CH669846A5 - - Google Patents
Download PDFInfo
- Publication number
- CH669846A5 CH669846A5 CH273785A CH273785A CH669846A5 CH 669846 A5 CH669846 A5 CH 669846A5 CH 273785 A CH273785 A CH 273785A CH 273785 A CH273785 A CH 273785A CH 669846 A5 CH669846 A5 CH 669846A5
- Authority
- CH
- Switzerland
- Prior art keywords
- scale
- measuring scale
- wave
- interference
- beam splitter
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853504194 DE3504194A1 (de) | 1985-02-07 | 1985-02-07 | Verfahren und vorrichtung zur messung von verschiebungen bei der einstellung und steuerung von werkzeugmaschinen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH669846A5 true CH669846A5 (fr) | 1989-04-14 |
Family
ID=6261935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH273785A CH669846A5 (fr) | 1985-02-07 | 1985-06-26 |
Country Status (2)
| Country | Link |
|---|---|
| CH (1) | CH669846A5 (fr) |
| DE (1) | DE3504194A1 (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62172203A (ja) * | 1986-01-27 | 1987-07-29 | Agency Of Ind Science & Technol | 相対変位測定方法 |
| FR2615281B1 (fr) * | 1987-05-11 | 1996-08-23 | Canon Kk | Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre |
| WO1990009559A1 (fr) * | 1989-02-15 | 1990-08-23 | Josef Zybert | Procede et appareil de determination de position |
| US6154278A (en) * | 1993-06-10 | 2000-11-28 | Matsushita Electric Industrial Co., Ltd. | Optical encoder for optically measuring displacement of moving body |
| DE4420276C2 (de) * | 1993-06-10 | 2001-04-19 | Matsushita Electric Industrial Co Ltd | Apparat zur Versatzmessung von bewegten Körpern |
| JP4764427B2 (ja) | 2004-09-08 | 2011-09-07 | レニショウ パブリック リミテッド カンパニー | 検出装置および方法 |
| GB0625387D0 (en) | 2006-12-21 | 2007-01-31 | Renishaw Plc | Object detector and method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL105392B1 (pl) * | 1974-12-30 | 1979-10-31 | Urzadzenie do bezposredniego,cyfrowego pomiaru przemieszczen liniowych i katowych | |
| GB1564781A (en) * | 1977-02-02 | 1980-04-16 | Marconi Co Ltd | Distance measuring devices |
-
1985
- 1985-02-07 DE DE19853504194 patent/DE3504194A1/de not_active Ceased
- 1985-06-26 CH CH273785A patent/CH669846A5/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE3504194A1 (de) | 1986-06-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE4201511C5 (de) | Positionsdetektor und Verfahren zur Positionsmessung | |
| EP1762828B1 (fr) | Codeur optique pour déterminer la position de deux parties deplaçable l'une par rapport à l'autre dans deux directions de déplacement | |
| DE3486178T2 (de) | Optisches Instrument zur Messung einer Verschiebung. | |
| DE69130783T2 (de) | Vorrichtung zur Projecktion eines Maskenmusters auf ein Substrat | |
| DE3715864C2 (de) | Verfahren und Vorrichtung zum Erfassen/Einstellen einer Verschiebung | |
| DE3702203C2 (de) | Verfahren zum Messen von Relativbewegungen | |
| DE3931755C2 (de) | Wegmeßgeber | |
| DE3788158T2 (de) | Vorrichtung für die Erkennung von Vergrösserungsfehlern in einem optischen Abbildungssystem. | |
| WO2008012091A2 (fr) | Procédé et dispositif de détermination de l'écart d'une forme réelle de la forme nominale d'une surface optique | |
| EP0011708A1 (fr) | Méthode et dispositif pour mesurer la planéité, la rugosité ou le rayon de courbure d'une surface à mesurer | |
| EP0481356A2 (fr) | Système optique utilisant polarisation | |
| DE3816247A1 (de) | System zur entfernungsmessung | |
| EP3059554B1 (fr) | Dispositif optique de mesure de position | |
| DE102015209716B4 (de) | Optischer Codierer mit anpassbarer Auflösung | |
| EP0491749B1 (fr) | Dispositif de mesure de position absolue sur deux dimensions | |
| EP0653609B1 (fr) | Dispositif de mesure de longueurs ou d'angles de rotation | |
| DE2758149B1 (de) | Interferometrisches Verfahren mit lambda /4-Aufloesung zur Abstands-,Dicken- und/oder Ebenheitsmessung | |
| CH669846A5 (fr) | ||
| EP1468244A2 (fr) | Systeme optique interferometrique | |
| EP3477264A1 (fr) | Dispositif optique de mesure de position | |
| DE102011005937B4 (de) | Vorrichtung zur interferentiellen Abstandsmessung | |
| DE69917374T2 (de) | Wegaufnehmer | |
| DE102005036180A1 (de) | Optische Positionsmesseinrichtung | |
| DE3322713C2 (de) | Verfahren und Vorrichtung zur laufenden Messung des Rollwinkels eines beweglichen Maschinenteiles | |
| DE112014001977B4 (de) | Vorrichtung zur interferentiellen Abstandsmessung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |