CH480732A - Gasentladungsvorrichtung, insbesondere Ionenpumpe - Google Patents

Gasentladungsvorrichtung, insbesondere Ionenpumpe

Info

Publication number
CH480732A
CH480732A CH1715867A CH1715867A CH480732A CH 480732 A CH480732 A CH 480732A CH 1715867 A CH1715867 A CH 1715867A CH 1715867 A CH1715867 A CH 1715867A CH 480732 A CH480732 A CH 480732A
Authority
CH
Switzerland
Prior art keywords
gas discharge
discharge device
ion pump
ion
pump
Prior art date
Application number
CH1715867A
Other languages
English (en)
Inventor
Martin Klopfer Anton
Flunkert Horst
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH480732A publication Critical patent/CH480732A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH1715867A 1966-12-12 1967-12-07 Gasentladungsvorrichtung, insbesondere Ionenpumpe CH480732A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5552766A GB1204325A (en) 1966-12-12 1966-12-12 Improvements in or relating to ionisation apparatus

Publications (1)

Publication Number Publication Date
CH480732A true CH480732A (de) 1969-10-31

Family

ID=10474180

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1715867A CH480732A (de) 1966-12-12 1967-12-07 Gasentladungsvorrichtung, insbesondere Ionenpumpe

Country Status (4)

Country Link
CH (1) CH480732A (de)
DE (1) DE1539154C3 (de)
GB (1) GB1204325A (de)
NL (1) NL6716509A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005010716A1 (de) 2005-03-09 2006-09-14 Inficon Gmbh Kaltkathoden-Drucksensor

Also Published As

Publication number Publication date
DE1539154C3 (de) 1978-09-07
NL6716509A (de) 1968-06-13
DE1539154B2 (de) 1977-12-29
DE1539154A1 (de) 1970-02-26
GB1204325A (en) 1970-09-03

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Legal Events

Date Code Title Description
PL Patent ceased