CH434548A - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
CH434548A
CH434548A CH1479364A CH1479364A CH434548A CH 434548 A CH434548 A CH 434548A CH 1479364 A CH1479364 A CH 1479364A CH 1479364 A CH1479364 A CH 1479364A CH 434548 A CH434548 A CH 434548A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Application number
CH1479364A
Other languages
English (en)
Inventor
Lawrence Jepsen Robert
Tony King Leonard
Mont Rogers Rene
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH434548A publication Critical patent/CH434548A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385—Exhausting vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
CH1479364A 1959-03-30 1960-03-29 Vakuumpumpe CH434548A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US802731A US3116764A (en) 1959-03-30 1959-03-30 High vacuum method and apparatus

Publications (1)

Publication Number Publication Date
CH434548A true CH434548A (de) 1967-04-30

Family

ID=25184539

Family Applications (3)

Application Number Title Priority Date Filing Date
CH1479364A CH434548A (de) 1959-03-30 1960-03-29 Vakuumpumpe
CH352360A CH385408A (de) 1959-03-30 1960-03-29 Verfahren zur Erzielung eines Hochvakuums und Anordnung zur Ausführung des Verfahrens
CH1479464A CH439570A (de) 1959-03-30 1960-03-29 Verfahren zur Erzielung eines Hochvakuums in einem Vakuumsystem

Family Applications After (2)

Application Number Title Priority Date Filing Date
CH352360A CH385408A (de) 1959-03-30 1960-03-29 Verfahren zur Erzielung eines Hochvakuums und Anordnung zur Ausführung des Verfahrens
CH1479464A CH439570A (de) 1959-03-30 1960-03-29 Verfahren zur Erzielung eines Hochvakuums in einem Vakuumsystem

Country Status (5)

Country Link
US (1) US3116764A (de)
CH (3) CH434548A (de)
DE (2) DE1414568A1 (de)
FR (1) FR1248387A (de)
GB (3) GB932012A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2481428A1 (fr) * 1980-04-29 1981-10-30 Sulzer Ag Dispositif pour produire du froid

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3172745A (en) * 1965-03-09 Sorption pump apparatus
US3172748A (en) * 1965-03-09 Sorption pump
US3197945A (en) * 1961-02-27 1965-08-03 Varian Associates Sorption pump apparatus
US3200569A (en) * 1962-01-31 1965-08-17 Varian Associates Sorption gas and vapor trap apparatus
US3338034A (en) * 1963-11-12 1967-08-29 Union Carbide Corp Adsorbent-coated thermal panels
US3296773A (en) * 1964-03-24 1967-01-10 Union Carbide Corp Adsorbent-coated thermal panels
US3332213A (en) * 1964-08-19 1967-07-25 Union Carbide Corp Method of cryosorption pumping
US3300992A (en) * 1964-11-03 1967-01-31 Pittsburgh Activated Carbon Co High vacuum pumping with impregnated adsorbents
US3383032A (en) * 1967-01-31 1968-05-14 Atomic Energy Commission Usa Vacuum pumping method and apparatus
DE1619995A1 (de) * 1967-03-11 1971-07-01 Siemens Ag Verfahren zum Beseitigen von Kohlenstoffverunreinigungen in einem Siliziumkoerper und Vorrichtung zur Durchfuehrung dieses Verfahrens
US3811794A (en) * 1972-11-22 1974-05-21 Bell Telephone Labor Inc Ultrahigh vacuum sublimation pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1189664A (en) * 1915-02-12 1916-07-04 Georges Claude Neon-tube.
US1789556A (en) * 1925-09-16 1931-01-20 Rainbow Light Inc Method of manufacturing gas-filled envelopes
US1874537A (en) * 1930-10-23 1932-08-30 Bell Telephone Labor Inc Manufacture of vacuum devices
US2749002A (en) * 1954-01-28 1956-06-05 Westinghouse Electric Corp Method and apparatus for exhausting incandescent lamps
US2841323A (en) * 1954-11-19 1958-07-01 Rca Corp Adsorption pumping
DE1010695B (de) * 1955-08-05 1957-06-19 Commissariat Energie Atomique Verfahren zur Vakuumerzeugung mittels einer Diffusionspumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2481428A1 (fr) * 1980-04-29 1981-10-30 Sulzer Ag Dispositif pour produire du froid

Also Published As

Publication number Publication date
DE1414568A1 (de) 1969-06-19
GB932012A (en) 1963-07-24
CH439570A (de) 1967-07-15
US3116764A (en) 1964-01-07
DE1136448C2 (de) 1973-02-01
DE1136448B (de) 1962-09-13
GB932014A (en) 1963-07-24
GB932013A (en) 1963-07-24
FR1248387A (fr) 1960-12-09
CH385408A (de) 1964-12-15

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