CH678109A5 - - Google Patents

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Info

Publication number: CH678109A5
Authority: CH; Switzerland
Prior art keywords: frequency; optical; conductor; measuring; plate
Prior art date: 1988-06-13

Application number

CH225088A

Other languages

German (de)

English (en)

Inventor

Hilda Schaer

Original Assignee

Althis Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-06-13

Filing date

1988-06-13

Publication date

1991-07-31

1988-06-13 Application filed by Althis Ag filed Critical Althis Ag

1988-06-13 Priority to CH225088A priority Critical patent/CH678109A5/de

1989-06-09 Priority to DE19893918811 priority patent/DE3918811A1/de

1991-07-31 Publication of CH678109A5 publication Critical patent/CH678109A5/de

Links

238000005516 engineering process Methods 0.000 claims description 10
238000005259 measurement Methods 0.000 claims description 8
230000005855 radiation Effects 0.000 claims description 8
230000005670 electromagnetic radiation Effects 0.000 claims description 5
230000001427 coherent effect Effects 0.000 claims description 4
230000003287 optical effect Effects 0.000 description 19
239000004020 conductor Substances 0.000 description 17
230000035559 beat frequency Effects 0.000 description 5
239000003365 glass fiber Substances 0.000 description 5
238000000034 method Methods 0.000 description 4
230000008878 coupling Effects 0.000 description 3
238000010168 coupling process Methods 0.000 description 3
238000005859 coupling reaction Methods 0.000 description 3
239000011521 glass Substances 0.000 description 3
239000000463 material Substances 0.000 description 3
239000000758 substrate Substances 0.000 description 3
238000010276 construction Methods 0.000 description 2
239000004568 cement Substances 0.000 description 1
238000011109 contamination Methods 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
238000000691 measurement method Methods 0.000 description 1
238000011089 mechanical engineering Methods 0.000 description 1
230000010287 polarization Effects 0.000 description 1
239000010453 quartz Substances 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
125000006850 spacer group Chemical group 0.000 description 1
230000003595 spectral effect Effects 0.000 description 1
230000007704 transition Effects 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)

CH225088A 1988-06-13 1988-06-13 CH678109A5 (cs)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
CH225088A CH678109A5 (cs)	1988-06-13	1988-06-13
DE19893918811 DE3918811A1 (de)	1988-06-13	1989-06-09	Heterodynes interferometer

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH225088A CH678109A5 (cs)	1988-06-13	1988-06-13

Publications (1)

Publication Number	Publication Date
CH678109A5 true CH678109A5 (cs)	1991-07-31

Family

ID=4229378

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH225088A CH678109A5 (cs)	1988-06-13	1988-06-13

Country Status (2)

Country	Link
CH (1)	CH678109A5 (cs)
DE (1)	DE3918811A1 (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
AT392537B (de) *	1989-03-21	1991-04-25	Tabarelli Werner	Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
US5127731A (en) *	1991-02-08	1992-07-07	Hughes Aircraft Company	Stabilized two-color laser diode interferometer
DE4212981C2 (de) *	1992-04-18	1994-02-03	Deutsche Aerospace	Aktuator
EP3388862A1 (de) *	2017-04-13	2018-10-17	Leica Geosystems AG	Hochaufgelöste entfernungsmessung mittels interferometrie

1988
- 1988-06-13 CH CH225088A patent/CH678109A5/de not_active IP Right Cessation
1989
- 1989-06-09 DE DE19893918811 patent/DE3918811A1/de not_active Withdrawn

Also Published As

Publication number	Publication date
DE3918811A1 (de)	1989-12-28

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Legal Events

Date	Code	Title	Description
1993-02-26	PL	Patent ceased
2024-10-31	PL	Patent ceased