CH544224A - Turbomolekularvakuumpumpe - Google Patents

Turbomolekularvakuumpumpe

Info

Publication number
CH544224A
CH544224A CH1060272A CH1060272A CH544224A CH 544224 A CH544224 A CH 544224A CH 1060272 A CH1060272 A CH 1060272A CH 1060272 A CH1060272 A CH 1060272A CH 544224 A CH544224 A CH 544224A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
turbo molecular
molecular vacuum
turbo
pump
Prior art date
Application number
CH1060272A
Other languages
English (en)
Inventor
Max Dr Wutz
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of CH544224A publication Critical patent/CH544224A/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Sliding-Contact Bearings (AREA)
CH1060272A 1971-07-30 1972-07-14 Turbomolekularvakuumpumpe CH544224A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2138152A DE2138152C3 (de) 1971-07-30 1971-07-30 Lageranordnung für den Läufer einer Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
CH544224A true CH544224A (de) 1973-11-15

Family

ID=5815297

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1060272A CH544224A (de) 1971-07-30 1972-07-14 Turbomolekularvakuumpumpe

Country Status (5)

Country Link
US (1) US3753623A (de)
CH (1) CH544224A (de)
DE (1) DE2138152C3 (de)
FR (1) FR2149145A5 (de)
GB (1) GB1404020A (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180370A (en) * 1975-03-22 1979-12-25 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Turbomolecular pump
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
FR2550847B1 (fr) * 1983-08-18 1988-07-01 Cibie Projecteurs Projecteur a reflecteur elliptique et a faisceau coupe, pour vehicule automobile
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
CA1240302A (en) * 1983-10-07 1988-08-09 Gordon E. Osterstrom Turbomolecular pump with improved bearing system
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US6491829B2 (en) * 1999-12-24 2002-12-10 Takashi Nishimoto Method and unit for processing contaminated liquid
WO2005028872A2 (en) 2003-09-18 2005-03-31 Myrakelle, Llc Rotary blood pump
JP2009532131A (ja) 2006-03-31 2009-09-10 オーキス メディカル コーポレイション 回転血液ポンプ
DE102007053979A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
DE102010045716A1 (de) * 2010-09-16 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014104734B4 (de) * 2014-04-03 2025-06-05 Pfeiffer Vacuum Gmbh Verfahren und System zur Versorgung einer Lageranordnung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1357420A (en) * 1917-10-16 1920-11-02 American Laundry Mach Co Self-lubricating bearing
US2362667A (en) * 1942-05-15 1944-11-14 Westinghouse Electric & Mfg Co Thrust bearing
US2342055A (en) * 1943-07-01 1944-02-15 Auto Ordnance Corp Thrust bearing
US2695199A (en) * 1947-10-27 1954-11-23 Sperry Corp Bearing
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
US3238792A (en) * 1964-04-22 1966-03-08 Anschuetz & Co Gmbh Gyroscopic instrument
US3308848A (en) * 1964-07-27 1967-03-14 Harold I Johnson Fluid power transmission
US3448623A (en) * 1965-10-08 1969-06-10 Lear Siegler Inc Meridian-seeking gyroscope employing a simultaneously rotating and vibrating base
US3456875A (en) * 1966-08-18 1969-07-22 George N Hein Air driven centrifuge
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump

Also Published As

Publication number Publication date
DE2138152A1 (de) 1973-02-08
FR2149145A5 (de) 1973-03-23
GB1404020A (en) 1975-08-28
DE2138152B2 (de) 1973-10-04
DE2138152C3 (de) 1974-05-09
US3753623A (en) 1973-08-21

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Legal Events

Date Code Title Description
PL Patent ceased