CH478923A - Verdampfungseinrichtung für die Herstellung dünner Oberflächenschichten - Google Patents

Verdampfungseinrichtung für die Herstellung dünner Oberflächenschichten

Info

Publication number
CH478923A
CH478923A CH973867A CH973867A CH478923A CH 478923 A CH478923 A CH 478923A CH 973867 A CH973867 A CH 973867A CH 973867 A CH973867 A CH 973867A CH 478923 A CH478923 A CH 478923A
Authority
CH
Switzerland
Prior art keywords
production
surface layers
evaporation device
thin surface
thin
Prior art date
Application number
CH973867A
Other languages
English (en)
Inventor
Gmeiner Oskar
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL134358D priority Critical patent/NL134358C/xx
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH973867A priority patent/CH478923A/de
Priority to NL6713290A priority patent/NL6713290A/xx
Priority to DE19681765636 priority patent/DE1765636A1/de
Priority to FR1578218D priority patent/FR1578218A/fr
Publication of CH478923A publication Critical patent/CH478923A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH973867A 1967-07-06 1967-07-06 Verdampfungseinrichtung für die Herstellung dünner Oberflächenschichten CH478923A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL134358D NL134358C (de) 1967-07-06
CH973867A CH478923A (de) 1967-07-06 1967-07-06 Verdampfungseinrichtung für die Herstellung dünner Oberflächenschichten
NL6713290A NL6713290A (de) 1967-07-06 1967-09-29
DE19681765636 DE1765636A1 (de) 1967-07-06 1968-06-21 Verdampfungseinrichtung fuer die Herstellung duenner Oberflaechenschichten
FR1578218D FR1578218A (de) 1967-07-06 1968-07-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH973867A CH478923A (de) 1967-07-06 1967-07-06 Verdampfungseinrichtung für die Herstellung dünner Oberflächenschichten

Publications (1)

Publication Number Publication Date
CH478923A true CH478923A (de) 1969-09-30

Family

ID=4355124

Family Applications (1)

Application Number Title Priority Date Filing Date
CH973867A CH478923A (de) 1967-07-06 1967-07-06 Verdampfungseinrichtung für die Herstellung dünner Oberflächenschichten

Country Status (4)

Country Link
CH (1) CH478923A (de)
DE (1) DE1765636A1 (de)
FR (1) FR1578218A (de)
NL (2) NL6713290A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016121791A1 (de) * 2016-11-14 2018-05-17 Thomas Emde Beschichtungsverfahren, Beschichtungseinrichtung und Bauteil

Also Published As

Publication number Publication date
FR1578218A (de) 1969-08-14
NL6713290A (de) 1969-01-08
NL134358C (de)
DE1765636A1 (de) 1971-10-14

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Legal Events

Date Code Title Description
PL Patent ceased