CN101018024A - Piezoelectric inertia step driving device - Google Patents

Abstract

The invention relates to a piezoelectric inertial step driving device, which belongs to the field of electromechanical combination. The two ends of the driving piezoelectric stack 1 are respectively bonded to the first moving block and the second moving block. The first moving block and the second moving block are slidably connected to the base, and the first moving block is bonded or combined with the clamping piezoelectric stack vibrator The first piezoelectric wafer vibrator is fixedly connected, and the second moving block is glued to the second clamped piezoelectric stacked vibrator or fixedly connected to the second composite piezoelectric wafer vibrator. Clamping is performed by the inertial impact force generated by the piezoelectric element. This kind of piezoelectric inertia stepping drive device is characterized by simple clamping structure, uniform movement step of the driving mechanism, simple control, and realizes precise displacement of the driving mechanism, and is suitable for the fields of robots and micro-displacement drives.

Description

Piezoelectric inertia stepper drive

technical field

The invention belongs to the field of electromechanical combination, and is a single-degree-of-freedom, multi-degree-of-freedom linear and rotary precision driver.

Background technique

In recent years, due to the rapid development of technologies such as microelectronics, optics, biomedical engineering, IC and superconductivity, data storage, ultra-precision machining and precision measurement, people have more and more interest in micro-nano-level precision positioning and driving technology. demand. Therefore, the research and development of precision drives based on different principles and structures has attracted widespread attention.

The current piezoelectric inertial drive mechanism mainly utilizes the inverse piezoelectric effect of the piezoelectric element, adopts asymmetric waveform excitation to form a two-way asymmetric inertial impact force, cooperates with the fixed friction force and organically combines the appropriate mechanical structure, through the circuit The orderly control of the system forms the driving action, and then forms a continuous directional movement. Among them, the driving mechanism that uses the rapid deformation of the piezoelectric element to generate the inertial impact force is to output an asymmetrical electrical signal through the design of the circuit system, so that the piezoelectric element can produce rapid elongation and slow retraction, or slow elongation and rapid contraction. Under the action of alternating electrical signals, the driving mechanism produces macroscopic one-way motion.

The piezoelectric stepping drive mechanism also utilizes the inverse piezoelectric effect of the piezoelectric element, which can realize precise displacement with large stroke and high resolution. The method is also known as the peristaltic type, but the movement process has clamping requirements, requires multiple different drive signals, and has high requirements for the control system.

Due to the complexity of the piezoelectric stepping clamp structure device and the asymmetric wave circuit controlled by the electrical signal generated by the piezoelectric inertial drive, it cannot fully meet the needs of the fields of precision displacement of the drive mechanism, robot, and micro-displacement drive.

Contents of the invention

The present invention proposes a novel piezoelectric inertial stepping drive device to solve the problem that the structure of the piezoelectric stepping clamping device and the asymmetrical wave circuit controlled by the electrical signal generated by the piezoelectric inertial drive are relatively complicated. Develop a new type of driving device to meet the needs of precision displacement, robotics, micro-displacement drive and other fields. The technical solution adopted by the present invention is: the two ends of the driving piezoelectric stack one 5 are bonded to the moving block one 1 and the moving block two 4 respectively, and the moving block one 1 and the moving block two 4 are slidably connected to the base (6) to move Block 1 is bonded with clamped piezoelectric stack vibrator 1 2 or fixedly connected with composite piezoelectric chip vibrator 1 2', and moving block 2 4 is bonded with clamped piezoelectric stack vibrator 2 3 or with composite piezoelectric chip Vibrator two 3' fixed connection.

Another embodiment of the present invention is: clamping piezoelectric stack vibrator 1 has a structure of clamping piezoelectric stack 1 201 bonded to inertia block 1 202, and clamping piezoelectric stack vibrator 2 has a structure of clamping pressure The second electrical stack 301 is bonded to the second inertial block 302 .

Another embodiment of the present invention is: the structure of the composite piezoelectric wafer vibrator 2' is based on an elastic metal sheet 201', and a piezoelectric wafer 202' is glued on one or both sides of the metal sheet. Both ends are symmetrically connected to mass block group one 203' and mass block group two 204', and the pressing plate 205' is fixedly connected to the elastic metal sheet 201'. The structure of the composite piezoelectric crystal vibrator 2 3' is the same as that of the composite piezoelectric crystal vibrator 1.

Another embodiment of the present invention is: moving block 3 8 is connected to moving block 2 4 and moving block 1 by driving piezoelectric stack 2 9 and driving piezoelectric stack 3 10 respectively, clamping piezoelectric stack vibrator 3 7 is fixedly connected with moving block 3 8, and moving block 3 is slidably connected with base 6.

Another embodiment of the present invention is: moving block three 8 is connected with moving block two 4 by driving piezoelectric stack two 9, moving block four 11 is connected with moving block three 8 by driving piezoelectric stack three 10, moving block four 11 is connected with the moving block 1 by driving the piezoelectric stack 4 13, the clamping piezoelectric stack vibrator 4 12 is fixedly connected with the moving block 4 11, and the moving block 4 11 is slidingly connected with the base 6, clamping the piezoelectric stack vibrator The third 7 is fixedly connected to the moving block three 8, the clamping piezoelectric stack vibrator four 12 is fixedly connected to the moving block four 11, and the four moving blocks are connected to the four driving piezoelectric stacks to form a square.

The excitation electric signal of the piezoelectric element in the present invention is a symmetrical wave.

The present invention uses the inertial impact force generated by the rapid deformation of the vertical piezoelectric element under the excitation of the symmetrical wave electric signal to realize the change of the positive pressure between the driving mechanism and the supporting surface and achieve the clamping of the mechanism 1. Release the control, cooperate with the rapid deformation of the piezoelectric element in the horizontal direction, so that the piezoelectric driving device moves step by step according to the predetermined direction. Obviously, this is a piezoelectric inertia stepping drive device that uses the inertial impact force generated by the rapid deformation of the piezoelectric element to change the friction force, that is, uses the difference in friction force and stepping motion to work. It combines the inverse piezoelectric effect and friction The drive device formed by the organic combination of force control, the invention of the drive device is a powerful supplement to the field of piezoelectric inertia drive technology.

The present invention uses conventional symmetrical electrical signals, such as sine waves, rectangular waves, triangular waves and other signals to realize the directional movement of the driving device. Force control method, and use the stepping drive principle to form directional movement.

Therefore, the present invention proposes to use a symmetrical waveform electric signal to drive the piezoelectric element to rapidly deform, to generate the same inertial impact force in both directions, to control the clamping device, and to control the change of the friction force between the driving device and the supporting surface to form a micro Small piezoelectric stepping motion drive device, this drive device combines the advantages of piezoelectric inertial drive and piezoelectric stepping drive, the main difference from the piezoelectric inertial impact drive mechanism currently studied is that the symmetrical waveform electrical signal is used as piezoelectric The excitation signal of the element controls the change of the friction force mechanically; compared with the piezoelectric stepping drive mechanism currently studied, its main feature is that it disregards the complicated clamping device and uses the inertial impact force generated by the piezoelectric element to clamp . This kind of piezoelectric inertia stepping drive device is characterized by simple clamping structure, uniform movement step of the driving mechanism, simple control, and realizes precise displacement of the driving mechanism, and is suitable for the fields of robots and micro-displacement drives.

Description of drawings

Fig. 1 is a schematic diagram of Embodiment 1 of a one-dimensional piezoelectric inertial stepping drive device of the present invention;

Fig. 2 is a schematic diagram of Embodiment 2 of the one-dimensional piezoelectric inertial stepping drive device of the present invention;

Fig. 3 is a cross-sectional view of the piezoelectric bimorph vibrator structure of the present invention;

Fig. 4 is a schematic diagram of Embodiment 3 of the three-dimensional piezoelectric inertial stepping drive device of the present invention;

Fig. 5 is a schematic diagram of Embodiment 4 of the three-dimensional piezoelectric inertial stepping drive device of the present invention.

Detailed ways:

Embodiment 1. A one-dimensional piezoelectric inertial stepping drive device of the present invention

As shown in Figure 1. The two ends of the driving piezoelectric stack 1 and 5 are respectively bonded to the moving block 1 and the moving block 2 4. The moving block 1 and the moving block 2 4 are slidably connected to the base 6, and the moving block 1 is connected to the clamping piezoelectric stack Vibrator 1 and 2 are bonded, moving block 2 4 is bonded with clamped piezoelectric stack vibrator 2 3; the structure of clamped piezoelectric stack vibrator 1 is that clamped piezoelectric stack 1 201 is bonded with inertial block 1 202 , the structure of clamping piezoelectric stack vibrator 2 is that clamping piezoelectric stack 2 301 and inertia block 2 302 are bonded. The working process is as follows: firstly, under the simultaneous excitation of electrical signals, clamping piezoelectric stack 1 201 rapidly elongates and deforms, clamping piezoelectric stack 2 301 rapidly shrinks and deforms, and drives piezoelectric stack 1 5 rapidly elongates and deforms. Clamping piezoelectric stack 1 201 drives mass block 1 202 to move upward quickly, and according to the knowledge of mechanics, it will generate a downward inertial impact force, increasing the positive pressure of moving block 1 on the bottom plate. The clamp piezoelectric stack 2 301 drives the mass block 302 to move down rapidly, generating an upward inertial impact force, which reduces the positive pressure of the moving block 2 4 on the base. When the piezoelectric stack 5 is driven to elongate and deform rapidly, the moving block 1 and the moving block 2 4 are simultaneously subjected to thrusts of equal magnitude and opposite directions. Since the positive pressure of the moving block 1 is greater than that of the moving block 2 4, the moving block 2 4 will move a small step to the right; then clamp piezoelectric stack 1 201 rapidly shrinks and deforms, clamp piezoelectric stack 2 301 rapidly elongates and deforms, and when driving piezoelectric stack 5 rapidly shrinks and deforms, simultaneously Theoretically, the positive pressure of the moving block 1 decreases, and the positive pressure of the moving block 2 4 increases, and the moving block 1 follows up a small step to the right under the drive of the rapid shrinkage and deformation of the piezoelectric stack 1 5 . The piezoelectric driving device completes the movement of one motion cycle, and the piezoelectric driving device will repeat the above motion process in the next cycle. With the continuous excitation of the driving source signal, the piezoelectric driving device will produce a macroscopically stable motion to the right. If the timing of the excitation signals for clamping piezoelectric stack one 201 , clamping piezoelectric stack two 301 and driving piezoelectric stack one 5 is changed, the piezoelectric driving device will move to the left side of FIG. 1 .

Embodiment 2. A kind of one-dimensional piezoelectric inertial stepping drive device of the present invention

As shown in Figure 2 and Figure 3. The two ends of the driving piezoelectric stack 1 and 5 are respectively bonded to the moving block 1 and the moving block 2 4. The moving block 1 and the moving block 2 4 are slidably connected to the base 6, and the moving block 1 is connected to the composite piezoelectric wafer vibrator 1. 2' is fixedly connected, and the moving block 2 4 is fixedly connected with the composite piezoelectric wafer vibrator 2 3'; the structure of the composite piezoelectric wafer vibrator 1 2' is based on an elastic metal sheet 201', and on one side or both sides of the metal sheet The piezoelectric chip 202' is attached to each side, and the two ends of the metal sheet are symmetrically connected to the mass block group 1 203' and the mass block group 2 204', and the pressing plate 205' is fixedly connected to the elastic metal sheet 201' and connected to the moving block 1; The structure of the composite piezoelectric wafer vibrator 2 3' is based on an elastic metal sheet 301', and a piezoelectric wafer 302' is attached to one or both sides of the metal sheet, and the two ends of the metal sheet are symmetrically connected to the mass block group 3 303 'and mass block group four 304', the pressure plate 305' is fixedly connected with the elastic metal sheet 301', and is connected with the second moving block. The working process is as follows: Firstly, under the simultaneous excitation of the symmetrical wave electric signal, the piezoelectric bimorph vibrator 1 2' quickly deforms concavely, and the mass block 203' and mass block 2 204' generate downward inertial force, so that the moving block 1 1 The positive pressure between the base 6 and the base 6 increases; the piezoelectric bimorph vibrator 2 3' rapidly deforms, and the mass block 3 303' and mass block 4 304' generate an upward inertial force, so that the gap between the moving block 2 4 and the base 6 The positive pressure is reduced, and in the same way as in Example 1, when the piezoelectric stack-5 is driven to rapidly elongate or shorten the deformation, the driving device generates a stepping motion to the right, changing the timing sequence of the excitation signal of the piezoelectric element, the device will move to the right Step left motion.

Embodiment 3. A piezoelectric drive device for three-dimensional motion of the present invention

As shown in Figure 4, the two ends of the driving piezoelectric stack 1 and 5 are respectively bonded to the moving block 1 and the moving block 2 4, the moving block 1 and the moving block 2 4 are slidably connected to the base 6, and the moving block 1 is connected to the base 6. The clamped piezoelectric stack vibrator 1 and 2 are bonded, the moving block 2 4 is bonded with the clamped piezoelectric stack vibrator 2 3; the moving block 3 8 passes through the driving piezoelectric stack 2 9 and the driving piezoelectric stack 3 10 respectively It is connected with the second moving block and the first moving block, the clamp piezoelectric stack vibrator three 7 is fixedly connected with the third moving block 8 , and the third moving block is slidingly connected with the base 6 . The basic principle of generating planar motion is as follows: when the clamp piezoelectric stack 1 201 , clamp piezoelectric stack 2 301 , and clamp piezoelectric stack 3 701 are rapidly stretched and deformed in three vertical directions, the mass block is driven One 202, mass two 302, and mass three 702 accelerate the movement, which can change the positive pressure between the moving block 1, the moving block 2 4, the moving block 3 8 and the bottom plate 6, and control the three driving piezoelectrics arranged in the horizontal direction. Stack one 5, drive piezoelectric stack two 9, drive piezoelectric stack three 10 to stretch and deform regularly, can make the piezoelectric driving mechanism move or rotate in a plane.

Embodiment 4 A three-dimensional motion piezoelectric drive device of the present invention

As shown in Figure 5, the two ends of the driving piezoelectric stack one 5 are bonded to the moving block one 1 and the moving block two 4 respectively, the moving block one 1 and the moving block two 4 are slidably connected to the base 6, and the moving block one 1 and the moving block two 4 are slidably connected to each other. The clamped piezoelectric stack vibrator 1 and 2 are bonded, the moving block 2 4 is bonded to the clamped piezoelectric stack vibrator 2 3; the moving block 3 8 is connected to the moving block 2 4 by driving the piezoelectric stack 2 9, and the moving block Four 11 is connected to moving block three by driving piezoelectric stack three 10, moving block four is connected to moving block one by driving piezoelectric stack four 13, clamping piezoelectric stack vibrator four 12 is fixedly connected to moving block four 11, The moving block four is slidingly connected to the base 6, the clamping piezoelectric stack vibrator three 7 is fixedly connected to the moving block three 8, the clamping piezoelectric stack vibrator four 12 is fixedly connected to the moving block four 11, and the four moving blocks are connected to the four moving blocks Actuated piezo stacks are connected to form a square. The basic principle of generating planar motion is as follows: when four clamping piezoelectric stacks 1 201, clamping piezoelectric stack 2 301, clamping piezoelectric stack 3 701, clamping piezoelectric stack 4 When 1201 rapidly expands and deforms, mass block 1 202 , mass block 2 302 , mass block 3 702 , mass block 4 1202 are accelerated to move, and moving block 1 , moving block 2 4 , moving block 3 8 , and moving block 4 11 can be changed. The positive pressure between the base and the base 6 controls the four driving piezoelectric stacks 15, 2 driving piezoelectric stacks 9, driving piezoelectric stack 3 10, and driving piezoelectric stack 4 13 arranged in the horizontal direction. The telescopic deformation can cause the piezoelectric drive mechanism to move or rotate in a plane. The movement principle of this device is the same as that of the three-dimensional motion piezoelectric drive device shown in Figure 4, but the drive control is simpler.

The present invention utilizes a symmetrical waveform electric signal to drive the piezoelectric element to rapidly deform, to generate the same inertial impact force in both directions, to form a change in the frictional force between the drive device and the support surface for embedding, and to generate a stepping motion in combination with the deformation of the drive element. A new type of miniature inertial stepping drive device has been realized.

Claims (6)

1, a kind of piezoelectric inertia step driving device, it is characterized in that: it is bonding with movable block one (1), movable block two (4) respectively to drive piezoelectric stack one (5) two ends, this movable block one (1) and movable block two (4) are slidingly connected with base (6), movable block one (1) and clamp piezoelectric stack oscillator one (2) are bonding or fixedly connected with one (2 ') of composite piezoelectric wafer oscillator, and movable block two (4) and clamp piezoelectric stack oscillator two (3) are bonding or fixedly connected with two (3 ') of composite piezoelectric wafer oscillator.

2, piezoelectric inertia step driving device according to claim 1, it is characterized in that: the structure of clamp piezoelectric stack oscillator one is that clamp piezoelectric stack one (201) is bonding with inertial mass one (202), and the structure of clamp piezoelectric stack oscillator two is that clamp piezoelectric stack two (301) is bonding with inertial mass two (302).

3, piezoelectric inertia step driving device according to claim 1, it is characterized in that: the structure of one (2 ') of composite piezoelectric wafer oscillator is as substrate by elastic sheet metal (201 '), one-sided or each sticking piezoelectric chip (202 ') of bilateral at this sheet metal, two ends symmetry quality of connection piece one (203 ') of group and the mass group two (204 ') of this sheet metal, pressing plate (205 ') is fixedlyed connected with elastic sheet metal (201 ').

4, piezoelectric inertia step driving device according to claim 1, it is characterized in that: movable block three (8) is connected with movable block one (1) with movable block two (4) with driving piezoelectric stack three (10) by driving piezoelectric stack two (9) respectively, clamp piezoelectric stack oscillator three (7) is fixedlyed connected with movable block three (8), and movable block three (8) is slidingly connected with base (6).

5, piezoelectric inertia step driving device according to claim 1, it is characterized in that: movable block three (8) is connected with movable block two (4) by driving piezoelectric stack two (9), movable block four (11) is connected with movable block three by driving piezoelectric stack three (10), the movable block four-way piezoelectric stack four (13) of overdriving is connected with movable block one (1), movable block four (11) is slidingly connected with base (6), clamp piezoelectric stack oscillator three (7) is fixedlyed connected with movable block three (8), clamp piezoelectric stack oscillator four (12) is fixedlyed connected with movable block four (11), and these four movable blocks and four driving piezoelectric stacks are connected to form square.

6, according to claim 1 or 2 or 3 or 4 or 5 described piezoelectric inertia step driving devices, it is characterized in that: the excitation signal of telecommunication of piezoelectric element is a symmetrical wave.

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