CH556917A - Verfahren und einrichtung zur herstellung von strukturierten schichten. - Google Patents

Verfahren und einrichtung zur herstellung von strukturierten schichten.

Info

Publication number
CH556917A
CH556917A CH1548672A CH1548672A CH556917A CH 556917 A CH556917 A CH 556917A CH 1548672 A CH1548672 A CH 1548672A CH 1548672 A CH1548672 A CH 1548672A CH 556917 A CH556917 A CH 556917A
Authority
CH
Switzerland
Prior art keywords
production
equipment
structured layers
structured
layers
Prior art date
Application number
CH1548672A
Other languages
English (en)
Original Assignee
Hochvakuum Dresden Veb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden Veb filed Critical Hochvakuum Dresden Veb
Publication of CH556917A publication Critical patent/CH556917A/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • H05K3/143—Masks therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)
CH1548672A 1971-08-24 1972-10-24 Verfahren und einrichtung zur herstellung von strukturierten schichten. CH556917A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD15728271 1971-08-24

Publications (1)

Publication Number Publication Date
CH556917A true CH556917A (de) 1974-12-13

Family

ID=5484233

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1548672A CH556917A (de) 1971-08-24 1972-10-24 Verfahren und einrichtung zur herstellung von strukturierten schichten.

Country Status (4)

Country Link
CH (1) CH556917A (de)
DE (1) DE2201129C3 (de)
GB (1) GB1368351A (de)
HU (1) HU169542B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4988424A (en) * 1989-06-07 1991-01-29 Ppg Industries, Inc. Mask and method for making gradient sputtered coatings

Also Published As

Publication number Publication date
DE2201129A1 (de) 1973-03-01
DE2201129C3 (de) 1980-06-04
GB1368351A (en) 1974-09-25
HU169542B (de) 1976-12-28
DE2201129B2 (de) 1979-09-27

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Legal Events

Date Code Title Description
PL Patent ceased