CH595200A5 - - Google Patents

Info

Publication number: CH595200A5
Authority: CH; Switzerland

Application number

CH648175A

Inventor

Walter Dubs

Georg Preiss

Original Assignee

Kistler Instrumente Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-05-16

Filing date

1975-05-16

Publication date

1978-02-15

1975-05-16 Application filed by Kistler Instrumente Ag filed Critical Kistler Instrumente Ag

1975-05-16 Priority to CH648175A priority Critical patent/CH595200A5/xx

1976-04-27 Priority to DE2618399A priority patent/DE2618399C3/de

1976-04-29 Priority to GB17558/76A priority patent/GB1535864A/en

1976-05-17 Priority to US05/687,106 priority patent/US4165402A/en

1978-02-15 Publication of CH595200A5 publication Critical patent/CH595200A5/xx

Links

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/303752—Process
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T82/00—Turning
- Y10T82/10—Process of turning

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Mechanical Treatment Of Semiconductor (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Pressure Sensors (AREA)
Measuring Fluid Pressure (AREA)

CH648175A 1975-05-16 1975-05-16 CH595200A5 (de)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
CH648175A CH595200A5 (de)	1975-05-16	1975-05-16
DE2618399A DE2618399C3 (de)	1975-05-16	1976-04-27	Verfahren zum Herstellen von Halbleiterkristall-Fonnstücken, Bearbeitungswerkzeug hierzu sowie entsprechend hergestelltes Formstück
GB17558/76A GB1535864A (en)	1975-05-16	1976-04-29	Method for producing a transducer element and a transducer manufactured in accordance with the said method
US05/687,106 US4165402A (en)	1975-05-16	1976-05-17	Chip-removing machining method and apparatus for semiconducting crystals, specifically suited for the production of force and pressure measuring cells

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH648175A CH595200A5 (de)	1975-05-16	1975-05-16

Publications (1)

Publication Number	Publication Date
CH595200A5 true CH595200A5 (de)	1978-02-15

Family

ID=4310332

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH648175A CH595200A5 (de)	1975-05-16	1975-05-16

Country Status (4)

Country	Link
US (1)	US4165402A (de)
CH (1)	CH595200A5 (de)
DE (1)	DE2618399C3 (de)
GB (1)	GB1535864A (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5828876A (ja) *	1981-08-12	1983-02-19	Mitsubishi Electric Corp	半導体圧力センサ装置
GB2130435B (en) *	1982-10-27	1986-10-15	Tokyo Shibaura Electric Co	Semiconductor strain sensor and method for manufacturing the same
JP3378575B2 (ja) *	2000-10-27	2003-02-17	住友電気工業株式会社	フライスカッタ
JP4511844B2 (ja) *	2004-02-05	2010-07-28	横河電機株式会社	圧力センサ及び圧力センサの製造方法
US20060186874A1 (en) *	2004-12-02	2006-08-24	The Board Of Trustees Of The University Of Illinois	System and method for mechanical testing of freestanding microscale to nanoscale thin films
DE102007053859A1 (de)	2007-11-09	2009-05-14	Endress + Hauser Gmbh + Co. Kg	Druck-Messeinrichtung
US8704538B2 (en) *	2010-07-01	2014-04-22	Mks Instruments, Inc.	Capacitance sensors
DE102015204672A1 (de) *	2015-03-16	2016-09-22	Robert Bosch Gmbh	Messvorrichtung zum Erfassen von Deformationen
CN108291846B (zh) *	2015-12-07	2020-08-04	尼尔斯·奥格·尤尔·艾勒森	测压仪
US11692895B2 (en)	2021-03-30	2023-07-04	Rosemount Aerospace Inc.	Differential pressure sensor

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB453292A (en) *	1935-06-17	1936-09-09	Frederick Charles Jearum	Improvements in diamond tipped cutting tools
US2967344A (en) *	1958-02-14	1961-01-10	Rca Corp	Semiconductor devices
US3025738A (en) *	1959-10-29	1962-03-20	Clevite Corp	Cutting apparatus
US3270554A (en) *	1961-01-04	1966-09-06	Bell Telephone Labor Inc	Diffused layer transducers
US3292128A (en) *	1961-12-26	1966-12-13	Gen Electric	Semiconductor strain sensitive devices
US3365794A (en) *	1964-05-15	1968-01-30	Transitron Electronic Corp	Semiconducting device
US3312879A (en) *	1964-07-29	1967-04-04	North American Aviation Inc	Semiconductor structure including opposite conductivity segments
US3399442A (en) *	1966-09-08	1968-09-03	Kennametal Inc	Cutting insert
US3555937A (en) *	1968-05-17	1971-01-19	Kennametal Inc	Diamond drill

1975
- 1975-05-16 CH CH648175A patent/CH595200A5/xx not_active IP Right Cessation
1976
- 1976-04-27 DE DE2618399A patent/DE2618399C3/de not_active Expired
- 1976-04-29 GB GB17558/76A patent/GB1535864A/en not_active Expired
- 1976-05-17 US US05/687,106 patent/US4165402A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE2618399B2 (de)	1978-08-17
DE2618399C3 (de)	1979-04-12
DE2618399A1 (de)	1976-11-25
US4165402A (en)	1979-08-21
GB1535864A (en)	1978-12-13

Legal Events

Date	Code	Title	Description
1991-01-31	PL	Patent ceased
2024-10-31	PL	Patent ceased

Publication	Publication Date	Title
JPS51100553A (de)	1976-09-04
NO764248L (de)	1977-06-20
FR2297261B1 (de)	1980-08-14
FR2322520B1 (de)	1982-11-26
JPS5615510B2 (de)	1981-04-10
JPS5647069B2 (de)	1981-11-07
JPS5440555Y2 (de)	1979-11-29
JPS5512979Y2 (de)	1980-03-24
JPS51131889U (de)	1976-10-23
JPS5542085B2 (de)	1980-10-28
JPS5430350B2 (de)	1979-09-29
JPS5256378U (de)	1977-04-23
JPS5217399U (de)	1977-02-07
JPS51119342U (de)	1976-09-28
JPS5197038U (de)	1976-08-04
JPS5240133Y2 (de)	1977-09-10
JPS555856Y2 (de)	1980-02-09
CS176811B1 (de)	1977-06-30
JPS51100929U (de)	1976-08-13
JPS5233001U (de)	1977-03-08
JPS5231177U (de)	1977-03-04
JPS5193518U (de)	1976-07-27
JPS5196216A (de)	1976-08-24
CH595479A5 (de)	1978-02-15
CH594131A5 (de)	1977-12-30