CH519933A - Method and device for the deposition of monocrystalline layers of material - Google Patents

Method and device for the deposition of monocrystalline layers of material

Info

Publication number
CH519933A
CH519933A CH644369A CH644369A CH519933A CH 519933 A CH519933 A CH 519933A CH 644369 A CH644369 A CH 644369A CH 644369 A CH644369 A CH 644369A CH 519933 A CH519933 A CH 519933A
Authority
CH
Switzerland
Prior art keywords
deposition
monocrystalline layers
monocrystalline
layers
Prior art date
Application number
CH644369A
Other languages
French (fr)
Inventor
Vanderschueren Emile
Original Assignee
Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Euratom filed Critical Euratom
Publication of CH519933A publication Critical patent/CH519933A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/08—Epitaxial-layer growth by condensing ionised vapours

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH644369A 1968-06-28 1969-04-28 Method and device for the deposition of monocrystalline layers of material CH519933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE717304 1968-06-28

Publications (1)

Publication Number Publication Date
CH519933A true CH519933A (en) 1972-03-15

Family

ID=3853165

Family Applications (1)

Application Number Title Priority Date Filing Date
CH644369A CH519933A (en) 1968-06-28 1969-04-28 Method and device for the deposition of monocrystalline layers of material

Country Status (4)

Country Link
BE (1) BE717304A (en)
CH (1) CH519933A (en)
GB (1) GB1234312A (en)
NL (1) NL6907944A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2643893C3 (en) * 1976-09-29 1981-01-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Process for the production of a layer provided with a structure on a substrate
GB2174108B (en) * 1985-04-04 1989-07-19 Sharp Kk Method for forming a polycrystalline silicon thin film
US4816293A (en) * 1986-03-27 1989-03-28 Mitsubishi Denki Kabushiki Kaisha Process for coating a workpiece with a ceramic material

Also Published As

Publication number Publication date
BE717304A (en) 1968-12-30
GB1234312A (en) 1971-06-03
NL6907944A (en) 1969-12-30

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Legal Events

Date Code Title Description
PL Patent ceased