CL2014002559A1 - Método de suministro de una gas de proceso a partir de una solución multi-componente - Google Patents

Método de suministro de una gas de proceso a partir de una solución multi-componente

Info

Publication number
CL2014002559A1
CL2014002559A1 CL2014002559A CL2014002559A CL2014002559A1 CL 2014002559 A1 CL2014002559 A1 CL 2014002559A1 CL 2014002559 A CL2014002559 A CL 2014002559A CL 2014002559 A CL2014002559 A CL 2014002559A CL 2014002559 A1 CL2014002559 A1 CL 2014002559A1
Authority
CL
Chile
Prior art keywords
supplying
process gas
component solution
component
solution
Prior art date
Application number
CL2014002559A
Other languages
English (en)
Inventor
Daniel Alvarez Jr
Jeffrey J Spiegelman
Russell J Holmes
Edward Heinlein
Zohreh Shamsi
Original Assignee
Rasirc Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rasirc Inc filed Critical Rasirc Inc
Publication of CL2014002559A1 publication Critical patent/CL2014002559A1/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Drying Of Gases (AREA)
  • Accessories For Mixers (AREA)
  • Health & Medical Sciences (AREA)
  • Urology & Nephrology (AREA)
  • Water Supply & Treatment (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CL2014002559A 2012-03-28 2014-09-25 Método de suministro de una gas de proceso a partir de una solución multi-componente CL2014002559A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261617011P 2012-03-28 2012-03-28

Publications (1)

Publication Number Publication Date
CL2014002559A1 true CL2014002559A1 (es) 2015-01-23

Family

ID=49261053

Family Applications (1)

Application Number Title Priority Date Filing Date
CL2014002559A CL2014002559A1 (es) 2012-03-28 2014-09-25 Método de suministro de una gas de proceso a partir de una solución multi-componente

Country Status (13)

Country Link
US (1) US9610550B2 (es)
EP (1) EP2830748B1 (es)
JP (1) JP6290856B2 (es)
KR (1) KR102027475B1 (es)
CN (1) CN104203381B (es)
AU (1) AU2013240292B2 (es)
CA (1) CA2867883C (es)
CL (1) CL2014002559A1 (es)
IL (1) IL234808A0 (es)
MX (1) MX2014011521A (es)
RU (1) RU2014141210A (es)
SG (1) SG11201405948WA (es)
WO (1) WO2013148262A1 (es)

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US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
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WO2017027581A1 (en) * 2015-08-10 2017-02-16 Rasirc, Inc. Methods and systems for generating process gases
CN105445201B (zh) * 2015-11-06 2019-05-07 江苏鲁汶仪器有限公司 样品分析系统以及样品分析方法
KR102483803B1 (ko) * 2016-04-16 2022-12-30 라시크 아이엔씨. 프로세스 가스의 전달을 위한 방법, 시스템 및 장치
WO2018102139A1 (en) * 2016-12-01 2018-06-07 Rasirc, Inc. Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
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CN107694296A (zh) * 2017-10-27 2018-02-16 重庆华晨智创数控设备有限公司 新型膜干机
SG11202004314VA (en) * 2017-11-17 2020-06-29 Rasirc Inc Method, system, and device for storage and delivery of process gas from a substrate
US11458412B2 (en) * 2018-01-17 2022-10-04 Rasirc, Inc. Controlled vapor delivery into low pressure processes
EP3790598A4 (en) * 2018-05-08 2022-01-19 Trece, Inc. DISTRIBUTOR OF CHEMICAL PRODUCTS
WO2024074929A1 (en) 2022-10-03 2024-04-11 Rasirc, Inc. Hydrogen peroxide plasma etch of ashable hard mask

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Also Published As

Publication number Publication date
EP2830748A1 (en) 2015-02-04
WO2013148262A1 (en) 2013-10-03
AU2013240292B2 (en) 2018-02-15
MX2014011521A (es) 2015-01-16
EP2830748A4 (en) 2015-10-28
CN104203381B (zh) 2017-05-17
JP6290856B2 (ja) 2018-03-07
JP2015514005A (ja) 2015-05-18
CA2867883C (en) 2020-06-02
KR20140138890A (ko) 2014-12-04
SG11201405948WA (en) 2014-10-30
CN104203381A (zh) 2014-12-10
EP2830748B1 (en) 2018-08-08
CA2867883A1 (en) 2013-10-03
RU2014141210A (ru) 2016-05-20
IL234808A0 (en) 2014-12-31
AU2013240292A1 (en) 2014-09-25
KR102027475B1 (ko) 2019-10-01
US20150068611A1 (en) 2015-03-12
US9610550B2 (en) 2017-04-04

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