CH709581B8 - Schieberventil. - Google Patents

Schieberventil.

Info

Publication number
CH709581B8
CH709581B8 CH00555/15A CH5552015A CH709581B8 CH 709581 B8 CH709581 B8 CH 709581B8 CH 00555/15 A CH00555/15 A CH 00555/15A CH 5552015 A CH5552015 A CH 5552015A CH 709581 B8 CH709581 B8 CH 709581B8
Authority
CH
Switzerland
Prior art keywords
valve
compensation
chamber
slide valve
pressure
Prior art date
Application number
CH00555/15A
Other languages
English (en)
Other versions
CH709581A2 (de
CH709581B1 (de
Inventor
Ishigaki Tsuneo
Shimoda Hiromi
Nagao Takashi
Original Assignee
Smc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Corp filed Critical Smc Corp
Publication of CH709581A2 publication Critical patent/CH709581A2/de
Publication of CH709581B1 publication Critical patent/CH709581B1/de
Publication of CH709581B8 publication Critical patent/CH709581B8/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)

Abstract

Die Erfindung betrifft ein Schieberventil. In einem Ventilkasten (16) des Schieberventils (10) ist an einer Seitenwand (16a), die einer Bearbeitungskammer (S1) zugewandt ist, ein Ausgleichsraum (32) vorgesehen. In dem Ausgleichsraum (32) ist ein erstes Dichtelement (34) vorgesehen, das einen ersten Durchgang (12) umgibt. Ausserdem ist in dem Ausgleichsraum (32) eine Ausgleichsöffnung (38) ausgebildet. Die Ausgleichsöffnung (38) steht in Verbindung mit einem Aufnahmeraum (28), der im Inneren des Ventilkastens (16) ausgebildet ist. Bei geschlossenem Ventil, wenn eine Ventilscheibe (24) auf einem Ventilsitz (30) des Ventilkastens (16) aufsitzt, werden der Druck in dem Aufnahmeraum (28) und der Druck in dem Ausgleichsraum (32) durch die Ausgleichsöffnung (38) ausgeglichen.
CH00555/15A 2014-04-30 2015-04-23 Schieberventil. CH709581B8 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014093750A JP6160923B2 (ja) 2014-04-30 2014-04-30 ゲートバルブ

Publications (3)

Publication Number Publication Date
CH709581A2 CH709581A2 (de) 2015-10-30
CH709581B1 CH709581B1 (de) 2019-04-30
CH709581B8 true CH709581B8 (de) 2019-08-15

Family

ID=54326134

Family Applications (1)

Application Number Title Priority Date Filing Date
CH00555/15A CH709581B8 (de) 2014-04-30 2015-04-23 Schieberventil.

Country Status (7)

Country Link
US (1) US9599233B2 (de)
JP (1) JP6160923B2 (de)
KR (2) KR20150125610A (de)
CN (1) CN105020423B (de)
CH (1) CH709581B8 (de)
DE (1) DE102015105899B4 (de)
TW (1) TWI580880B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6679594B2 (ja) * 2014-12-19 2020-04-15 バット ホールディング アーゲー 真空チャンバのチャンバ壁内のチャンバ開口を閉鎖するドア
JP6356645B2 (ja) * 2015-09-04 2018-07-11 株式会社鷺宮製作所 絞り装置及び冷凍サイクル
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
CN107940096B (zh) * 2018-01-12 2023-11-21 眉山中车制动科技股份有限公司 一种双向机构
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
WO2019239673A1 (ja) * 2018-06-12 2019-12-19 株式会社アルバック 仕切弁装置
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
JP6745953B1 (ja) * 2019-07-23 2020-08-26 株式会社アルバック 仕切りバルブ
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
CN110993550B (zh) * 2019-12-25 2022-12-09 北京北方华创微电子装备有限公司 半导体热处理设备
JP7479587B2 (ja) * 2020-02-28 2024-05-09 Smc株式会社 ゲートバルブ
KR20220120613A (ko) * 2020-06-10 2022-08-30 엘지전자 주식회사 게이트 밸브 모듈 및 밀폐 챔버
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
CN115306947A (zh) * 2022-07-29 2022-11-08 成都中科唯实仪器有限责任公司 一种低振动真空阀门
JP2024033169A (ja) * 2022-08-30 2024-03-13 株式会社キッツエスシーティー ゲートバルブ及び基板処理装置並びに基板処理方法
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660397A (en) 1951-08-27 1953-11-24 Alexander S Volpin Quick sealing automatic sealing gate valve
US2971527A (en) 1955-08-29 1961-02-14 Mcevoy Co Automatic plastic sealed valves
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
JPH11351419A (ja) 1998-06-08 1999-12-24 Irie Koken Kk 無摺動ゲート弁
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
JP2001330172A (ja) * 2000-05-22 2001-11-30 Nec Kansai Ltd ゲートバルブ
US6602346B1 (en) 2000-08-22 2003-08-05 Novellus Systems, Inc. Gas-purged vacuum valve
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
JP5545152B2 (ja) * 2010-09-22 2014-07-09 Ｓｍｃ株式会社 ゲートバルブ
JP5806827B2 (ja) * 2011-03-18 2015-11-10 東京エレクトロン株式会社 ゲートバルブ装置及び基板処理装置並びにその基板処理方法

Also Published As

Publication number Publication date
JP2015209955A (ja) 2015-11-24
CN105020423B (zh) 2018-10-26
DE102015105899A1 (de) 2015-11-05
CH709581A2 (de) 2015-10-30
DE102015105899B4 (de) 2022-05-12
KR20150125610A (ko) 2015-11-09
CH709581B1 (de) 2019-04-30
CN105020423A (zh) 2015-11-04
US20150316155A1 (en) 2015-11-05
US9599233B2 (en) 2017-03-21
KR101814045B1 (ko) 2018-01-02
TWI580880B (zh) 2017-05-01
TW201604457A (zh) 2016-02-01
KR20170067170A (ko) 2017-06-15
JP6160923B2 (ja) 2017-07-12

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Legal Events

Date Code Title Description
PK Correction

Free format text: BERICHTIGUNG ERFINDER

PK Correction

Free format text: ERFINDER BERICHTIGT.

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: U-0-0-U10-U11 (AS PROVIDED BY THE NATIONAL OFFICE)

Effective date: 20260501