauge
US3244990A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron vacuum tube employing orbiting electrons

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10243634B4 (de) * 2002-09-19 2005-02-03 Otto-Von-Guericke-Universität Magdeburg Kaltkatoden-Ionisationsmanometer
US7173430B2 (en) 2002-09-19 2007-02-06 Otto-Von-Guericke Universitaet Magdeburg Cold-cathode ionization manometer having a longer service life due to two separate cathodes

Also Published As

Publication number Publication date
NL6604138A (de) 1967-08-03
US3382389A (en) 1968-05-07
FR1509847A (fr) 1968-01-12
DE1648352A1 (de) 1971-03-25
GB1131576A (en) 1968-10-23
DE1648352B2 (de) 1973-11-29

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