CH451388A - Einrichtung zur Evakuierung von Rezipienten - Google Patents

Einrichtung zur Evakuierung von Rezipienten

Info

Publication number
CH451388A
CH451388A CH286767A CH286767A CH451388A CH 451388 A CH451388 A CH 451388A CH 286767 A CH286767 A CH 286767A CH 286767 A CH286767 A CH 286767A CH 451388 A CH451388 A CH 451388A
Authority
CH
Switzerland
Prior art keywords
evacuating
recipients
evacuating recipients
Prior art date
Application number
CH286767A
Other languages
English (en)
Inventor
Ruhe Jochen
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL130193D priority Critical patent/NL130193C/xx
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH286767A priority patent/CH451388A/de
Priority to NL6706894A priority patent/NL6706894A/xx
Priority to GB386668A priority patent/GB1150536A/en
Priority to FR1556489D priority patent/FR1556489A/fr
Publication of CH451388A publication Critical patent/CH451388A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CH286767A 1967-02-23 1967-02-23 Einrichtung zur Evakuierung von Rezipienten CH451388A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL130193D NL130193C (de) 1967-02-23
CH286767A CH451388A (de) 1967-02-23 1967-02-23 Einrichtung zur Evakuierung von Rezipienten
NL6706894A NL6706894A (de) 1967-02-23 1967-05-18
GB386668A GB1150536A (en) 1967-02-23 1968-01-25 Improvements in and relating to the Evacuation of Receptacles
FR1556489D FR1556489A (de) 1967-02-23 1968-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH286767A CH451388A (de) 1967-02-23 1967-02-23 Einrichtung zur Evakuierung von Rezipienten

Publications (1)

Publication Number Publication Date
CH451388A true CH451388A (de) 1968-05-15

Family

ID=4243357

Family Applications (1)

Application Number Title Priority Date Filing Date
CH286767A CH451388A (de) 1967-02-23 1967-02-23 Einrichtung zur Evakuierung von Rezipienten

Country Status (4)

Country Link
CH (1) CH451388A (de)
FR (1) FR1556489A (de)
GB (1) GB1150536A (de)
NL (2) NL6706894A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011002935A1 (de) * 2011-01-20 2012-07-26 Siemens Aktiengesellschaft Vorrichtung zum Absaugen von Schutzgas aus einem Behälter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011002935A1 (de) * 2011-01-20 2012-07-26 Siemens Aktiengesellschaft Vorrichtung zum Absaugen von Schutzgas aus einem Behälter
DE102011002935B4 (de) * 2011-01-20 2013-12-24 Siemens Aktiengesellschaft Vorrichtung zum Absaugen von Schutzgas aus einem Behälter

Also Published As

Publication number Publication date
NL130193C (de)
FR1556489A (de) 1969-02-07
NL6706894A (de) 1968-08-26
GB1150536A (en) 1969-04-30

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