CH475650A - Hochvakuum-Ionengetterpumpe - Google Patents

Hochvakuum-Ionengetterpumpe

Info

Publication number
CH475650A
CH475650A CH498568A CH498568A CH475650A CH 475650 A CH475650 A CH 475650A CH 498568 A CH498568 A CH 498568A CH 498568 A CH498568 A CH 498568A CH 475650 A CH475650 A CH 475650A
Authority
CH
Switzerland
Prior art keywords
high vacuum
getter pump
vacuum ion
ion getter
pump
Prior art date
Application number
CH498568A
Other languages
English (en)
Inventor
Colville Helmer John
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH475650A publication Critical patent/CH475650A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH498568A 1967-04-05 1968-04-04 Hochvakuum-Ionengetterpumpe CH475650A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US628590A US3416722A (en) 1967-04-05 1967-04-05 High vacuum pump employing apertured penning cells driving ion beams into a target covered by a getter sublimator

Publications (1)

Publication Number Publication Date
CH475650A true CH475650A (de) 1969-07-15

Family

ID=24519526

Family Applications (1)

Application Number Title Priority Date Filing Date
CH498568A CH475650A (de) 1967-04-05 1968-04-04 Hochvakuum-Ionengetterpumpe

Country Status (5)

Country Link
US (1) US3416722A (de)
CH (1) CH475650A (de)
DE (1) DE1764062A1 (de)
FR (1) FR1564151A (de)
GB (1) GB1182725A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1095217A4 (de) * 1998-06-29 2006-08-02 Tokyo Electron Ltd Vakuumpumpe für plasma
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
EP2562786B1 (de) * 2010-04-02 2019-06-26 National Institute of Information and Communications Technology Ionenpumpensystem
US10262845B2 (en) * 2015-02-10 2019-04-16 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3018944A (en) * 1958-06-16 1962-01-30 Varian Associates Electrical vacuum pump apparatus
US3212442A (en) * 1962-04-23 1965-10-19 Litton Systems Inc Ion drag pumps

Also Published As

Publication number Publication date
DE1764062A1 (de) 1971-04-29
US3416722A (en) 1968-12-17
GB1182725A (en) 1970-03-04
FR1564151A (de) 1969-04-18

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Legal Events

Date Code Title Description
PL Patent ceased