CH450856A - Selective etching process for silicon - Google Patents
Selective etching process for siliconInfo
- Publication number
- CH450856A CH450856A CH563866A CH563866A CH450856A CH 450856 A CH450856 A CH 450856A CH 563866 A CH563866 A CH 563866A CH 563866 A CH563866 A CH 563866A CH 450856 A CH450856 A CH 450856A
- Authority
- CH
- Switzerland
- Prior art keywords
- silicon
- etching process
- selective etching
- selective
- etching
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
- C25F1/02—Pickling; Descaling
- C25F1/12—Pickling; Descaling in melts
- C25F1/14—Iron or steel
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/61—Electrolytic etching
- H10P50/613—Electrolytic etching of Group IV materials
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR16295A FR1442535A (en) | 1965-05-07 | 1965-05-07 | Selective etching process for silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH450856A true CH450856A (en) | 1968-04-30 |
Family
ID=8578284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH563866A CH450856A (en) | 1965-05-07 | 1966-04-18 | Selective etching process for silicon |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE679812A (en) |
| CH (1) | CH450856A (en) |
| DE (1) | DE1496764A1 (en) |
| FR (1) | FR1442535A (en) |
| GB (1) | GB1145876A (en) |
| LU (1) | LU50965A1 (en) |
| NL (1) | NL6605960A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9184364B2 (en) | 2005-03-02 | 2015-11-10 | Rosemount Inc. | Pipeline thermoelectric generator assembly |
| CN100595894C (en) * | 2005-10-28 | 2010-03-24 | 关东化学株式会社 | Palladium selective etchant and method for controlling the selectivity of etching |
| RU2308786C1 (en) * | 2006-05-26 | 2007-10-20 | Государственное образовательное учреждение высшего профессионального образования "Брянская государственная инженерно-технологическая академия" | Solution for electrochemical dissolution of silicon |
-
1965
- 1965-05-07 FR FR16295A patent/FR1442535A/en not_active Expired
-
1966
- 1966-04-18 CH CH563866A patent/CH450856A/en unknown
- 1966-04-21 BE BE679812D patent/BE679812A/xx unknown
- 1966-04-25 LU LU50965A patent/LU50965A1/xx unknown
- 1966-05-03 NL NL6605960A patent/NL6605960A/xx unknown
- 1966-05-04 DE DE19661496764 patent/DE1496764A1/en active Pending
- 1966-05-06 GB GB20292/66A patent/GB1145876A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6605960A (en) | 1966-11-08 |
| FR1442535A (en) | 1966-06-17 |
| LU50965A1 (en) | 1966-10-25 |
| GB1145876A (en) | 1969-03-19 |
| DE1496764A1 (en) | 1969-04-10 |
| BE679812A (en) | 1966-10-21 |
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