CH492217A - Korpuskularstrahlen-Mikroskop - Google Patents

Korpuskularstrahlen-Mikroskop

Info

Publication number
CH492217A
CH492217A CH890268A CH890268A CH492217A CH 492217 A CH492217 A CH 492217A CH 890268 A CH890268 A CH 890268A CH 890268 A CH890268 A CH 890268A CH 492217 A CH492217 A CH 492217A
Authority
CH
Switzerland
Prior art keywords
microscope
corpuscular rays
corpuscular
rays
rays microscope
Prior art date
Application number
CH890268A
Other languages
English (en)
Inventor
Anthony Tobias Cornelius
Original Assignee
Atomic Energy Commission
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Commission filed Critical Atomic Energy Commission
Publication of CH492217A publication Critical patent/CH492217A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H01J2237/24415—X-ray
    • H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CH890268A 1967-06-15 1968-06-14 Korpuskularstrahlen-Mikroskop CH492217A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64680267A 1967-06-15 1967-06-15

Publications (1)

Publication Number Publication Date
CH492217A true CH492217A (de) 1970-06-15

Family

ID=24594515

Family Applications (1)

Application Number Title Priority Date Filing Date
CH890268A CH492217A (de) 1967-06-15 1968-06-14 Korpuskularstrahlen-Mikroskop

Country Status (5)

Country Link
US (1) US3488494A (de)
CH (1) CH492217A (de)
DE (1) DE1764467A1 (de)
FR (1) FR1572636A (de)
GB (1) GB1182985A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3676676A (en) * 1970-10-30 1972-07-11 Bendix Corp Low energy particle counter with two-dimensional position sensing
US20090072150A1 (en) * 2006-04-20 2009-03-19 Trissel Richard G Scintillator-based micro-radiographic imaging device
CN109087839B (zh) * 2018-07-20 2020-01-10 姚智伟 用于测试和标定场发射电子源阵列的场发射显微镜系统
CN112526576B (zh) * 2020-11-26 2022-10-04 苏州大学 眼晶状体剂量测量装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL270945A (de) * 1961-03-02
US3370168A (en) * 1964-01-14 1968-02-20 Hitachi Ltd Anode aperture plate for a television camera tube in an electron microscope comprising a stainless steel foil
US3370167A (en) * 1964-07-13 1968-02-20 American Mach & Foundry Proton-excited soft x-ray analyzer having a rotatable target for selectively directing the x-rays to different detectors

Also Published As

Publication number Publication date
GB1182985A (en) 1970-03-04
US3488494A (en) 1970-01-06
DE1764467A1 (de) 1971-09-16
FR1572636A (de) 1969-06-27

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Legal Events

Date Code Title Description
PL Patent ceased