CH528603A - Device for vapor deposition of metal coverings on insulating strips in a vacuum - Google Patents

Device for vapor deposition of metal coverings on insulating strips in a vacuum

Info

Publication number
CH528603A
CH528603A CH331470A CH331470A CH528603A CH 528603 A CH528603 A CH 528603A CH 331470 A CH331470 A CH 331470A CH 331470 A CH331470 A CH 331470A CH 528603 A CH528603 A CH 528603A
Authority
CH
Switzerland
Prior art keywords
vacuum
vapor deposition
insulating strips
metal coverings
coverings
Prior art date
Application number
CH331470A
Other languages
German (de)
Inventor
Brill Klaus
Grothe Wolfgang
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of CH528603A publication Critical patent/CH528603A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH331470A 1969-03-28 1970-03-06 Device for vapor deposition of metal coverings on insulating strips in a vacuum CH528603A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1915933A DE1915933B2 (en) 1969-03-28 1969-03-28 Device for controlling or regulating the vapor deposition rate during the vapor deposition of metals in a vacuum

Publications (1)

Publication Number Publication Date
CH528603A true CH528603A (en) 1972-09-30

Family

ID=5729612

Family Applications (1)

Application Number Title Priority Date Filing Date
CH331470A CH528603A (en) 1969-03-28 1970-03-06 Device for vapor deposition of metal coverings on insulating strips in a vacuum

Country Status (3)

Country Link
US (1) US3651781A (en)
CH (1) CH528603A (en)
DE (1) DE1915933B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3928672A (en) * 1970-05-18 1975-12-23 Sperry Rand Corp Process for providing a hard coating to magnetic transducing heads
CH566399A5 (en) * 1973-05-26 1975-09-15 Balzers Patent Beteilig Ag
US6926689B2 (en) 2002-03-13 2005-08-09 Albertus Scheule Aortic balloon occlusion cannula
US6513451B2 (en) * 2001-04-20 2003-02-04 Eastman Kodak Company Controlling the thickness of an organic layer in an organic light-emiting device

Also Published As

Publication number Publication date
DE1915933B2 (en) 1975-10-16
DE1915933A1 (en) 1970-10-08
US3651781A (en) 1972-03-28

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Legal Events

Date Code Title Description
PL Patent ceased