CH515071A - Verfahren und Vorrichtung zur Diffusionsbehandlung von Halbleiterplättchen - Google Patents

Verfahren und Vorrichtung zur Diffusionsbehandlung von Halbleiterplättchen

Info

Publication number
CH515071A
CH515071A CH1286970A CH1286970A CH515071A CH 515071 A CH515071 A CH 515071A CH 1286970 A CH1286970 A CH 1286970A CH 1286970 A CH1286970 A CH 1286970A CH 515071 A CH515071 A CH 515071A
Authority
CH
Switzerland
Prior art keywords
semiconductor wafers
diffusion treatment
diffusion
treatment
wafers
Prior art date
Application number
CH1286970A
Other languages
German (de)
English (en)
Inventor
A Mead Carver
O Mccaldin James
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of CH515071A publication Critical patent/CH515071A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/041—Doping control in crystal growth
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/107—Melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
CH1286970A 1969-09-24 1970-08-27 Verfahren und Vorrichtung zur Diffusionsbehandlung von Halbleiterplättchen CH515071A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86073669A 1969-09-24 1969-09-24

Publications (1)

Publication Number Publication Date
CH515071A true CH515071A (de) 1971-11-15

Family

ID=25333907

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1286970A CH515071A (de) 1969-09-24 1970-08-27 Verfahren und Vorrichtung zur Diffusionsbehandlung von Halbleiterplättchen

Country Status (9)

Country Link
US (1) US3650823A (fr)
BE (1) BE756471A (fr)
CA (1) CA935073A (fr)
CH (1) CH515071A (fr)
DE (1) DE2046036A1 (fr)
FR (1) FR2062230A5 (fr)
GB (1) GB1309108A (fr)
IL (1) IL35037A (fr)
NL (1) NL140435B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577131A (en) * 1980-06-16 1982-01-14 Junichi Nishizawa Manufacture of p-n junction
US5169799A (en) * 1988-03-16 1992-12-08 Sumitomo Electric Industries, Ltd. Method for forming a doped ZnSe single crystal
JP2717256B2 (ja) * 1988-03-16 1998-02-18 社団法人生産技術振興協会 半導体結晶
US6143630A (en) * 1994-06-09 2000-11-07 Texas Instruments Incorporated Method of impurity gettering
JP3823160B2 (ja) * 1997-04-03 2006-09-20 野村マイクロ・サイエンス株式会社 半導体基板内部の洗浄方法
US6270727B1 (en) 1998-07-31 2001-08-07 Leco Corporation Analytical crucible
US6333264B1 (en) 1998-09-02 2001-12-25 Micron Technology, Inc. Semiconductor processing method using high pressure liquid media treatment
US20030026601A1 (en) * 2001-07-31 2003-02-06 The Arizona Board Of Regents On Behalf Of The University Of Arizona Vapor deposition and in-situ purification of organic molecules
US7125453B2 (en) * 2002-01-31 2006-10-24 General Electric Company High temperature high pressure capsule for processing materials in supercritical fluids
US7063741B2 (en) * 2002-03-27 2006-06-20 General Electric Company High pressure high temperature growth of crystalline group III metal nitrides
JP4276627B2 (ja) 2005-01-12 2009-06-10 ソルボサーマル結晶成長技術研究組合 単結晶育成用圧力容器およびその製造方法
US7704324B2 (en) * 2005-01-25 2010-04-27 General Electric Company Apparatus for processing materials in supercritical fluids and methods thereof
US7942970B2 (en) 2005-12-20 2011-05-17 Momentive Performance Materials Inc. Apparatus for making crystalline composition

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3341355A (en) * 1962-10-19 1967-09-12 Fuller Merriam Company Process for impregnating porous bodies with a solid fusible substance

Also Published As

Publication number Publication date
NL7013967A (fr) 1971-03-26
BE756471A (fr) 1971-03-01
IL35037A0 (en) 1970-10-30
IL35037A (en) 1973-06-29
DE2046036A1 (de) 1971-04-01
US3650823A (en) 1972-03-21
FR2062230A5 (fr) 1971-06-25
CA935073A (en) 1973-10-09
GB1309108A (en) 1973-03-07
NL140435B (nl) 1973-12-17

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Legal Events

Date Code Title Description
PL Patent ceased