CH683050A5 - Résonateur à quartz vibrant selon un mode fondamental de torsion. - Google Patents

Résonateur à quartz vibrant selon un mode fondamental de torsion. Download PDF

Info

Publication number: CH683050A5
Authority: CH; Switzerland
Prior art keywords: resonator; shape; resonator according; angles; axis
Prior art date: 1991-06-04

Application number

CH1654/91A

Other languages

English (en)

French (fr)

Inventor

Jean Hermann

Claude Bourgeois

Original Assignee

Suisse Electronique Microtech

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-06-04

Filing date

1991-06-04

Publication date

1993-12-31

1991-06-04 Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech

1991-06-04 Priority to CH1654/91A priority Critical patent/CH683050A5/fr

1992-05-29 Priority to AT92810414T priority patent/ATE163111T1/de

1992-05-29 Priority to EP92810414A priority patent/EP0517666B1/de

1992-05-29 Priority to DE69224325T priority patent/DE69224325D1/de

1992-06-03 Priority to JP4142320A priority patent/JPH05152886A/ja

1992-06-04 Priority to US07/894,344 priority patent/US5274297A/en

1993-12-31 Publication of CH683050A5 publication Critical patent/CH683050A5/fr

Links

239000010453 quartz Substances 0.000 title claims abstract description 15
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 15
239000013078 crystal Substances 0.000 claims abstract description 5
238000005520 cutting process Methods 0.000 description 9
230000008878 coupling Effects 0.000 description 8
238000010168 coupling process Methods 0.000 description 8
238000005859 coupling reaction Methods 0.000 description 8
238000004519 manufacturing process Methods 0.000 description 5
238000001465 metallisation Methods 0.000 description 4
239000000126 substance Substances 0.000 description 4
238000000034 method Methods 0.000 description 3
238000012986 modification Methods 0.000 description 3
230000004048 modification Effects 0.000 description 3
239000000758 substrate Substances 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
238000005452 bending Methods 0.000 description 2
239000002184 metal Substances 0.000 description 2
238000003466 welding Methods 0.000 description 2
MIMUSZHMZBJBPO-UHFFFAOYSA-N 6-methoxy-8-nitroquinoline Chemical compound N1=CC=CC2=CC(OC)=CC([N+]([O-])=O)=C21 MIMUSZHMZBJBPO-UHFFFAOYSA-N 0.000 description 1
238000004026 adhesive bonding Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005538 encapsulation Methods 0.000 description 1
238000005530 etching Methods 0.000 description 1
230000005284 excitation Effects 0.000 description 1
238000003754 machining Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
238000009834 vaporization Methods 0.000 description 1
230000008016 vaporization Effects 0.000 description 1

Classifications

- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz

Landscapes

Physics & Mathematics (AREA)
Acoustics & Sound (AREA)
Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

CH1654/91A 1991-06-04 1991-06-04 Résonateur à quartz vibrant selon un mode fondamental de torsion. CH683050A5 (fr)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
CH1654/91A CH683050A5 (fr)	1991-06-04	1991-06-04	Résonateur à quartz vibrant selon un mode fondamental de torsion.
AT92810414T ATE163111T1 (de)	1991-06-04	1992-05-29	Quarz-resonator schwingend in einem fundementalen drehschwingungsmode
EP92810414A EP0517666B1 (de)	1991-06-04	1992-05-29	Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode
DE69224325T DE69224325D1 (de)	1991-06-04	1992-05-29	Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode
JP4142320A JPH05152886A (ja)	1991-06-04	1992-06-03	捩り基本モードにしたがつて振動する石英共振器
US07/894,344 US5274297A (en)	1991-06-04	1992-06-04	Quartz resonator vibrating in a fundamental torsion mode

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH1654/91A CH683050A5 (fr)	1991-06-04	1991-06-04	Résonateur à quartz vibrant selon un mode fondamental de torsion.

Publications (1)

Publication Number	Publication Date
CH683050A5 true CH683050A5 (fr)	1993-12-31

Family

ID=4215517

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH1654/91A CH683050A5 (fr)	1991-06-04	1991-06-04	Résonateur à quartz vibrant selon un mode fondamental de torsion.

Country Status (6)

Country	Link
US (1)	US5274297A (de)
EP (1)	EP0517666B1 (de)
JP (1)	JPH05152886A (de)
AT (1)	ATE163111T1 (de)
CH (1)	CH683050A5 (de)
DE (1)	DE69224325D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4322144C2 (de) *	1992-07-03	1997-06-05	Murata Manufacturing Co	Vibratoreinheit
DE4419085C2 (de) *	1993-05-31	1999-09-02	Murata Manufacturing Co	Chipförmiger Baustein mit piezoelektrischer Resonanz
US5621263A (en) *	1993-08-09	1997-04-15	Murata Manufacturing Co., Ltd.	Piezoelectric resonance component
US5689220A (en) *	1993-08-17	1997-11-18	Murata Manufacturing Co., Ltd.	Laterally coupled piezoelectric resonator ladder-type filter with at least one width expansion mode resonator
US5648746A (en) *	1993-08-17	1997-07-15	Murata Manufacturing Co., Ltd.	Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator
US5414322A (en) *	1994-04-19	1995-05-09	The United States Of America As Represented By The Secretary Of The Army	Crystal resonator with multiple segmented lateral-field excitation electrodes
JP3114526B2 (ja) *	1994-10-17	2000-12-04	株式会社村田製作所	チップ型圧電共振部品
US6150703A (en) *	1998-06-29	2000-11-21	Trw Inc.	Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
US6172443B1 (en) *	1998-11-24	2001-01-09	Cts Corporation	Quartz crystal resonator with improved temperature performance and method therefor
US6215375B1 (en) *	1999-03-30	2001-04-10	Agilent Technologies, Inc.	Bulk acoustic wave resonator with improved lateral mode suppression
US6524251B2 (en)	1999-10-05	2003-02-25	Omnisonics Medical Technologies, Inc.	Ultrasonic device for tissue ablation and sheath for use therewith
US20040097996A1 (en)	1999-10-05	2004-05-20	Omnisonics Medical Technologies, Inc.	Apparatus and method of removing occlusions using an ultrasonic medical device operating in a transverse mode
US6551337B1 (en)	1999-10-05	2003-04-22	Omnisonics Medical Technologies, Inc.	Ultrasonic medical device operating in a transverse mode
JP3373840B2 (ja) *	2000-11-17	2003-02-04	有限会社ピエデック技術研究所	ラーメモード水晶振動子
US6714102B2 (en) *	2001-03-01	2004-03-30	Agilent Technologies, Inc.	Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method
JP3969224B2 (ja) *	2002-01-08	2007-09-05	株式会社村田製作所	圧電共振子及びそれを用いた圧電フィルタ・デュプレクサ・通信装置
US6707351B2 (en) *	2002-03-27	2004-03-16	Motorola, Inc.	Tunable MEMS resonator and method for tuning
JP2003318699A (ja) *	2002-04-23	2003-11-07	Piedekku Gijutsu Kenkyusho:Kk	水晶ユニットとその製造方法
US7794414B2 (en)	2004-02-09	2010-09-14	Emigrant Bank, N.A.	Apparatus and method for an ultrasonic medical device operating in torsional and transverse modes
US7741932B2 (en) *	2004-08-05	2010-06-22	Panasonic Corporation	Torsional resonator and filter using this
TW201238244A (en) *	2011-02-23	2012-09-16	Nihon Dempa Kogyo Co	GT-cut quartz crystal resonator
US11070191B2 (en)	2019-08-22	2021-07-20	Statek Corporation	Torsional mode quartz crystal device
US11070192B2 (en)	2019-08-22	2021-07-20	Statek Corporation	Torsional mode quartz crystal device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2435855A1 (fr) *	1978-09-08	1980-04-04	Centre Electron Horloger	Resonateur piezo-electrique
GB2124022A (en) *	1982-07-14	1984-02-08	Centre Electron Horloger	Quartz resonator of tuning fork type

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4320320A (en) *	1978-12-01	1982-03-16	Kabushiki Kaisha Suwa Seikosha	Coupled mode tuning fork type quartz crystal vibrator
JPS5748819A (en) *	1980-09-08	1982-03-20	Seiko Epson Corp	Coupling tuning fork type quartz oscillator
GB2117968B (en) *	1982-03-16	1986-04-23	Seiko Instr & Electronics	Gt-cut piezo-electric resonator
JPH0754891B2 (ja) *	1987-06-02	1995-06-07	セイコー電子部品株式会社	縦水晶振動子
EP0516400B1 (de) *	1991-05-27	1997-07-30	Seiko Electronic Components Ltd.	Drehschwingender Quarzkristallresonator

1991
- 1991-06-04 CH CH1654/91A patent/CH683050A5/fr not_active IP Right Cessation
1992
- 1992-05-29 EP EP92810414A patent/EP0517666B1/de not_active Expired - Lifetime
- 1992-05-29 AT AT92810414T patent/ATE163111T1/de not_active IP Right Cessation
- 1992-05-29 DE DE69224325T patent/DE69224325D1/de not_active Expired - Lifetime
- 1992-06-03 JP JP4142320A patent/JPH05152886A/ja active Pending
- 1992-06-04 US US07/894,344 patent/US5274297A/en not_active Expired - Fee Related

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2435855A1 (fr) *	1978-09-08	1980-04-04	Centre Electron Horloger	Resonateur piezo-electrique
GB2124022A (en) *	1982-07-14	1984-02-08	Centre Electron Horloger	Quartz resonator of tuning fork type

Also Published As

Publication number	Publication date
ATE163111T1 (de)	1998-02-15
US5274297A (en)	1993-12-28
JPH05152886A (ja)	1993-06-18
EP0517666B1 (de)	1998-02-04
EP0517666A1 (de)	1992-12-09
DE69224325D1 (de)	1998-03-12

Legal Events

Date	Code	Title	Description
1999-02-15	PL	Patent ceased

Publication	Publication Date	Title
EP0517666B1 (de)	1998-02-04	Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode
CH631855B5 (fr)	1982-09-15	Resonateur pour instrument horometrique, procede de fabrication de celui-ci.
FR2460565A1 (fr)	1981-01-23	Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication
EP2395661A1 (de)	2011-12-14	Temperaturkompensierter Resonator mit reduzierten Temperaturkoeffizienten erster und zweiter Ordnung
EP0086739B1 (de)	1985-07-31	Einbaufähiger piezoelektrischer Resonator
EP2351214B1 (de)	2018-04-04	Transversal gekoppelte filterelemente auf volumenwellenresonanzstrukturen mit mehrfachen harmonischen resonanzen
EP2291911B1 (de)	2012-11-28	Hbar-resonator mit hohem integrationsgrad
CH623690A5 (de)	1981-06-15
EP1672315B1 (de)	2007-09-26	Wandler zur Winkelgeschwindigkeitsmessung
EP0350443B1 (de)	1993-05-26	Piezoelektrischer Resonator
FR2837636A1 (fr)	2003-09-26	Dispositif a ondes acoustiques d'interface en tantalate de lithium
CH620801A5 (de)	1980-12-15
EP2414774A1 (de)	2012-02-08	In zwei entkoppelten modi schwingendes element und verwendung in einem schwingkreisel
EP0319475B1 (de)	1992-05-06	Piezoelektrischer Resonator
EP1625659B1 (de)	2006-07-26	Integrierte resonatoren und zeitbasis mit solchen resonatoren
EP2957031B1 (de)	2017-07-19	Flache struktur eines mechanischen resonators welcher durch biege- und dehnungsschwingungen entkoppelt ist
CH703271A2 (fr)	2011-12-15	Résonateur thermocompensé aux premier et second ordres.
CH702353A2 (fr)	2011-06-15	Résonateur thermocompensé au moins aux premier et second ordres.
EP0451089B1 (de)	1995-05-03	Hochfrequenter piezoelektrischer Schwinger
EP3468037A1 (de)	2019-04-10	Kleiner piezoelektrischer resonator
EP0085599A2 (de)	1983-08-10	Verfahren für die Massenfertigung piezoelektrischer Wandler, nach diesem Verfahren hergestellte Wandler und Anwendung dieses Verfahrens
WO2025141194A1 (fr)	2025-07-03	Dispositif à ondes élastiques
WO2025141199A1 (fr)	2025-07-03	Dispositif à ondes élastiques
WO2025141201A1 (fr)	2025-07-03	Dispositif à ondes élastiques
WO2025141196A2 (fr)	2025-07-03	Dispositif à ondes élastiques