CH694831A5 - Vorrichtung zur Prüfung vereinzelter Halbleiterchips. - Google Patents

Vorrichtung zur Prüfung vereinzelter Halbleiterchips. Download PDF

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Publication number
CH694831A5
CH694831A5 CH00767/99A CH76799A CH694831A5 CH 694831 A5 CH694831 A5 CH 694831A5 CH 00767/99 A CH00767/99 A CH 00767/99A CH 76799 A CH76799 A CH 76799A CH 694831 A5 CH694831 A5 CH 694831A5
Authority
CH
Switzerland
Prior art keywords
electrical contact
die
contact pad
test unit
prepackage
Prior art date
Application number
CH00767/99A
Other languages
English (en)
Other versions
CH694831A9 (de
Inventor
Wesley C Gallagher
Original Assignee
Int Rectifier Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Int Rectifier Corp filed Critical Int Rectifier Corp
Publication of CH694831A5 publication Critical patent/CH694831A5/de
Publication of CH694831A9 publication Critical patent/CH694831A9/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CH76799A 1998-04-24 1999-04-23 Vorrichtung zur Pruefung vereinzelter Halbleiterchips. CH694831A9 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8296698P 1998-04-24 1998-04-24

Publications (2)

Publication Number Publication Date
CH694831A5 true CH694831A5 (de) 2005-07-29
CH694831A9 CH694831A9 (de) 2005-10-14

Family

ID=34709725

Family Applications (1)

Application Number Title Priority Date Filing Date
CH76799A CH694831A9 (de) 1998-04-24 1999-04-23 Vorrichtung zur Pruefung vereinzelter Halbleiterchips.

Country Status (2)

Country Link
US (1) US6246251B1 (de)
CH (1) CH694831A9 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7188995B2 (en) 2003-03-03 2007-03-13 Wtach -U-License Ag Tourbillon

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001007165A (ja) * 1999-06-21 2001-01-12 Mitsubishi Electric Corp プローブカード装置
US6667631B2 (en) 2001-12-27 2003-12-23 Stmicroelectronics, Inc. High temperature probe card
US7218094B2 (en) * 2003-10-21 2007-05-15 Formfactor, Inc. Wireless test system
US20050139450A1 (en) * 2003-12-30 2005-06-30 International Product Technology, Inc. Electrical part processing unit
US7466157B2 (en) * 2004-02-05 2008-12-16 Formfactor, Inc. Contactless interfacing of test signals with a device under test
US7202687B2 (en) * 2004-04-08 2007-04-10 Formfactor, Inc. Systems and methods for wireless semiconductor device testing
US20060139045A1 (en) * 2004-12-29 2006-06-29 Wesley Gallagher Device and method for testing unpackaged semiconductor die
KR100656586B1 (ko) * 2005-01-07 2006-12-13 삼성전자주식회사 프로브 카드 냉각용 공기 분사기를 갖는 웨이퍼 번인 시스템
TWI287752B (en) * 2005-01-31 2007-10-01 All Fine Technology Co Ltd Composite equipment for automatic marking and reading
CN101198450A (zh) * 2005-06-16 2008-06-11 Nxp股份有限公司 拉伸持箔器的箔片的工具、从晶片移除晶粒的机器及方法
KR100723503B1 (ko) * 2005-09-13 2007-05-30 삼성전자주식회사 회전형 모듈 탑재부를 구비하는 메모리 모듈의 테스트시스템
US7274202B2 (en) * 2005-10-07 2007-09-25 Verigy (Singapore) Pte. Ltd. Carousel device, system and method for electronic circuit tester
US7671614B2 (en) * 2005-12-02 2010-03-02 Formfactor, Inc. Apparatus and method for adjusting an orientation of probes
TW200745572A (en) * 2006-06-09 2007-12-16 Visera Technologies Co Ltd Manufacturing method of wafer-level testing circuit board, and the structure thereof
TWM430614U (en) * 2011-12-21 2012-06-01 Youngtek Electronics Corp Fiber optic light guiding top cover structure
NL2014943B1 (en) * 2015-06-09 2017-02-15 Sluis Cigar Machinery Bv Testing apparatus and testing method of vaporizers electronic cigarettes.
CN113358970B (zh) * 2021-07-07 2024-06-18 覃政友 一种自复式过欠压保护器检测装置
CN114758962B (zh) * 2022-04-06 2024-09-20 北京燕东微电子科技有限公司 芯片的制造方法
CN115219837B (zh) * 2022-08-10 2025-12-09 中山市美格电子科技有限公司 一种id检测装置
CN119511040B (zh) * 2024-11-29 2025-05-23 广东宏展科技有限公司 一种半导体芯片的高低温测试设备
CN119224387B (zh) * 2024-12-02 2025-08-22 苏州市德智电子有限公司 一种汽车电子老化自动测试台

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3384236A (en) * 1966-08-31 1968-05-21 Corning Glass Works Machine for automatically testing and orienting miniature semiconductor chips
US3579102A (en) * 1968-09-30 1971-05-18 John F Keating Apparatus for testing successive ones of a plurality of electrical components
US3584741A (en) * 1969-06-30 1971-06-15 Ibm Batch sorting apparatus
US3750878A (en) * 1971-11-15 1973-08-07 Dixon K Corp Electrical component testing apparatus
US5634267A (en) 1991-06-04 1997-06-03 Micron Technology, Inc. Method and apparatus for manufacturing known good semiconductor die
JP2921937B2 (ja) * 1990-07-18 1999-07-19 東京エレクトロン株式会社 Ｉｃ検査装置
US5589781A (en) 1990-09-20 1996-12-31 Higgins; H. Dan Die carrier apparatus
US5519332A (en) 1991-06-04 1996-05-21 Micron Technology, Inc. Carrier for testing an unpackaged semiconductor die
US5177439A (en) 1991-08-30 1993-01-05 U.S. Philips Corporation Probe card for testing unencapsulated semiconductor devices
JPH0567652A (ja) * 1991-09-05 1993-03-19 Tokyo Electron Ltd プローブ装置
US5313156A (en) * 1991-12-04 1994-05-17 Advantest Corporation Apparatus for automatic handling
US5475317A (en) 1993-12-23 1995-12-12 Epi Technologies, Inc. Singulated bare die tester and method of performing forced temperature electrical tests and burn-in
US5546012A (en) 1994-04-15 1996-08-13 International Business Machines Corporation Probe card assembly having a ceramic probe card
IT1272853B (it) * 1994-11-30 1997-06-30 Circuit Line Spa Metodo e apparecchiatura per il carico e lo scarico automatico di circuiti stampati su macchine per l'esecuzione del test elettrico
JP2877011B2 (ja) 1994-12-20 1999-03-31 日本電気株式会社 ベアチップテストキャリア
US5497103A (en) * 1995-01-25 1996-03-05 International Business Machines Corporation Test apparatus for circuitized substrate
US5561377A (en) * 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5756370A (en) 1996-02-08 1998-05-26 Micron Technology, Inc. Compliant contact system with alignment structure for testing unpackaged semiconductor dice

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7188995B2 (en) 2003-03-03 2007-03-13 Wtach -U-License Ag Tourbillon

Also Published As

Publication number Publication date
CH694831A9 (de) 2005-10-14
US6246251B1 (en) 2001-06-12

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