CH630417A5 - Process and apparatus for the uniform coating of sheet-like substrates - Google Patents

Process and apparatus for the uniform coating of sheet-like substrates Download PDF

Info

Publication number
CH630417A5
CH630417A5 CH440777A CH440777A CH630417A5 CH 630417 A5 CH630417 A5 CH 630417A5 CH 440777 A CH440777 A CH 440777A CH 440777 A CH440777 A CH 440777A CH 630417 A5 CH630417 A5 CH 630417A5
Authority
CH
Switzerland
Prior art keywords
movement
substrate holder
speed
oscillating
substrates
Prior art date
Application number
CH440777A
Other languages
German (de)
English (en)
Inventor
Ruediger Dr Ing Willig
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of CH630417A5 publication Critical patent/CH630417A5/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH440777A 1976-06-02 1977-04-07 Process and apparatus for the uniform coating of sheet-like substrates CH630417A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762624700 DE2624700A1 (de) 1976-06-02 1976-06-02 Verfahren und vorrichtung zum gleichfoermigen beschichten von flaechigen substraten

Publications (1)

Publication Number Publication Date
CH630417A5 true CH630417A5 (en) 1982-06-15

Family

ID=5979603

Family Applications (1)

Application Number Title Priority Date Filing Date
CH440777A CH630417A5 (en) 1976-06-02 1977-04-07 Process and apparatus for the uniform coating of sheet-like substrates

Country Status (5)

Country Link
CH (1) CH630417A5 (it)
DE (1) DE2624700A1 (it)
FR (1) FR2353649A1 (it)
GB (1) GB1529418A (it)
IT (1) IT1076194B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151059A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
DE3067724D1 (en) * 1980-02-07 1984-06-14 Matsushita Electric Industrial Co Ltd Method of forming a glass spacer in the magnetic gap of a magnetic head
DE3163865D1 (en) * 1980-07-01 1984-07-05 Secr Defence Brit Process for the bulk production of alloys and apparatus therefor
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
GB2234988B (en) * 1989-08-16 1993-12-08 Qpl Limited Improvements in vacuum deposition machines
DE19643702B4 (de) * 1996-10-23 2007-11-29 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten eines Substrats durch Rotation des Substrats im Materialstrom
EP1167566B1 (en) * 2000-06-22 2011-01-26 Panasonic Electric Works Co., Ltd. Apparatus for and method of vacuum vapor deposition

Also Published As

Publication number Publication date
GB1529418A (en) 1978-10-18
DE2624700A1 (de) 1977-12-15
IT1076194B (it) 1985-04-27
FR2353649B3 (it) 1980-07-18
FR2353649A1 (fr) 1977-12-30

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PLX Patent declared invalid from date of grant onwards