CH522045A - Verfahren zum Herstellen einer gut haftenden, kontaktierbaren, aus Chrom oder Molybdän bestehenden Metallisierung auf Oberflächen von elektrischen Bauelementen - Google Patents

Verfahren zum Herstellen einer gut haftenden, kontaktierbaren, aus Chrom oder Molybdän bestehenden Metallisierung auf Oberflächen von elektrischen Bauelementen

Info

Publication number
CH522045A
CH522045A CH193671A CH193671A CH522045A CH 522045 A CH522045 A CH 522045A CH 193671 A CH193671 A CH 193671A CH 193671 A CH193671 A CH 193671A CH 522045 A CH522045 A CH 522045A
Authority
CH
Switzerland
Prior art keywords
contactable
molybdenum
adhering
chromium
producing
Prior art date
Application number
CH193671A
Other languages
English (en)
Inventor
Heinrich Dr Soehlbrand
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH522045A publication Critical patent/CH522045A/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/112—Cellulosic
CH193671A 1970-03-13 1971-02-10 Verfahren zum Herstellen einer gut haftenden, kontaktierbaren, aus Chrom oder Molybdän bestehenden Metallisierung auf Oberflächen von elektrischen Bauelementen CH522045A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19702012031 DE2012031A1 (de) 1970-03-13 1970-03-13 Verfahren zum Herstellen von aus Chrom oder Molybdän bestehenden Kontaktmetallschichten in Halbleiterbauelementen
DE19702012063 DE2012063A1 (de) 1970-03-13 1970-03-13 Verfahren zum Herstellen von aus Alu minium Legierungen bestehenden Kontakt metallschichten an Halbleiterbauelementen

Publications (1)

Publication Number Publication Date
CH522045A true CH522045A (de) 1972-04-30

Family

ID=25758815

Family Applications (1)

Application Number Title Priority Date Filing Date
CH193671A CH522045A (de) 1970-03-13 1971-02-10 Verfahren zum Herstellen einer gut haftenden, kontaktierbaren, aus Chrom oder Molybdän bestehenden Metallisierung auf Oberflächen von elektrischen Bauelementen

Country Status (7)

Country Link
US (1) US3723178A (de)
AT (2) AT318007B (de)
CH (1) CH522045A (de)
DE (2) DE2012063A1 (de)
FR (2) FR2081909A1 (de)
GB (2) GB1291209A (de)
NL (2) NL7103362A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2108849C3 (de) * 1971-02-25 1979-03-01 E W Wartenberg Verfahren zum Herstellen dünner, farbiger Lusteruberzüge auf Körpern aus glasiertem Porzellan, glasierter Keramik, Glas oder Emaille
FR2412164A1 (fr) * 1977-12-13 1979-07-13 Radiotechnique Compelec Procede de creation, par serigraphie, d'un contact a la surface d'un dispositif semi-conducteur et dispositif obtenu par ce procede
CA2024662A1 (en) * 1989-09-08 1991-03-09 Robert Oswald Monolithic series and parallel connected photovoltaic module
JP3724592B2 (ja) * 1993-07-26 2005-12-07 ハイニックス セミコンダクター アメリカ インコーポレイテッド 半導体基板の平坦化方法
DE102006021410B4 (de) * 2006-05-09 2009-07-16 Leonhard Kurz Gmbh & Co. Kg Verfahren zur Herstellung eines Mehrschichtgebildes und Verwendung des Verfahrens
US11643425B2 (en) 2018-07-27 2023-05-09 Umicore Ag & Co. Kg Organometallic compounds for the manufacture of a semiconductor element or electronic memory
EP3599241A1 (de) * 2018-07-27 2020-01-29 Umicore Ag & Co. Kg Metallorganische verbindungen zur herstellung eines halbleiterelements oder eines elektronischen speichers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3434871A (en) * 1965-12-13 1969-03-25 Engelhard Ind Inc Method for preparing chromium-containing films
GB1107700A (en) * 1966-03-29 1968-03-27 Matsushita Electronics Corp A method for manufacturing semiconductor devices
US3477872A (en) * 1966-09-21 1969-11-11 Rca Corp Method of depositing refractory metals

Also Published As

Publication number Publication date
DE2012031A1 (de) 1971-09-23
US3723178A (en) 1973-03-27
AT318007B (de) 1974-09-25
NL7103357A (de) 1971-09-15
NL7103362A (de) 1971-09-15
FR2081914A1 (de) 1971-12-10
GB1291209A (en) 1972-10-04
AT318008B (de) 1974-09-25
GB1286426A (en) 1972-08-23
FR2081909A1 (de) 1971-12-10
DE2012063A1 (de) 1971-09-30

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Legal Events

Date Code Title Description
PL Patent ceased