CH646732A5 - Verfahren zur passivierung von metalloberflaechen zur vermeidung unerwuenschter kupferniederschlaege aus stromlos arbeitenden verkupferungsbaedern. - Google Patents
Verfahren zur passivierung von metalloberflaechen zur vermeidung unerwuenschter kupferniederschlaege aus stromlos arbeitenden verkupferungsbaedern. Download PDFInfo
- Publication number
- CH646732A5 CH646732A5 CH327980A CH327980A CH646732A5 CH 646732 A5 CH646732 A5 CH 646732A5 CH 327980 A CH327980 A CH 327980A CH 327980 A CH327980 A CH 327980A CH 646732 A5 CH646732 A5 CH 646732A5
- Authority
- CH
- Switzerland
- Prior art keywords
- copper
- metal
- bath
- potential
- bath solution
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 151
- 229910052802 copper Inorganic materials 0.000 title claims description 147
- 239000010949 copper Substances 0.000 title claims description 147
- 238000000034 method Methods 0.000 title claims description 62
- 229910052751 metal Inorganic materials 0.000 title claims description 40
- 239000002184 metal Substances 0.000 title claims description 40
- 238000000151 deposition Methods 0.000 claims description 42
- 230000008021 deposition Effects 0.000 claims description 37
- 238000007747 plating Methods 0.000 claims description 27
- 238000001465 metallisation Methods 0.000 claims description 25
- 229910001220 stainless steel Inorganic materials 0.000 claims description 24
- 239000010935 stainless steel Substances 0.000 claims description 24
- 239000002245 particle Substances 0.000 claims description 21
- 230000003647 oxidation Effects 0.000 claims description 13
- 238000007254 oxidation reaction Methods 0.000 claims description 13
- 239000003638 chemical reducing agent Substances 0.000 claims description 12
- 238000005137 deposition process Methods 0.000 claims description 12
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 10
- 229910001431 copper ion Inorganic materials 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 10
- 239000002244 precipitate Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 230000003197 catalytic effect Effects 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 7
- ZYDVNTYVDVZMKF-UHFFFAOYSA-N [Cl].[Ag] Chemical compound [Cl].[Ag] ZYDVNTYVDVZMKF-UHFFFAOYSA-N 0.000 claims description 7
- 239000010959 steel Substances 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000000454 electroless metal deposition Methods 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims 3
- 229920003023 plastic Polymers 0.000 claims 3
- 239000011521 glass Substances 0.000 claims 2
- 238000011282 treatment Methods 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 230000002378 acidificating effect Effects 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000011109 contamination Methods 0.000 claims 1
- 239000003574 free electron Substances 0.000 claims 1
- 229910021645 metal ion Inorganic materials 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 239000013589 supplement Substances 0.000 claims 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 24
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 6
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000001680 brushing effect Effects 0.000 description 3
- 239000008139 complexing agent Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000001464 adherent effect Effects 0.000 description 2
- 238000005341 cation exchange Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical compound Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- -1 amino acids Chemical compound 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 239000003011 anion exchange membrane Substances 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 229940075397 calomel Drugs 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- KXZJHVJKXJLBKO-UHFFFAOYSA-N chembl1408157 Chemical compound N=1C2=CC=CC=C2C(C(=O)O)=CC=1C1=CC=C(O)C=C1 KXZJHVJKXJLBKO-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- MNWBNISUBARLIT-UHFFFAOYSA-N sodium cyanide Chemical compound [Na+].N#[C-] MNWBNISUBARLIT-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- UEUXEKPTXMALOB-UHFFFAOYSA-J tetrasodium;2-[2-[bis(carboxylatomethyl)amino]ethyl-(carboxylatomethyl)amino]acetate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O UEUXEKPTXMALOB-UHFFFAOYSA-J 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1621—Protection of inner surfaces of the apparatus
- C23C18/1623—Protection of inner surfaces of the apparatus through electrochemical processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F13/00—Inhibiting corrosion of metals by anodic or cathodic protection
- C23F13/005—Anodic protection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
- Prevention Of Electric Corrosion (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3481279A | 1979-04-30 | 1979-04-30 | |
| US13045180A | 1980-03-28 | 1980-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH646732A5 true CH646732A5 (de) | 1984-12-14 |
Family
ID=26711403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH327980A CH646732A5 (de) | 1979-04-30 | 1980-04-28 | Verfahren zur passivierung von metalloberflaechen zur vermeidung unerwuenschter kupferniederschlaege aus stromlos arbeitenden verkupferungsbaedern. |
Country Status (11)
| Country | Link |
|---|---|
| AT (1) | AT369037B (da) |
| AU (1) | AU5767780A (da) |
| CA (1) | CA1183101A (da) |
| CH (1) | CH646732A5 (da) |
| DE (1) | DE3016994C2 (da) |
| DK (1) | DK151233C (da) |
| FR (1) | FR2455641B1 (da) |
| GB (1) | GB2052560B (da) |
| IT (1) | IT1128151B (da) |
| NL (1) | NL189769B (da) |
| SE (1) | SE453925B (da) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1277642B (de) * | 1964-01-14 | 1968-09-12 | Bayer Ag | Verfahren zum Schutz von metallischen Oberflaechen gegen Metallabscheidung in chemischen Metallisierungsbaedern |
| DE1521246B2 (de) * | 1965-12-30 | 1976-06-16 | Bayer Ag, 5090 Leverkusen | Verfahren und schaltung zum schutz von metallischen oberflaechen gegen chemische metallisierung |
| GB1224047A (en) * | 1968-12-10 | 1971-03-03 | Tsniitmash | Method of inhibiting the formation of a coating on chemical equipment |
| CH613475A5 (en) * | 1976-07-28 | 1979-09-28 | Bbc Brown Boveri & Cie | Appliance for the electroless metal coating of objects |
| US4125642A (en) * | 1977-08-25 | 1978-11-14 | The United States Of America As Represented By The United States Department Of Energy | Method for conducting electroless metal-plating processes |
-
1980
- 1980-04-22 AU AU57677/80A patent/AU5767780A/en not_active Abandoned
- 1980-04-28 CH CH327980A patent/CH646732A5/de not_active IP Right Cessation
- 1980-04-28 SE SE8003204A patent/SE453925B/sv not_active IP Right Cessation
- 1980-04-28 GB GB8013922A patent/GB2052560B/en not_active Expired
- 1980-04-29 NL NLAANVRAGE8002515,A patent/NL189769B/xx not_active IP Right Cessation
- 1980-04-29 CA CA000350888A patent/CA1183101A/en not_active Expired
- 1980-04-29 IT IT48537/80A patent/IT1128151B/it active
- 1980-04-29 DK DK185080A patent/DK151233C/da not_active IP Right Cessation
- 1980-04-30 FR FR808009782A patent/FR2455641B1/fr not_active Expired
- 1980-04-30 DE DE3016994A patent/DE3016994C2/de not_active Expired
- 1980-04-30 AT AT0230980A patent/AT369037B/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3016994A1 (de) | 1980-11-06 |
| NL189769B (nl) | 1993-02-16 |
| SE453925B (sv) | 1988-03-14 |
| AT369037B (de) | 1982-11-25 |
| IT1128151B (it) | 1986-05-28 |
| AU5767780A (en) | 1980-11-06 |
| DE3016994C2 (de) | 1983-09-08 |
| FR2455641B1 (fr) | 1985-07-26 |
| FR2455641A1 (fr) | 1980-11-28 |
| DK151233C (da) | 1988-12-12 |
| NL8002515A (nl) | 1980-11-03 |
| SE8003204L (sv) | 1980-10-31 |
| CA1183101A (en) | 1985-02-26 |
| GB2052560B (en) | 1982-11-10 |
| IT8048537A0 (it) | 1980-04-29 |
| DK151233B (da) | 1987-11-16 |
| GB2052560A (en) | 1981-01-28 |
| ATA230980A (de) | 1982-04-15 |
| DK185080A (da) | 1980-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUE | Assignment |
Owner name: KOLLMORGEN CORPORATION |
|
| PUE | Assignment |
Owner name: AMP-AKZO CORPORATION |
|
| PL | Patent ceased |