CH490514A - Verfahren zur Herstellung von Siliziumnitridschichten - Google Patents
Verfahren zur Herstellung von SiliziumnitridschichtenInfo
- Publication number
- CH490514A CH490514A CH874067A CH874067A CH490514A CH 490514 A CH490514 A CH 490514A CH 874067 A CH874067 A CH 874067A CH 874067 A CH874067 A CH 874067A CH 490514 A CH490514 A CH 490514A
- Authority
- CH
- Switzerland
- Prior art keywords
- production
- silicon nitride
- nitride layers
- layers
- silicon
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/69—Inorganic materials
- H10P14/694—Inorganic materials composed of nitrides
- H10P14/6943—Inorganic materials composed of nitrides containing silicon
- H10P14/69433—Inorganic materials composed of nitrides containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6316—Formation by nitridation, e.g. nitridation of the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6322—Formation by thermal treatments
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB28176/66A GB1203211A (en) | 1966-08-23 | 1966-08-23 | Improvements in the formation of layers on silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH490514A true CH490514A (de) | 1970-05-15 |
Family
ID=10271494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH874067A CH490514A (de) | 1966-08-23 | 1967-06-20 | Verfahren zur Herstellung von Siliziumnitridschichten |
Country Status (4)
| Country | Link |
|---|---|
| CH (1) | CH490514A (de) |
| DE (1) | DE1621300A1 (de) |
| GB (1) | GB1203211A (de) |
| NL (1) | NL6708533A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0015694A3 (en) * | 1979-03-09 | 1980-11-12 | Fujitsu Limited | Method for forming an insulating film on a semiconductor substrate surface |
-
1966
- 1966-08-23 GB GB28176/66A patent/GB1203211A/en not_active Expired
-
1967
- 1967-06-20 CH CH874067A patent/CH490514A/de not_active IP Right Cessation
- 1967-06-20 DE DE19671621300 patent/DE1621300A1/de active Pending
- 1967-06-20 NL NL6708533A patent/NL6708533A/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0015694A3 (en) * | 1979-03-09 | 1980-11-12 | Fujitsu Limited | Method for forming an insulating film on a semiconductor substrate surface |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6708533A (de) | 1967-12-27 |
| DE1621300A1 (de) | 1971-06-24 |
| GB1203211A (en) | 1970-08-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |