CH493934A - Elektronenemissionsmikroskop - Google Patents

Elektronenemissionsmikroskop

Info

Publication number
CH493934A
CH493934A CH665969A CH665969A CH493934A CH 493934 A CH493934 A CH 493934A CH 665969 A CH665969 A CH 665969A CH 665969 A CH665969 A CH 665969A CH 493934 A CH493934 A CH 493934A
Authority
CH
Switzerland
Prior art keywords
electron emission
emission microscope
microscope
electron
emission
Prior art date
Application number
CH665969A
Other languages
English (en)
Inventor
Lienhard Dr Wegmann
Rainer Dr Buhl
Graber Rolf
Gribi Marcel
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH665969A priority Critical patent/CH493934A/de
Priority to NL6908987A priority patent/NL143728B/xx
Priority to DE19702009005 priority patent/DE2009005C3/de
Priority to GB1435670A priority patent/GB1279049A/en
Priority to FR7014534A priority patent/FR2040282A1/fr
Publication of CH493934A publication Critical patent/CH493934A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CH665969A 1969-04-28 1969-04-28 Elektronenemissionsmikroskop CH493934A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH665969A CH493934A (de) 1969-04-28 1969-04-28 Elektronenemissionsmikroskop
NL6908987A NL143728B (nl) 1969-04-28 1969-06-12 Elektronen-emissie-microscoop.
DE19702009005 DE2009005C3 (de) 1969-04-28 1970-02-26 Verfahren zur Abbildung von Objektoberflächen, welche mittels elektromagnetischer Strahlenquellen zur Photoemission von Elektronen angeregt werden und Elektronenemissionsmikroskop zur Durchführung des Verfahrens
GB1435670A GB1279049A (en) 1969-04-28 1970-03-24 Improvements in and relating to electron emission microscopes
FR7014534A FR2040282A1 (de) 1969-04-28 1970-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH665969A CH493934A (de) 1969-04-28 1969-04-28 Elektronenemissionsmikroskop

Publications (1)

Publication Number Publication Date
CH493934A true CH493934A (de) 1970-07-15

Family

ID=4313018

Family Applications (1)

Application Number Title Priority Date Filing Date
CH665969A CH493934A (de) 1969-04-28 1969-04-28 Elektronenemissionsmikroskop

Country Status (5)

Country Link
CH (1) CH493934A (de)
DE (1) DE2009005C3 (de)
FR (1) FR2040282A1 (de)
GB (1) GB1279049A (de)
NL (1) NL143728B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5963453B2 (ja) 2011-03-15 2016-08-03 株式会社荏原製作所 検査装置
JP7072805B2 (ja) * 2017-02-28 2022-05-23 国立大学法人東京工業大学 時間分解光電子顕微鏡装置および当該装置によるキャリアダイナミクス画像の取得方法

Also Published As

Publication number Publication date
DE2009005C3 (de) 1979-05-03
NL6908987A (de) 1970-10-30
DE2009005A1 (de) 1970-10-29
NL143728B (nl) 1974-10-15
DE2009005B2 (de) 1978-08-31
FR2040282A1 (de) 1971-01-22
GB1279049A (en) 1972-06-21

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Legal Events

Date Code Title Description
PL Patent ceased