CH469103A - Verfahren zum Polieren der Oberfläche von Halbleiterkristallen - Google Patents
Verfahren zum Polieren der Oberfläche von HalbleiterkristallenInfo
- Publication number
- CH469103A CH469103A CH684466A CH684466A CH469103A CH 469103 A CH469103 A CH 469103A CH 684466 A CH684466 A CH 684466A CH 684466 A CH684466 A CH 684466A CH 469103 A CH469103 A CH 469103A
- Authority
- CH
- Switzerland
- Prior art keywords
- polishing
- semiconductor crystals
- crystals
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/12—Preparing bulk and homogeneous wafers
- H10P90/129—Preparing bulk and homogeneous wafers by polishing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/04—Heavy metals
- C23F3/06—Heavy metals with acidic solutions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/12—Preparing bulk and homogeneous wafers
- H10P90/126—Preparing bulk and homogeneous wafers by chemical etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US45479665A | 1965-05-11 | 1965-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH469103A true CH469103A (de) | 1969-02-28 |
Family
ID=23806130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH684466A CH469103A (de) | 1965-05-11 | 1966-05-11 | Verfahren zum Polieren der Oberfläche von Halbleiterkristallen |
Country Status (4)
| Country | Link |
|---|---|
| CH (1) | CH469103A (de) |
| DE (1) | DE1521728B2 (de) |
| GB (1) | GB1114609A (de) |
| NL (1) | NL6606411A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4838494A (de) * | 1971-09-18 | 1973-06-06 |
-
1965
- 1965-12-29 GB GB55082/65A patent/GB1114609A/en not_active Expired
-
1966
- 1966-05-03 DE DE19661521728 patent/DE1521728B2/de active Pending
- 1966-05-11 NL NL6606411A patent/NL6606411A/xx unknown
- 1966-05-11 CH CH684466A patent/CH469103A/de unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1521728A1 (de) | 1969-06-12 |
| GB1114609A (en) | 1968-05-22 |
| DE1521728B2 (de) | 1970-02-12 |
| NL6606411A (de) | 1966-11-14 |
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