CH470489A - Appareil à vide - Google Patents

Appareil à vide

Info

Publication number
CH470489A
CH470489A CH77168A CH77168A CH470489A CH 470489 A CH470489 A CH 470489A CH 77168 A CH77168 A CH 77168A CH 77168 A CH77168 A CH 77168A CH 470489 A CH470489 A CH 470489A
Authority
CH
Switzerland
Prior art keywords
vacuum device
vacuum
Prior art date
Application number
CH77168A
Other languages
English (en)
Inventor
John Butler Alan
Original Assignee
Bir Vac Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bir Vac Ltd filed Critical Bir Vac Ltd
Publication of CH470489A publication Critical patent/CH470489A/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/002—Devices involving relative movement between electron beam and workpiece
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH77168A 1966-03-25 1968-01-18 Appareil à vide CH470489A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1344866A GB1177081A (en) 1966-03-25 1966-03-25 Improvements in or relating to Vacuum Coating

Publications (1)

Publication Number Publication Date
CH470489A true CH470489A (fr) 1969-03-31

Family

ID=10023178

Family Applications (1)

Application Number Title Priority Date Filing Date
CH77168A CH470489A (fr) 1966-03-25 1968-01-18 Appareil à vide

Country Status (3)

Country Link
CH (1) CH470489A (fr)
FR (1) FR1568044A (fr)
GB (1) GB1177081A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8726639D0 (en) * 1987-11-13 1987-12-16 Vg Instr Groups Ltd Vacuum evaporation & deposition
GB0019848D0 (en) 2000-08-11 2000-09-27 Rtc Systems Ltd Apparatus and method for coating substrates
CN117737679B (zh) * 2023-12-22 2025-02-18 江苏锐虎机械科技有限公司 一种真空镀膜腔及包括该腔体的真空镀膜设备
CN118581429B (zh) * 2024-08-06 2024-11-15 苏州佑伦真空设备科技有限公司 一种蒸镀用自定位式坩埚

Also Published As

Publication number Publication date
GB1177081A (en) 1970-01-07
FR1568044A (fr) 1969-05-23

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Legal Events

Date Code Title Description
PL Patent ceased