CH457631A - Hollow cathode for generating an electron beam through impact ionization - Google Patents

Hollow cathode for generating an electron beam through impact ionization

Info

Publication number
CH457631A
CH457631A CH1673865A CH1673865A CH457631A CH 457631 A CH457631 A CH 457631A CH 1673865 A CH1673865 A CH 1673865A CH 1673865 A CH1673865 A CH 1673865A CH 457631 A CH457631 A CH 457631A
Authority
CH
Switzerland
Prior art keywords
generating
electron beam
hollow cathode
impact ionization
ionization
Prior art date
Application number
CH1673865A
Other languages
German (de)
Inventor
Joaquin Ferreira Fernand
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of CH457631A publication Critical patent/CH457631A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Arc Welding In General (AREA)
CH1673865A 1964-12-10 1965-12-03 Hollow cathode for generating an electron beam through impact ionization CH457631A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US417399A US3381157A (en) 1964-12-10 1964-12-10 Annular hollow cathode discharge apparatus

Publications (1)

Publication Number Publication Date
CH457631A true CH457631A (en) 1968-06-15

Family

ID=23653867

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1673865A CH457631A (en) 1964-12-10 1965-12-03 Hollow cathode for generating an electron beam through impact ionization

Country Status (9)

Country Link
US (1) US3381157A (en)
BE (1) BE673420A (en)
CH (1) CH457631A (en)
DE (1) DE1514990A1 (en)
ES (1) ES320887A1 (en)
FR (1) FR1455620A (en)
GB (1) GB1121115A (en)
IL (1) IL24630A (en)
NL (1) NL6516051A (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5552675A (en) * 1959-04-08 1996-09-03 Lemelson; Jerome H. High temperature reaction apparatus
US3452179A (en) * 1967-04-12 1969-06-24 Us Air Force Electron optical system
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
US3492525A (en) * 1968-03-11 1970-01-27 United Aircraft Corp Sectional hollow cathode discharge apparatus
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
US3769008A (en) * 1971-05-19 1973-10-30 B Borok Method for sintering workpieces of pressed powdered refractory metal or alloy and vacuum furnace for performing the same
JPS547321B2 (en) * 1973-11-21 1979-04-05
US4377773A (en) * 1980-12-12 1983-03-22 The United States Of America As Represented By The Department Of Energy Negative ion source with hollow cathode discharge plasma
GB8601421D0 (en) * 1986-01-21 1986-02-26 Welding Inst Charged particle beam generator
GB2194673B (en) * 1986-08-30 1990-10-24 English Electric Valve Co Ltd Apparatus for forming an electron beam sheet
FR2618602B1 (en) * 1987-07-22 1990-01-05 Centre Nat Rech Scient SOURCE OF ELECTRON
KR101602517B1 (en) 2008-08-04 2016-03-10 에이지씨 플랫 글래스 노스 아메리카, 인코퍼레이티드 Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
EP2401232B1 (en) * 2009-02-24 2016-01-06 University Of Virginia Patent Foundation Directed vapor deposition assisted by a coaxial hollow cathode plasma, and related method thereof
ES2900321T3 (en) 2014-12-05 2022-03-16 Agc Flat Glass Na Inc Plasma source using a particulate reducing coating and method of using a plasma source using a particulate reducing coating for deposition of thin film coatings and surface modification
MX2017007356A (en) 2014-12-05 2018-04-11 Agc Flat Glass Europe S A Hollow cathode plasma source.
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2084172A (en) * 1930-12-13 1937-06-15 Rca Corp Electron tube
GB888609A (en) * 1957-07-31 1962-01-31 Cie Francaise Thomsom Houston Improvements in and relating to electron emitting devices
US3262013A (en) * 1962-02-02 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device
US3210518A (en) * 1962-12-21 1965-10-05 Alloyd Electronics Corp Hollow cathode device
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus

Also Published As

Publication number Publication date
FR1455620A (en) 1966-10-14
US3381157A (en) 1968-04-30
ES320887A1 (en) 1966-09-01
DE1514990A1 (en) 1970-07-23
NL6516051A (en) 1966-06-13
GB1121115A (en) 1968-07-24
BE673420A (en) 1966-04-01
IL24630A (en) 1969-11-30

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