CH503258A - Einrichtung mit einem Mikroskop und einem Positionsmessystem - Google Patents

Einrichtung mit einem Mikroskop und einem Positionsmessystem

Info

Publication number
CH503258A
CH503258A CH977169A CH977169A CH503258A CH 503258 A CH503258 A CH 503258A CH 977169 A CH977169 A CH 977169A CH 977169 A CH977169 A CH 977169A CH 503258 A CH503258 A CH 503258A
Authority
CH
Switzerland
Prior art keywords
microscope
measuring system
position measuring
measuring
Prior art date
Application number
CH977169A
Other languages
English (en)
Inventor
Horst Dr Burkhardt
Schwefel Ernst
Klepp Wendelin
Original Assignee
Heidenhain Gmbh Dr Johannes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681773877 external-priority patent/DE1773877A1/de
Priority claimed from DE19681798112 external-priority patent/DE1798112A1/de
Application filed by Heidenhain Gmbh Dr Johannes filed Critical Heidenhain Gmbh Dr Johannes
Publication of CH503258A publication Critical patent/CH503258A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/262—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with optical projection of a pointer or a scale

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
CH977169A 1968-07-20 1969-06-26 Einrichtung mit einem Mikroskop und einem Positionsmessystem CH503258A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19681773877 DE1773877A1 (de) 1968-07-20 1968-07-20 Einrichtung zum Bestimmen der Lage zweier relativ zueinander beweglicher Objekte
DE19681798112 DE1798112A1 (de) 1968-08-23 1968-08-23 Einrichtung zum Bestimmen der Lage zweier relativ zueinander beweglicher Objekte

Publications (1)

Publication Number Publication Date
CH503258A true CH503258A (de) 1971-02-15

Family

ID=25755645

Family Applications (1)

Application Number Title Priority Date Filing Date
CH977169A CH503258A (de) 1968-07-20 1969-06-26 Einrichtung mit einem Mikroskop und einem Positionsmessystem

Country Status (3)

Country Link
CH (1) CH503258A (de)
FR (1) FR2013411A1 (de)
GB (1) GB1270005A (de)

Also Published As

Publication number Publication date
FR2013411A1 (de) 1970-04-03
GB1270005A (en) 1972-04-12

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Legal Events

Date Code Title Description
PL Patent ceased