CH517833A - High frequency spray device - Google Patents

High frequency spray device

Info

Publication number
CH517833A
CH517833A CH865570A CH865570A CH517833A CH 517833 A CH517833 A CH 517833A CH 865570 A CH865570 A CH 865570A CH 865570 A CH865570 A CH 865570A CH 517833 A CH517833 A CH 517833A
Authority
CH
Switzerland
Prior art keywords
high frequency
spray device
frequency spray
spray
frequency
Prior art date
Application number
CH865570A
Other languages
German (de)
Inventor
Lang Albert Jr
Francis Herte Lawrence
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH517833A publication Critical patent/CH517833A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
CH865570A 1969-06-11 1970-09-09 High frequency spray device CH517833A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83224669A 1969-06-11 1969-06-11

Publications (1)

Publication Number Publication Date
CH517833A true CH517833A (en) 1972-01-15

Family

ID=25261097

Family Applications (1)

Application Number Title Priority Date Filing Date
CH865570A CH517833A (en) 1969-06-11 1970-09-09 High frequency spray device

Country Status (6)

Country Link
JP (1) JPS4820707B1 (en)
CA (1) CA918601A (en)
CH (1) CH517833A (en)
DE (1) DE2022957A1 (en)
FR (1) FR2049999A5 (en)
GB (1) GB1308243A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375213U (en) * 1976-11-26 1978-06-23
DE4042417C2 (en) * 1990-07-17 1993-11-25 Balzers Hochvakuum Etching or coating system and method for igniting or intermittent operation
DE4022708A1 (en) * 1990-07-17 1992-04-02 Balzers Hochvakuum ETCHING OR COATING PLANTS

Also Published As

Publication number Publication date
CA918601A (en) 1973-01-09
FR2049999A5 (en) 1971-03-26
JPS4820707B1 (en) 1973-06-22
DE2022957A1 (en) 1970-12-17
GB1308243A (en) 1973-02-21

Similar Documents

Publication Publication Date Title
CH515157A (en) Spray device
AT311538B (en) Atomizer
AR197994A1 (en) SPRAY DEVICE
CH447968A (en) Spray can
DK133771C (en) SPRAY MACHINE
BE744024A (en) MANIPULATOR-SYNTHETIZER
CH515439A (en) Valvola per aerosol
DE6946748U (en) SPRAY NOZZLE DEVICE
NL166368C (en) FREQUENCY SYNTHESIS DEVICE.
AT306980B (en) Aeroionizer
CH503663A (en) Cleaning device
CH483279A (en) Liquid atomizer
CH531898A (en) Plasma spray device
CH514048A (en) Component
CH506423A (en) Vibrator
CH495895A (en) Aerosol can
CH530919A (en) Aerosol atomizer
CH517833A (en) High frequency spray device
AT308413B (en) Drawing device
BE737728A (en) SPRAYER
AT296234B (en) Spray device
CH509647A (en) Disconnector
TR17787A (en) SET
RO73027A (en) INJECTION-INJECTION DEVICE
AT296576B (en) Fastening device

Legal Events

Date Code Title Description
PL Patent ceased