CN101080471A - Polyimide multilayer adhesive film and its manufacturing method - Google Patents

Polyimide multilayer adhesive film and its manufacturing method Download PDF

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CN101080471A
CN101080471A CN 200580043088 CN200580043088A CN101080471A CN 101080471 A CN101080471 A CN 101080471A CN 200580043088 CN200580043088 CN 200580043088 CN 200580043088 A CN200580043088 A CN 200580043088A CN 101080471 A CN101080471 A CN 101080471A
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polyimide
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栁田正美
上岛健二
小松利幸
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Kaneka Corp
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Abstract

The object of the present invention is to provide a polyimide multilayer adhesive film capable of accurately measuring the thickness of each layer by an infrared absorption method, and a method for producing the same. The adhesive film comprises a highly heat-resistant polyimide layer and an adhesive layer containing a thermoplastic polyimide formed on at least one surface of the highly heat-resistant polyimide layer, wherein the adhesive film is produced by a coextrusion-casting coating method, and either the highly heat-resistant polyimide layer or the adhesive layer contains a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength as a main component; in the subsequent film thickness measuring step, the film thickness of each layer is measured by an infrared absorption film thickness meter, and the film thickness of each layer at the time of film formation is controlled and adjusted based on the obtained film thickness dimension data, thereby providing the polyimide multilayer adhesive film of the present invention.

Description

聚酰亚胺多层粘合膜及其制造方法Polyimide multilayer adhesive film and its manufacturing method

技术领域technical field

本发明涉及在高耐热性聚酰亚胺层的至少一面设置含有热塑性聚酰亚胺的粘合层、且控制各层膜厚的多层粘合膜,用于制造该控制了各层膜厚的膜的技术。The present invention relates to a multilayer adhesive film in which an adhesive layer containing thermoplastic polyimide is provided on at least one side of a high heat-resistant polyimide layer and the film thickness of each layer is controlled. Thick film technology.

背景技术Background technique

近年来,随着电子制品的轻量化、小型化、高密度化,各种印刷基板的需求增加,其中,挠性层叠板(也称为挠性印刷线路板(FPC)等)的需求尤为增加。挠性层叠板具有下述结构:在绝缘性膜上形成含有金属箔的回路。In recent years, with the reduction in weight, miniaturization, and high density of electronic products, the demand for various printed circuit boards has increased, and the demand for flexible laminates (also called flexible printed circuit boards (FPC), etc.) has particularly increased. . The flexible laminate has a structure in which a circuit including metal foil is formed on an insulating film.

上述挠性层叠板一般是由各种绝缘材料形成的,将有柔软性的绝缘性膜作为基板,在该基板的表面,通过各种粘合材料对金属箔进行加热、压合而使其粘合的方法来进行制造。作为上述绝缘性膜,优选使用聚酰亚胺膜等。作为上述粘合材料,一般使用环氧类、丙烯酸类等热固性粘合剂(使用这些热固性粘合剂的FPC以下也称为三层FPC)。The above-mentioned flexible laminate is generally formed of various insulating materials, and a flexible insulating film is used as a substrate. On the surface of the substrate, metal foil is heated and pressed by various adhesive materials to make it bonded. combined method to manufacture. As the insulating film, a polyimide film or the like is preferably used. As the adhesive material, thermosetting adhesives such as epoxy and acrylic are generally used (FPCs using these thermosetting adhesives are also referred to as three-layer FPC hereinafter).

热固性粘合剂具有可以在较低温下粘合的优点。但是,随着今后对耐热性、弯曲性、电可靠性的要求特性变严格,认为使用热固性粘合剂的三层FPC是难以符合要求的。对此,提案有在绝缘性膜上使金属层直接层叠而得的材料,及在粘合层上使用热塑性聚酰亚胺类化合物的FPC(以下也称为二层FPC)。该二层FPC具有比三层FPC优越的特性,被期望成为在产业上有用的制品。Thermosetting adhesives have the advantage of being able to bond at lower temperatures. However, as the requirements for heat resistance, flexibility, and electrical reliability become stricter in the future, it is considered difficult to meet the requirements for three-layer FPC using thermosetting adhesives. In response to this, a material in which a metal layer is directly laminated on an insulating film, and an FPC in which a thermoplastic polyimide compound is used on an adhesive layer (hereinafter also referred to as a two-layer FPC) have been proposed. This two-layer FPC has characteristics superior to those of the three-layer FPC, and is expected to be an industrially useful product.

作为用于二层FPC的挠性金属粘合层叠板的制作方法,可以举出在金属箔上流延、涂布作为聚酰亚胺类化合物前体的聚酰胺酸之后进行酰亚胺化的浇铸法,通过溅射、镀敷在聚酰亚胺膜上直接设置金属层的喷镀金属法,通过热塑性聚酰亚胺类化合物粘合聚酰亚胺膜和金属箔的层压法。其中,层压法有如下优点:符合要求的金属箔的厚度范围比浇铸法广,装置成本比喷镀金属法低。作为进行层压的装置,可以使用一边陆续送出辊状的材料,一边连续进行层压的热辊层压装置或双带压制装置等。Examples of methods for producing flexible metal bonded laminates for two-layer FPC include casting on metal foil, applying polyamic acid as a precursor of polyimide compounds, and then imidizing. The sputtering and plating method is a metal spraying method in which a metal layer is directly provided on a polyimide film, and the lamination method is a lamination method in which a thermoplastic polyimide compound is used to bond a polyimide film and a metal foil. Among them, the lamination method has the following advantages: the thickness range of the metal foil that meets the requirements is wider than that of the casting method, and the device cost is lower than that of the metal spraying method. As an apparatus for performing lamination, a hot roll lamination apparatus, a double-belt press apparatus, or the like that continuously laminates while sending out roll-shaped materials one after another can be used.

在此,作为层压法中使用的基板材料,可以广泛使用在聚酰亚胺膜的至少一面设有热塑性聚酰亚胺类化合物层的多层粘合膜(以下称为粘合膜)。Here, as a substrate material used in the lamination method, a multilayer adhesive film (hereinafter referred to as an adhesive film) in which a thermoplastic polyimide compound layer is provided on at least one surface of a polyimide film can be widely used.

作为以这样的聚酰亚胺膜为基材的粘合膜的制造方法,有如下方法:1)在成为基材的高耐热性聚酰亚胺膜的一面或两面,用辊涂机或模具式涂布机等涂布溶液状态的热塑性聚酰亚胺类化合物或其前体,使其干燥而制造的涂布法;使用不同的挤压成型口模将成为基材的高耐热性聚酰亚胺类化合物的溶液和/或前体的溶液(以下称为“高耐热性聚酰亚胺类化合物清漆”)和热塑性聚酰亚胺类化合物的溶液和/或前体的溶液(以下称为“热塑性聚酰亚胺类化合物清漆”)进行挤压成型,在膜的制作方向并列设置口模,将膜层叠并使其干燥来制造的同时挤压制膜法;进而用挤压成型口模将高耐热性聚酰亚胺类化合物清漆制膜,用辊涂机或模具式涂布机涂布热塑性聚酰亚胺类化合物清漆,使其干燥而制造的挤压制膜同时涂布法。此外,还可举出在成为基材的高耐热性聚酰亚胺膜的一面或两面与热塑性聚酰亚胺膜加热粘合来加工制造的热层压法。As a method of manufacturing an adhesive film using such a polyimide film as a base material, there are the following methods: 1) On one side or both sides of the high heat-resistant polyimide film as the base material, use a roll coater or A coating method in which a thermoplastic polyimide compound or its precursor in a solution state is applied by a die-type coater, and then dried; using a different extrusion die will become a high heat resistance of the base material Solution of polyimide compound and/or precursor solution (hereinafter referred to as "high heat-resistant polyimide compound varnish") and solution of thermoplastic polyimide compound and/or precursor solution (hereinafter referred to as "thermoplastic polyimide compound varnish") is extrusion-molded, dies are arranged side by side in the production direction of the film, and the film is laminated and dried to produce a simultaneous extrusion film-making method; Extrusion film manufactured by forming a high heat-resistant polyimide compound varnish into a film with a compression molding die, applying a thermoplastic polyimide compound varnish with a roll coater or die coater, and drying it Simultaneous coating method. In addition, a thermal lamination method in which a thermoplastic polyimide film is thermally bonded to one side or both sides of a highly heat-resistant polyimide film serving as a base material, and processed and manufactured is also mentioned.

用这些方法得到的粘合膜,必须提高不同种类的聚酰亚胺树脂间的粘合,但一般而言,不同种类的聚酰亚胺树脂间的粘合性差,大多难以得到足够强度的粘合膜。作为提高不同种类的聚酰亚胺树脂间的粘合性的方法,通过如下方式来制作粘合膜的方法最为有效:使用含有不同种类的聚酰亚胺树脂的溶液和/或含有其前体的溶液来制成多层结构的液膜,流延到平滑的基材上,接着,加热干燥该液膜,如此来制作粘合膜。作为形成多层液膜的方法,可以举出下述公知的方法:使用多层口模进行挤压成型的共挤压制膜法(例如专利文献1和2),使用滑动模(slidedie)的方法(例如专利文献3),逐次涂布法等。Adhesive films obtained by these methods must improve the adhesion between different types of polyimide resins, but generally speaking, the adhesion between different types of polyimide resins is poor, and it is difficult to obtain adhesive films of sufficient strength. Co-membrane. As a method of improving the adhesiveness between different types of polyimide resins, it is most effective to produce an adhesive film by using a solution containing different types of polyimide resins and/or containing its precursor solution to form a multilayer liquid film, which is cast onto a smooth substrate, and then heated and dried to form an adhesive film. As a method for forming a multilayer liquid film, the following known methods can be mentioned: a co-extrusion film forming method using a multilayer die for extrusion molding (for example, Patent Documents 1 and 2), and a method using a sliding die (slidedie). method (for example, Patent Document 3), sequential coating method, and the like.

上述制造方法中存在的问题是,很难大概实时地调整连续制造的粘合膜的厚度。为了大概实时地调整连续制造的粘合膜的厚度,必须在线精确地测定粘合膜各层的厚度。然而,以往,在线精确地测定粘合膜各层的厚度是极为困难的,很难得到具有均匀厚度的粘合膜。There is a problem in the above-mentioned production method that it is difficult to adjust the thickness of the continuously produced adhesive film approximately in real time. In order to adjust the thickness of a continuously produced adhesive film approximately in real time, it is necessary to accurately measure the thickness of each layer of the adhesive film on-line. However, in the past, it was extremely difficult to accurately measure the thickness of each layer of an adhesive film online, and it was difficult to obtain an adhesive film with a uniform thickness.

作为精确测定多层膜各层的厚度的方法,可以举出光干涉方式、红外线吸收方式,但作为在线测定方法,由于测定时间短等要求,优选使用红外线吸收方式。然而,该粘合膜的各层分别由具有不同的高耐热性和热塑性、但分子结构极为相似的聚酰亚胺树脂形成,因此,就将各层的红外线吸收强度的不同换算为厚度的红外线吸收方式来说,存在难以正确地测定厚度的问题。As methods for accurately measuring the thickness of each layer of a multilayer film, optical interference method and infrared absorption method can be mentioned, but as an on-line measurement method, due to requirements such as short measurement time, infrared absorption method is preferably used. However, each layer of this adhesive film is formed of polyimide resins that have different high heat resistance and thermoplastic properties, but have very similar molecular structures. Therefore, the difference in infrared absorption intensity of each layer is converted into thickness In the infrared absorption method, there is a problem that it is difficult to measure the thickness accurately.

在这些多层膜中,各层的膜厚尺寸精密度是重要的规格之一。就多层膜的各层的膜厚尺寸的调整方法而言,例如,如果是在上述的基材膜上涂布树脂溶液的涂布法,则有通过控制涂布口模的挤出量、或控制辊涂机与基材膜的间隙来调整涂布膜厚的方式;另外,如果是使用上述的挤压成型口模的挤压制膜法,则有通过埋入于多层口模的凸缘部的加热器来控制树脂温度、从而调整膜厚尺寸的方式,及用阀控制各层的流路截面积来调整膜的膜厚尺寸的方式。(例如专利文献4)In these multilayer films, the dimensional precision of the film thickness of each layer is one of the important specifications. Regarding the method of adjusting the film thickness of each layer of the multilayer film, for example, if it is the coating method of coating the resin solution on the above-mentioned base film, then there is a method of controlling the extrusion amount of the coating die, Or control the gap between the roll coater and the substrate film to adjust the thickness of the coating film; in addition, if it is the extrusion film-making method using the above-mentioned extrusion die, there is a method of embedding in the multi-layer die. A method in which the resin temperature is controlled by a heater in the flange part to adjust the film thickness dimension, and a method in which the film thickness dimension of the film is adjusted by controlling the cross-sectional area of the flow path of each layer with a valve. (for example, patent document 4)

另外,有用可以测定多层膜的各层膜厚尺寸的红外线吸收方式或光干涉方式的膜厚计测定各膜厚度尺寸,将该膜厚尺寸数据反馈到膜厚调整装置的方式(例如专利文献5)。In addition, there is a method of measuring each film thickness dimension with an infrared absorption method or an optical interference method film thickness gauge capable of measuring the film thickness dimension of each layer of a multilayer film, and feeding back the film thickness dimension data to the film thickness adjustment device (for example, patent document 5).

专利文献1:第2946416号公报Patent Document 1: Publication No. 2946416

专利文献2:特开平7-214637号公报Patent Document 2: JP-A-7-214637

专利文献3:特开2003-342390号公报Patent Document 3: JP-A-2003-342390

专利文献4:特开2000-127227号公报Patent Document 4: JP-A-2000-127227

专利文献5:特开2000-71309号公报Patent Document 5: JP-A-2000-71309

发明内容Contents of the invention

本发明是鉴于上述课题而完成的,提供聚酰亚胺多层粘合膜及其制造方法,所述聚酰亚胺多层粘合膜用红外线吸收方式可以正确地测定各层的厚度,所以粘合膜及膜内各层的膜厚偏差少。The present invention has been accomplished in view of the above-mentioned problems, and provides a polyimide multilayer adhesive film capable of accurately measuring the thickness of each layer by an infrared absorption method, and a method for producing the same. The film thickness deviation of the adhesive film and each layer in the film is small.

控制上述的涂布口模的挤出量、辊涂机与基材膜的间隙的方法,用埋入到多层口模的凸缘部的加热器来调整膜厚尺寸的方法,用阀来控制各层的流路截面积来调整膜厚尺寸的方法,这些方法都必须高精密度地测定成型而得的多层膜的各层的膜厚尺寸,将该膜厚尺寸数据反馈到各膜厚尺寸控制装置中,来调整、控制各膜厚尺寸。The method of controlling the extrusion amount of the above-mentioned coating die, the gap between the roll coater and the base film, the method of adjusting the film thickness with the heater embedded in the flange of the multi-layer die, and the valve A method of controlling the flow path cross-sectional area of each layer to adjust the film thickness dimension. In these methods, it is necessary to measure the film thickness dimension of each layer of the formed multilayer film with high precision, and feed back the film thickness dimension data to each film. In the thickness dimension control device, each film thickness dimension is adjusted and controlled.

总之,上述制造方法中的问题是,大概实时地调整连续制造的多层膜的各层的膜厚是困难的。例如,虽然有如下方法:切取多层膜来进行取样,用显微镜等观察、测量截面的方法,但那就不能大概实时地将测量数据反馈到制膜工序中。为了大概实时地调整连续制造的多层膜的膜厚,有必要在线高精密度地测定多层膜的各膜的膜厚尺寸。但是,以往在线高精密度地测定多层膜的各层膜厚是极为困难的。In short, there is a problem in the above-mentioned production method that it is difficult to adjust the film thickness of each layer of a continuously produced multilayer film in approximately real time. For example, although there are methods of cutting out a multilayer film for sampling, observing and measuring the cross section with a microscope, etc., it is not possible to feed back the measured data to the film production process in almost real time. In order to adjust the film thickness of the continuously produced multilayer film approximately in real time, it is necessary to measure the film thickness dimension of each film of the multilayer film online with high precision. However, it has been extremely difficult to measure the film thickness of each layer of a multilayer film on-line with high precision.

例如,使用接触式的直读式厚度计作为在线设置膜厚测定装置的方式,虽可以测定多层膜的总膜厚度尺寸,但理论上不能测定各层的膜厚尺寸。For example, using a contact-type direct-reading thickness gauge as a way to install a film thickness measuring device online, although the total film thickness of a multilayer film can be measured, the film thickness of each layer cannot be measured theoretically.

另一方面,如专利文献2所述的那样的方法,在红外线吸收波长和折射率相同的材质的膜所层叠的多层膜中,有不能正确地测定各层的膜厚尺寸的问题。特别是,在以聚酰亚胺类树脂为主要材料的多层膜的情况下,由虽然高耐热性及热塑性不同、但分子结构极为相似的聚酰亚胺树脂来形成各层,因而,各层中不产生有特征的红外线吸收波长,对于用红外线吸收波长的不同及其吸收量的差异来进行各层的分析和换算膜厚尺寸的红外线吸收方式来说,难以正确测定膜厚尺寸,进而,不能大概实时地向制膜工序的膜厚控制装置反馈,存在不能生产膜厚尺寸稳定的高精密度的多层膜的问题。On the other hand, with the method described in Patent Document 2, there is a problem that the film thickness dimension of each layer cannot be accurately measured in a multilayer film in which films of materials having the same infrared absorption wavelength and refractive index are laminated. In particular, in the case of a multilayer film mainly made of a polyimide resin, each layer is formed of a polyimide resin having a very similar molecular structure although its high heat resistance and thermoplasticity are different. There is no characteristic infrared absorption wavelength in each layer, and it is difficult to accurately measure the film thickness for the infrared absorption method that uses the difference in the infrared absorption wavelength and the difference in the absorption amount to analyze each layer and convert the film thickness. Furthermore, it is impossible to feed back to the film thickness control device in the film forming process in almost real time, and there is a problem that a high-precision multilayer film with stable film thickness and dimension cannot be produced.

本发明人等鉴于上述课题进行了精心研究,结果单独发现:用红外线吸收方式的膜厚计能够正确地测定各层的膜厚尺寸的多层膜的构成要件及包括将该膜厚尺寸数据反馈而使膜厚尺寸稳定的制膜工序的膜厚控制系统。通过以下新的多层膜的制造方法来解决上述课题,从而完成了本发明。The inventors of the present invention conducted intensive studies in view of the above-mentioned problems, and as a result independently found that an infrared absorption type film thickness gauge can accurately measure the film thickness dimensions of each layer. And the film thickness control system of the film forming process that stabilizes the film thickness dimension. The present invention has been accomplished by solving the above-mentioned problems by the following novel manufacturing method of a multilayer film.

即,本发明涉及粘合膜,其具有高耐热性聚酰亚胺层和在该高耐热性聚酰亚胺层的至少一个表面形成的、含有热塑性聚酰亚胺的粘合层,其特征为,高耐热性聚酰亚胺层或粘合层的任意一方以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分。还涉及上述粘合膜,其优选的实施方式的特征为,显示特征性红外线吸收波长的官能团是甲基、磺基(スルホン基)、氟代甲基。That is, the present invention relates to an adhesive film having a highly heat-resistant polyimide layer and an adhesive layer containing thermoplastic polyimide formed on at least one surface of the highly heat-resistant polyimide layer, It is characterized in that either one of the highly heat-resistant polyimide layer or the adhesive layer contains a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength as a main component. It also relates to the aforementioned adhesive film, and a preferred embodiment thereof is characterized in that the functional group exhibiting a characteristic infrared absorption wavelength is a methyl group, a sulfon group, or a fluoromethyl group.

进而涉及上述粘合膜,其优选的实施方式的特征为,该粘合膜是用共挤压-流延涂布法在高耐热性聚酰亚胺层的至少一面层叠含有热塑性聚酰亚胺的粘合层来制造的。Furthermore, it relates to the above-mentioned adhesive film, and its preferred embodiment is characterized in that the adhesive film is laminated with a thermoplastic polyimide layer on at least one side of a high heat-resistant polyimide layer by a co-extrusion-cast coating method. Amine adhesive layer to manufacture.

更详细而言,1)聚酰亚胺多层膜的制造方法,其是制造至少二层以上的、含有聚酰亚胺树脂的多层膜的方法,其特征为,包括下述工序:多层膜的制作工序,该多层膜的至少1个以上的层为以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分的层;在该膜的厚度方向上照射红外线来测定红外线的吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸的工序;将算出的膜厚尺寸数据反馈到多层膜的制作工序,在制作工序中施加调整各层膜厚的操作的工序。More specifically, 1) a method for producing a polyimide multilayer film, which is a method for producing at least two or more layers of a polyimide resin-containing multilayer film, which is characterized in that it includes the following steps: A process for producing a multilayer film, wherein at least one or more layers of the multilayer film is a layer mainly composed of a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength; irradiating infrared rays in the thickness direction of the film to The process of measuring the distribution of infrared absorption wavelengths and calculating the film thickness of each layer from the infrared absorption in the characteristic wavelength range of each layer; feeding back the calculated film thickness data to the production process of the multilayer film, in the production process A process of applying an operation to adjust the film thickness of each layer.

2)根据1)所述的聚酰亚胺多层粘合膜的制造方法,其特征为,所述多层膜由含有高耐热性聚酰亚胺树脂的层和含有热塑性聚酰亚胺树脂的层形成。2) The method for producing a polyimide multilayer adhesive film according to 1), wherein the multilayer film is composed of a layer containing a high heat-resistant polyimide resin and a layer containing a thermoplastic polyimide A layer of resin is formed.

3)根据2)所述的聚酰亚胺多层粘合膜的制造方法,其中,所述多层膜的结构为,在含有高耐热性聚酰亚胺树脂的层的两面,配置有含有热塑性树脂聚酰亚胺树脂的层。3) The method for producing a polyimide multilayer adhesive film according to 2), wherein the structure of the multilayer film is that, on both sides of a layer containing a highly heat-resistant polyimide resin, a A layer containing thermoplastic resin polyimide resin.

4)根据1)~3)中所述的聚酰亚胺多层粘合膜的制造方法,其中,上述显示特征性红外线吸收波长的官能团是选自甲基、磺基、氟代甲基中的1个以上的官能团。4) The method for producing a polyimide multilayer adhesive film according to 1) to 3), wherein the functional group exhibiting a characteristic infrared absorption wavelength is selected from the group consisting of methyl, sulfo, and fluoromethyl more than one functional group.

5)根据1)~4)中所述的聚酰亚胺多层粘合膜的制造方法,其中,所述多层膜的制作工序中,将具有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂或其前体的溶液用共挤压-流延涂布制膜法来制膜。5) The method for producing a polyimide multilayer adhesive film according to 1) to 4), wherein, in the production step of the multilayer film, polyimide having a functional group exhibiting a characteristic infrared absorption wavelength A solution of imine resin or its precursor is used to form a film by co-extrusion-cast coating film forming method.

6)根据1)~5)中所述的聚酰亚胺多层粘合膜的制造方法,其中,上述多层膜的制作工序中,在含有至少一层以上的含聚酰亚胺树脂的层的膜表面,涂布含有聚酰胺酸或聚酰亚胺树脂的溶液,进行加热、干燥,通过如此的方法来制膜。6) The method for producing a polyimide multilayer adhesive film according to 1) to 5), wherein, in the production process of the above-mentioned multilayer film, in the polyimide-containing resin containing at least one layer The film surface of the layer is coated with a solution containing polyamic acid or polyimide resin, heated and dried to form a film.

通过本发明,可以提供以红外线吸收方式能正确测定各层厚度的粘合膜。According to the present invention, it is possible to provide an adhesive film capable of accurately measuring the thickness of each layer by an infrared absorption method.

即,本发明的聚酰亚胺多层膜的制造,是在构成多层的聚酰亚胺膜上用具有特征性红外线吸收波长的聚酰亚胺树脂层来制膜,在其后的膜厚测定工序中,在该多层膜的厚度方向上照射红外线,测定所通过的红外线吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸,将该得到的膜厚尺寸数据反馈到制膜工序中,来控制、调整各层的膜厚,因此,可以制造各层的膜厚尺寸均匀、连续生产性优异的聚酰亚胺多层膜。That is, the manufacture of the polyimide multilayer film of the present invention is to form a film with a polyimide resin layer having a characteristic infrared absorption wavelength on the polyimide film constituting the multilayer, and the subsequent film In the thickness measurement process, infrared rays are irradiated in the thickness direction of the multilayer film, the distribution of the infrared absorption wavelengths passed is measured, and the film thickness dimensions of each layer are calculated from the infrared absorption amounts in the characteristic wavelength ranges of each layer, and the obtained The film thickness data of each layer is fed back to the film forming process to control and adjust the film thickness of each layer. Therefore, it is possible to manufacture a polyimide multilayer film with uniform film thickness and excellent continuous productivity.

以下说明本发明的实施方式。Embodiments of the present invention will be described below.

本发明中使用的聚酰亚胺多层膜的制造方法,其是制造至少二层以上的、含有聚酰亚胺树脂的多层膜的方法,其特征为,包括下述工序:多层膜的制作工序,该多层膜的至少1个以上的层为以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分的层;在该膜的厚度方向上照射红外线来测定红外线的吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸的工序;将算出的膜厚尺寸数据反馈到多层膜的制作工序,在制作工序中施加调整各层膜厚的操作的工序。The method for producing a polyimide multilayer film used in the present invention is a method for producing at least two or more layers of a multilayer film containing a polyimide resin, and is characterized in that it includes the following steps: a multilayer film In the production process of the multilayer film, at least one or more layers of the multilayer film are layers mainly composed of polyimide resin containing functional groups showing characteristic infrared absorption wavelengths; infrared rays are irradiated in the thickness direction of the film to measure infrared rays The distribution of absorption wavelengths, the process of calculating the film thickness of each layer from the infrared absorption of the characteristic wavelength range of each layer; the calculated film thickness data is fed back to the production process of the multilayer film, and adjustments are made in the production process The operation process of the film thickness of each layer.

对多层膜的制作工序进行说明,所述多层膜的至少1个以上的层为以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分的层。The process of producing a multilayer film in which at least one layer is a layer mainly composed of a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength will be described.

本发明中,如后所述,在膜的厚度方向上照射红外线来测定红外线的吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸,因此,作为多层膜的构成,任意层中以主要成分的量含有具有显示特征性红外线波长的官能团的聚酰亚胺树脂是重要的。可以根据想要测定多层膜的哪一层的膜厚,来决定将具有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂用于哪个层,或选择怎样的组合作为显示特征性红外线吸收波长的官能团。以下,举出具体例来说明具有如下构成的多层膜:具有高耐热性聚酰亚胺层和在该高耐热性聚酰亚胺层的至少一个表面形成的、含有热塑性聚酰亚胺的粘合层的构成。In the present invention, as will be described later, infrared rays are irradiated in the thickness direction of the film to measure the distribution of the absorption wavelength of infrared rays, and the film thickness dimension of each layer is calculated from the infrared absorption amount in the characteristic wavelength range of each layer. In the constitution of the layer film, it is important that any layer contains a polyimide resin having a functional group exhibiting a characteristic infrared wavelength in an amount of the main component. Depending on which layer of the multilayer film you want to measure the film thickness of, you can decide which layer to use polyimide resin having a functional group that exhibits a characteristic infrared absorption wavelength, or what combination to choose as the one that exhibits a characteristic infrared absorption wavelength. wavelength functional groups. Hereinafter, a specific example will be given to describe a multilayer film having a high heat-resistant polyimide layer and a thermoplastic polyimide layer formed on at least one surface of the high heat-resistant polyimide layer. The composition of the adhesive layer of amine.

附图说明Description of drawings

图1:本发明的聚酰亚胺多层粘合膜制造方法的实施方式。FIG. 1 : Embodiment of the manufacturing method of the polyimide multilayer adhesive film of the present invention.

图2:本发明的聚酰亚胺多层粘合膜制造方法的其他实施方式。FIG. 2 : Another embodiment of the method for producing a polyimide multilayer adhesive film of the present invention.

图3:本发明的聚酰亚胺多层挤压口模的实施方式。Figure 3: Embodiment of the polyimide multilayer extrusion die of the present invention.

符号说明Symbol Description

10:聚酰亚胺多层粘合膜10: Polyimide multilayer adhesive film

21:支持物21: Support

22:干燥炉22: drying oven

23:拉幅炉23: Stenter furnace

24:卷绕机24: Winding machine

25:送出机25: Sending out machine

31:红外线吸收方式的膜厚计31: Film thickness gauge with infrared absorption method

32:控制系统32: Control system

33:膜厚调整装置33: Film thickness adjustment device

40:多层挤压口模40: multi-layer extrusion die

41:注入路41: Injection Road

42:歧管42: Manifold

43:加热器43: Heater

44:流路44: flow path

45:合流部45: Confluence

46:致冷剂用流通路46: Flow path for refrigerant

47:电动机方式的凸缘宽调整机构47: Flange width adjustment mechanism by motor

51:涂布口模51: coating die

具体实施方式Detailed ways

本发明中使用的聚酰亚胺多层粘合膜的制造方法是至少二层以上的、含有聚酰亚胺树脂的多层粘合膜及其制造方法。The method for producing a polyimide multilayer adhesive film used in the present invention is a multilayer adhesive film containing at least two or more layers of polyimide resin and a method for producing the same.

本发明的聚酰亚胺多层粘合膜具有高耐热性聚酰亚胺层和在该高耐热性聚酰亚胺层的至少一个表面形成的、含有热塑性聚酰亚胺的粘合层,其特征为,高耐热性聚酰亚胺层或粘合层的任意一方以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分。The polyimide multilayer adhesive film of the present invention has a highly heat-resistant polyimide layer and an adhesive layer containing thermoplastic polyimide formed on at least one surface of the highly heat-resistant polyimide layer. The layer is characterized in that either one of the highly heat-resistant polyimide layer or the adhesive layer contains a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength as a main component.

通过使高耐热性聚酰亚胺层或粘合层的任意一方以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分,红外线吸收方式的多层膜膜厚测定装置的S/N比增大,可以高精密度地测定各层的膜厚。By making either the high heat-resistant polyimide layer or the adhesive layer a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength as the main component, the thickness measurement device of the infrared absorption method multilayer film The S/N ratio increases, and the film thickness of each layer can be measured with high precision.

进一步说明本发明的实施方式的特征。The features of the embodiments of the present invention will be further described.

本发明中使用的聚酰亚胺多层粘合膜的制造方法,其是制造至少二层以上的、含有聚酰亚胺树脂的多层膜的方法,其特征为,包括下述工序:多层膜的制作工序,该多层膜的至少1个以上的层为以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分的层;在该膜的厚度方向上照射红外线来测定红外线的吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸的工序;将算出的膜厚尺寸数据反馈到多层膜的制作工序,在制作工序中施加调整各层膜厚的操作的工序。The method for producing a polyimide multilayer adhesive film used in the present invention is a method for producing a multilayer film containing at least two layers of polyimide resin, and is characterized in that it includes the following steps: A process for producing a multilayer film, wherein at least one or more layers of the multilayer film is a layer mainly composed of a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength; irradiating infrared rays in the thickness direction of the film to The process of measuring the distribution of infrared absorption wavelengths and calculating the film thickness of each layer from the infrared absorption in the characteristic wavelength range of each layer; feeding back the calculated film thickness data to the production process of the multilayer film, in the production process A process of applying an operation to adjust the film thickness of each layer.

对多层膜的制作工序进行说明,所述多层膜的至少1个以上的层为以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分的层。The process of producing a multilayer film in which at least one layer is a layer mainly composed of a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength will be described.

本发明中,如后所述,在膜的厚度方向上照射红外线来测定红外线的吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸,因此,作为多层膜的构成,任意层中以主要成分的量含有具有显示特征性红外线波长的官能团的聚酰亚胺树脂是重要的。可以根据想要测定多层膜的哪一层的膜厚,来决定将具有显示特征性的红外线吸收波长的官能团的聚酰亚胺树脂用于哪个层,或选择怎样的组合作为显示特征性红外线吸收波长的官能团。以下,举出具体例来说明具有如下构成的多层膜:具有高耐热性聚酰亚胺层和在该高耐热性聚酰亚胺层的至少一个表面形成的、含有热塑性聚酰亚胺的粘合层的构成。In the present invention, as will be described later, infrared rays are irradiated in the thickness direction of the film to measure the distribution of the absorption wavelength of infrared rays, and the film thickness dimension of each layer is calculated from the infrared absorption amount in the characteristic wavelength range of each layer. In the constitution of the layer film, it is important that any layer contains a polyimide resin having a functional group exhibiting a characteristic infrared wavelength in an amount of the main component. Depending on which layer of the multilayer film you want to measure the film thickness of, you can decide which layer to use polyimide resin with a functional group that exhibits a characteristic infrared absorption wavelength, or what combination to choose as a characteristic infrared ray display. A functional group that absorbs wavelengths. Hereinafter, a specific example will be given to describe a multilayer film having a high heat-resistant polyimide layer and a thermoplastic polyimide layer formed on at least one surface of the high heat-resistant polyimide layer. The composition of the adhesive layer of amine.

<高耐热性聚酰亚胺层><High heat resistant polyimide layer>

本发明中所述的高耐热性聚酰亚胺层只要含有90wt%以上的非热塑性聚酰亚胺树脂,就不特别限定其的分子结构、膜厚。在高耐热性聚酰亚胺层中使用的非热塑性聚酰亚胺,是将聚酰胺酸作为前体使用而制造的。聚酰胺酸的制造方法可以使用公知的所有方法,通常,通过如下方式来制造:将芳香族四羧酸二酐和芳香族二胺以基本上等摩尔的量溶解于有机溶剂中,在所控制的温度条件下进行搅拌,直到上述酸二酐与二胺的聚合结束。这些聚酰胺酸溶液通常以5~35wt%、优选10~30wt%的浓度获得。为该范围的浓度时,得到适当的分子量和溶液粘度。The molecular structure and film thickness of the highly heat-resistant polyimide layer in the present invention are not particularly limited as long as it contains 90% by weight or more of non-thermoplastic polyimide resin. The non-thermoplastic polyimide used in the high heat-resistant polyimide layer is manufactured using polyamic acid as a precursor. The production method of polyamic acid can use all known methods, usually, by the following method: aromatic tetracarboxylic dianhydride and aromatic diamine are dissolved in the organic solvent with the amount of substantially equimolar, in controlled Stirring is carried out under temperature conditions until the polymerization of the above-mentioned acid dianhydride and diamine is completed. These polyamic acid solutions are usually obtained at a concentration of 5 to 35 wt%, preferably 10 to 30 wt%. When the concentration is within this range, an appropriate molecular weight and solution viscosity are obtained.

作为聚合方法,可以使用所有公知的方法和将它们组合而得的方法。聚酰胺酸的聚合中的聚合方法的特征在于其单体的添加顺序,通过控制其单体的添加顺序可以控制所得到的聚酰亚胺的各种物性。因此,对于本发明的聚酰胺酸的聚合可以使用任何的单体的添加方法。作为代表性的聚合方法,可以举出如下的方法。即,如下的方法等:As the polymerization method, all known methods and methods obtained by combining them can be used. The polymerization method in the polymerization of polyamic acid is characterized by the addition order of the monomers, and various physical properties of the obtained polyimide can be controlled by controlling the addition order of the monomers. Therefore, any method for adding a monomer can be used for the polymerization of the polyamic acid of the present invention. As a representative polymerization method, the following methods can be mentioned. That is, methods such as the following:

1)将芳香族二胺溶解于有机极性溶剂中,使其与基本上等摩尔的芳香族四羧酸二酐反应而聚合的方法。1) A method in which an aromatic diamine is dissolved in an organic polar solvent and reacted with substantially equimolar aromatic tetracarboxylic dianhydride to polymerize.

2)使芳香族四羧酸二酐与相对其为过小摩尔量的芳香族二胺化合物在有机极性溶剂中反应,得到在两末端具有酸酐基团的预聚物。接着,以在整个工序中芳香族四羧酸二酐和芳香族二胺化合物为基本上等摩尔的方式使用芳香族二胺化合物来进行聚合的方法。2) Reaction of aromatic tetracarboxylic dianhydride and an aromatic diamine compound having an excessively small molar amount relative to it in an organic polar solvent to obtain a prepolymer having acid anhydride groups at both terminals. Next, the method of superposing|polymerizing using an aromatic diamine compound so that an aromatic tetracarboxylic dianhydride and an aromatic diamine compound may become substantially equimolar in the whole process.

3)使芳香族四羧酸二酐与相对其为过剩摩尔量的芳香族二胺化合物在有机极性溶剂中反应,得到在两末端具有氨基的预聚物。接着,向其中追加芳香族二胺化合物后,以在整个工序中芳香族四羧酸二酐和芳香族二胺化合物为基本上等摩尔的方式使用芳香族四羧酸二酐来进行聚合的方法。3) Aromatic tetracarboxylic dianhydride and an aromatic diamine compound in an excess molar amount are reacted in an organic polar solvent to obtain a prepolymer having amino groups at both terminals. Next, after adding an aromatic diamine compound thereto, the aromatic tetracarboxylic dianhydride and the aromatic diamine compound are substantially equimolar in the entire process, and then polymerized using the aromatic tetracarboxylic dianhydride .

4)使芳香族四羧酸二酐溶解和/或分散于有机极性溶剂中之后,以基本上等摩尔的方式使用芳香族二胺化合物来进行聚合的方法。4) After dissolving and/or dispersing an aromatic tetracarboxylic dianhydride in an organic polar solvent, there is a method of polymerizing using an aromatic diamine compound in a substantially equimolar manner.

5)使基本上等摩尔的芳香族四羧酸二酐与芳香族二胺的混合物在有机极性溶剂中反应而聚合的方法。5) A method of polymerizing by reacting a mixture of substantially equimolar aromatic tetracarboxylic dianhydrides and aromatic diamines in an organic polar solvent.

这些方法可以单独使用,也可以部分地组合使用。These methods can be used alone or partially in combination.

在本发明中,可以使用采用上述任何的聚合方法得到的聚酰胺酸,聚合方法没有特别的限定。In the present invention, polyamic acid obtained by any of the above-mentioned polymerization methods can be used, and the polymerization method is not particularly limited.

在本发明中,优选采用用后述的具有刚直结构的二胺成分得到预聚物的聚合方法。通过使用本方法,有容易得到弹性率高、吸湿膨胀系数小的聚酰亚胺膜的倾向。本方法中,在调制预聚物时使用的具有刚直结构的二胺与酸二酐的摩尔比优选为100∶70~100∶99或70∶100~99∶100,进一步优选100∶75~100∶90或75∶100~90∶100。如果该比低于上述范围,则难以得到弹性率和吸湿膨胀系数的改善效果;如果高于上述范围,则线膨胀系数变得过小,有时产生拉伸变小等的弊端。In the present invention, it is preferable to employ a polymerization method for obtaining a prepolymer using a diamine component having a rigid structure described later. By using this method, it tends to be easy to obtain a polyimide film having a high modulus of elasticity and a small coefficient of hygroscopic expansion. In this method, the molar ratio of the diamine having a rigid structure to the acid dianhydride used in preparing the prepolymer is preferably 100:70 to 100:99 or 70:100 to 99:100, more preferably 100:75 to 100 :90 or 75:100~90:100. If the ratio is lower than the above range, it is difficult to obtain the effect of improving the modulus of elasticity and the hygroscopic expansion coefficient; if it is higher than the above range, the linear expansion coefficient becomes too small, and disadvantages such as reduced elongation may occur.

在此,对本发明所述的聚酰胺酸组合物中使用的材料进行说明。Here, the materials used for the polyamic acid composition of this invention are demonstrated.

本发明中可使用的适当的四羧酸二酐包括均苯四甲酸二酐、2,3,6,7-萘四甲酸二酐、3,3’,4,4’-联苯四甲酸二酐、1,2,5,6-萘四甲酸二酐、2,2’,3,3’-联苯四甲酸二酐、3,3’,4,4’-二苯甲酮四甲酸二酐、4,4’-氧苯二甲酸二酐、2,2-双(3,4-二羧基苯基)丙烷二酐、3,4,9,10-苝四甲酸二酐、双(3,4-二羧基苯基)丙烷二酐、1,1-双(2,3-二羧基苯基)乙烷二酐、1,1-双(3,4-二羧基苯基)乙烷二酐、双(2,3-二羧基苯基)甲烷二酐、双(3,4-二羧基苯基)乙烷二酐、氧二苯二甲酸二酐、双(3,4-二羧基苯基)砜二酐、对亚苯基双(偏苯三酸单酯酸酐)、亚乙基双(偏苯三酸单酯酸酐)、双酚A双(偏苯三酸单酯酸酐)及它们的类似物,可以优选使用这些化合物的单独一种或任意比例的混合物。Suitable tetracarboxylic dianhydrides that can be used in the present invention include pyromellitic dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 3,3',4,4'-biphenyltetracarboxylic anhydride, 1,2,5,6-naphthalene tetracarboxylic dianhydride, 2,2',3,3'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride anhydride, 4,4'-oxyphthalic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 3,4,9,10-perylenetetracarboxylic dianhydride, bis(3 , 4-dicarboxyphenyl) propane dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethane dianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethane dihydride anhydride, bis(2,3-dicarboxyphenyl)methane dianhydride, bis(3,4-dicarboxyphenyl)ethane dianhydride, oxygen diphthalic dianhydride, bis(3,4-dicarboxyphenyl) base) sulfone dianhydride, p-phenylene bis(trimellitic monoester anhydride), ethylene bis(trimellitic monoester anhydride), bisphenol A bis(trimellitic monoester anhydride) and their The analogues of these compounds can be preferably used alone or as a mixture in any proportion.

在这些酸二酐中,特别优选使用选自均苯四甲酸二酐、3,3’,4,4’-二苯甲酮四甲酸二酐、4,4’-氧苯二甲酸二酐、3,3’,4,4’-联苯四甲酸二酐中的至少一种。Among these acid dianhydrides, it is particularly preferable to use pyromellitic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 4,4'-oxyphthalic dianhydride, At least one of 3,3',4,4'-biphenyltetracarboxylic dianhydrides.

另外,在这些酸二酐中,使用选自3,3’,4,4’-二苯甲酮四甲酸二酐、4,4’-氧苯二甲酸二酐、3,3’,4,4’-联苯四甲酸二酐中的至少一种时,所优选的使用量为全部酸二酐的60mol%以下、优选55mol%以下、更优选50mol%以下。在使用选自3,3’,4,4’-二苯甲酮四甲酸二酐、4,4’-氧苯二甲酸二酐、3,3’,4,4’-联苯四甲酸二酐中的至少一种时,如果其使用量超出该范围,则聚酰亚胺膜的玻璃化温度变得过低,或者加热时的贮藏弹性率变得过低而制膜本身变得困难,因而不优选。In addition, among these acid dianhydrides, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 4,4'-oxyphthalic dianhydride, 3,3',4, When at least one of 4'-biphenyltetracarboxylic dianhydrides is used, the preferred usage amount is 60 mol% or less, preferably 55 mol% or less, more preferably 50 mol% or less of the total acid dianhydrides. When using 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 4,4'-oxyphthalic dianhydride, 3,3',4,4'-biphenyltetracarboxylic When at least one of the anhydrides is used, if the usage amount exceeds this range, the glass transition temperature of the polyimide film becomes too low, or the storage modulus of elasticity during heating becomes too low, making it difficult to form the film itself. Therefore, it is not preferable.

另外,在使用均苯四甲酸二酐时,优选的使用量为40~100mol%,更优选45~100mol%,特别优选50~100mol%。通过在该范围下使用均苯四甲酸二酐,容易在使用或制膜中将玻璃化温度和热时的贮藏弹性率保持在适当的范围。Moreover, when pyromellitic dianhydride is used, the usage-amount is preferable 40-100 mol%, More preferably, it is 45-100 mol%, Especially preferably, it is 50-100 mol%. By using pyromellitic dianhydride in this range, it becomes easy to keep the glass transition temperature and the storage modulus of elasticity during heat in an appropriate range during use or film production.

对于作为本发明所述的非热塑性聚酰亚胺的前体的聚酰胺酸组合物,作为能够使用的适当的二胺,可以举出4,4’-二氨基二苯基丙烷、4,4’-二氨基二苯基甲烷、联苯胺、3,3’-二氯联苯胺、3,3’-二甲基联苯胺、2,2’-二甲基联苯胺、3,3’-二甲氧基联苯胺、2,2’-二甲氧基联苯胺、4,4’-二氨基二苯基硫醚、3,3’-二氨基二苯基砜、4,4’-二氨基二苯基砜、4,4’-氧二苯胺、3,3’-氧二苯胺、3,4’-氧二苯胺、1,5-二氨基萘、4,4’-二氨基二苯基二乙基硅烷、4,4’-二氨基二苯基硅烷、4,4’-二氨基二苯基乙基氧化膦、4,4’-二氨基二苯基-N-甲基胺、4,4’-二氨基二苯基-N-苯基胺、1,4-二氨基苯(对亚苯基二胺)、1,3-二氨基苯、1,2-二氨基苯、双{4-(4-氨基苯氧基)苯基}砜、双{4-(4-氨基苯氧基)苯基}丙烷、双{4-(3-氨基苯氧基)苯基}砜、4,4’-双(4-氨基苯氧基)联苯基、4,4’-双(3-氨基苯氧基)联苯基、1,3-双(3-氨基苯氧基)苯、1,3-双(4-氨基苯氧基)苯、1,3-双(4-氨基苯氧基)苯、1,3-双(3-氨基苯氧基)苯、3,3’-二氨基二苯甲酮、4,4’-二氨基二苯甲酮及它们的类似物等。For the polyamic acid composition which is the precursor of the non-thermoplastic polyimide according to the present invention, suitable diamines that can be used include 4,4'-diaminodiphenylpropane, 4,4 '-Diaminodiphenylmethane, benzidine, 3,3'-dichlorobenzidine, 3,3'-dimethylbenzidine, 2,2'-dimethylbenzidine, 3,3'-di Methoxybenzidine, 2,2'-dimethoxybenzidine, 4,4'-diaminodiphenylsulfide, 3,3'-diaminodiphenylsulfone, 4,4'-diamino Diphenylsulfone, 4,4'-oxydiphenylamine, 3,3'-oxydiphenylamine, 3,4'-oxydiphenylamine, 1,5-diaminonaphthalene, 4,4'-diaminodiphenyl Diethylsilane, 4,4'-diaminodiphenylsilane, 4,4'-diaminodiphenylethylphosphine oxide, 4,4'-diaminodiphenyl-N-methylamine, 4 , 4'-diaminodiphenyl-N-phenylamine, 1,4-diaminobenzene (p-phenylenediamine), 1,3-diaminobenzene, 1,2-diaminobenzene, bis{ 4-(4-aminophenoxy)phenyl}sulfone, bis{4-(4-aminophenoxy)phenyl}propane, bis{4-(3-aminophenoxy)phenyl}sulfone, 4 , 4'-bis(4-aminophenoxy)biphenyl, 4,4'-bis(3-aminophenoxy)biphenyl, 1,3-bis(3-aminophenoxy)benzene, 1,3-bis(4-aminophenoxy)benzene, 1,3-bis(4-aminophenoxy)benzene, 1,3-bis(3-aminophenoxy)benzene, 3,3'- Diaminobenzophenone, 4,4'-diaminobenzophenone and their analogues.

作为二胺成分,可以并用具有刚直结构的二胺和具有柔性结构的胺,此时优选的使用比例以摩尔比计为80/20~20/80,进而为70/30~30/70,特别为60/40~30/70。如果刚性结构的二胺的使用比例超过上述范围,则得到的膜的拉伸有变小的倾向,另外,如果低于该范围,则玻璃化温度变得过低,或热时的贮藏弹性率变得过低而有时伴有制膜变得困难等的弊端。As the diamine component, a diamine having a rigid structure and an amine having a flexible structure may be used in combination. In this case, the preferred use ratio is 80/20 to 20/80, further 70/30 to 30/70 in terms of molar ratio, especially It is 60/40~30/70. If the usage ratio of the diamine of the rigid structure exceeds the above-mentioned range, the elongation of the obtained film tends to be small, and if it is lower than this range, the glass transition temperature becomes too low, or the storage modulus of elasticity when heated If it becomes too low, there may be disadvantages such as difficulty in film formation.

在本发明中,具有刚直结构的二胺是用通式(1)表示的物质。In the present invention, the diamine having a rigid structure is represented by the general formula (1).

NH2-R2-NH2 NH 2 -R 2 -NH 2

           通式(1)General formula (1)

通式(1)中的R2为选自通式组(1)所表示的2价芳香族基团中的基团;通式组(1)中的R3可以相同或不同,为选自H-、CH3-、-OH、-CF3、-SO4、-COOH、-CO-NH2、Cl-、Br-、F-及CH3O-中的任意一个基团。R in the general formula (1) is a group selected from the divalent aromatic groups represented by the general formula group (1); R in the general formula group ( 1 ) can be the same or different, and is selected from Any one of H-, CH 3 -, -OH, -CF 3 , -SO 4 , -COOH, -CO-NH 2 , Cl-, Br-, F- and CH 3 O-.

Figure A20058004308800151
Figure A20058004308800151

通式组(1)Formula group (1)

另外,具有柔性结构的二胺是指具有醚基、磺基、酮基、硫醚基等柔性结构的二胺。优选为下述通式(2)所表示的物质。In addition, the diamine having a flexible structure refers to a diamine having a flexible structure such as an ether group, a sulfo group, a ketone group, or a thioether group. A substance represented by the following general formula (2) is preferable.

Figure A20058004308800152
通式(2)
Figure A20058004308800152
Formula (2)

通式(2)中的R4为选自通式组(2)所表示的2价有机基团的基团,通式(2)中的R5可以相同或不同,为选自H-、CH3-、-OH、-CF3、-SO4、-COOH、-CO-NH2、Cl-、Br-、F-及CH3O-中的任意一个基团。R in general formula (2) is a group selected from divalent organic groups represented by general formula group (2), R in general formula ( 2 ) can be the same or different, and is selected from H-, Any one of CH 3 -, -OH, -CF 3 , -SO 4 , -COOH, -CO-NH 2 , Cl-, Br-, F- and CH 3 O-.

-O-,

Figure A20058004308800161
-O-,
Figure A20058004308800161

Figure A20058004308800163
通式组(2)
Figure A20058004308800163
Formula group (2)

本发明中使用的聚酰亚胺膜可以通过下述方式而得到:在上述范围中适当确定芳香族酸二酐和芳香族二胺的种类、配合比来使用,使得形成具有所希望特性的膜。The polyimide film used in the present invention can be obtained by appropriately determining the types and compounding ratios of aromatic acid dianhydride and aromatic diamine within the above range so that a film having desired characteristics can be formed. .

用于合成聚酰胺酸的优选的溶剂,只要是溶解聚酰胺酸的溶剂就可以使用任意的物质,但可以优选使用酰胺类溶剂,即N,N-二甲基甲酰胺、N,N-二甲基乙酰胺、N-甲基-2-吡咯烷酮等,特别优选使用N,N-二甲基甲酰胺、N,N-二甲基乙酰胺。As a preferred solvent for synthesizing polyamic acid, any substance can be used as long as it dissolves polyamic acid, but amide solvents, that is, N, N-dimethylformamide, N, N-di Methylacetamide, N-methyl-2-pyrrolidone and the like are particularly preferably used as N,N-dimethylformamide and N,N-dimethylacetamide.

另外,为了改善滑动性、热传导性、导电性、耐电晕性、环刚度(loopstiffness)等膜的各种特性,可以添加填料。作为填料可以使用任意的物质,但作为优选例可以举出二氧化硅、氧化钛、氧化铝、氮化硅、氮化硼、磷酸氢钙、磷酸钙、云母等。In addition, fillers may be added in order to improve various properties of the film such as sliding properties, thermal conductivity, electrical conductivity, corona resistance, and loop stiffness. Any filler can be used, but preferred examples include silica, titanium oxide, alumina, silicon nitride, boron nitride, calcium hydrogen phosphate, calcium phosphate, mica, and the like.

由于填料的粒径根据待改性的膜特性和添加的填料的种类而决定,因而没有特别的限定,一般而言,平均粒径为0.05~100μm,优选0.1~75μm,更优选0.1~50μm,特别优选0.1~25μm。如果粒径低于该范围,则改性效果难以体现;如果超出该范围,则可能大为损害表面性、或机械特性大为降低。另外,填料的添加份数也是根据待改性的膜特性和填料粒径等而确定的,所以没有特别的限定。一般而言,相对于聚酰亚胺100重量份,填料的添加量为0.01~100重量份,优选0.01~90重量份,进一步优选0.02~80重量份。如果填料的添加量低于该范围,则填料带来的改性效果难以体现;如果超出该范围,则膜的机械特性有可能大为受损。填料的添加可以采用如下的任意方法:Since the particle size of the filler is determined according to the properties of the film to be modified and the type of filler to be added, there is no particular limitation. Generally speaking, the average particle size is 0.05-100 μm, preferably 0.1-75 μm, more preferably 0.1-50 μm, Particularly preferably, it is 0.1 to 25 μm. If the particle size is below this range, the effect of modification will be difficult to exhibit; if it exceeds this range, the surface properties may be greatly impaired or the mechanical properties may be greatly reduced. In addition, the number of fillers to be added is also determined according to the properties of the membrane to be modified and the particle size of the filler, so there is no particular limitation. Generally, the addition amount of a filler is 0.01-100 weight part with respect to 100 weight part of polyimides, Preferably it is 0.01-90 weight part, More preferably, it is 0.02-80 weight part. If the amount of the filler added is lower than this range, the modification effect brought by the filler is difficult to manifest; if it exceeds this range, the mechanical properties of the film may be greatly damaged. Fillers can be added in any of the following ways:

1.在聚合前或中途添加到聚合反应液中的方法;1. The method of adding to the polymerization reaction solution before or during the polymerization;

2.聚合结束后,使用三辊机等混炼填料的方法;2. After the polymerization is completed, use a three-roll machine to mix the filler;

3.准备含有填料的分散液,将其混合于聚酰胺酸有机溶剂溶液中的方法等。将含有填料的分散液混合于聚酰胺酸溶液中的方法,特别是在即将制膜前进行混合的方法,由于生产线因填料导致的污染最少,因而优选。在准备含有填料的分散液的情况下,优选使用与聚酰胺酸的聚合溶剂相同的溶剂。另外,为了使填料很好地分散,或使分散状态稳定化,在不影响膜特性的范围内可以使用分散剂、增粘剂等。3. A method of preparing a dispersion liquid containing a filler, mixing it in a polyamic acid organic solvent solution, and the like. The method of mixing the filler-containing dispersion liquid with the polyamic acid solution, especially the method of mixing immediately before film formation, is preferable because the pollution of the production line due to the filler is the least. When preparing a filler-containing dispersion liquid, it is preferable to use the same solvent as the polymerization solvent of the polyamic acid. In addition, in order to disperse the filler well or to stabilize the dispersed state, a dispersant, a thickener, and the like may be used within a range that does not affect film properties.

如此得到的具有非热塑性聚酰亚胺前体的溶液也称为含有高耐热性聚酰亚胺前体的溶液。The thus obtained solution having a non-thermoplastic polyimide precursor is also referred to as a solution containing a highly heat-resistant polyimide precursor.

<热塑性聚酰亚胺层><Thermoplastic polyimide layer>

本发明所述的热塑性聚酰亚胺层只要通过层压法表现有用的粘合力,则在该层中含有的热塑性聚酰亚胺树脂的含量、分子结构、膜厚就没有特别限定。然而,为了表现有用的粘合力,优选基本上含有50wt%以上的热塑性聚酰亚胺树脂。The content, molecular structure, and film thickness of the thermoplastic polyimide resin contained in the layer are not particularly limited as long as the thermoplastic polyimide layer according to the present invention exhibits useful adhesive force by a lamination method. However, in order to exhibit useful adhesive force, it is preferable to substantially contain 50 wt% or more of the thermoplastic polyimide resin.

作为在热塑性聚酰亚胺层中含有的热塑性聚酰亚胺,可以优选使用热塑性聚酰亚胺、热塑性聚酰胺酰亚胺、热塑性聚醚酰亚胺、热塑性聚酯酰亚胺等。其中,从低吸湿性的观点出发,特别优选使用热塑性聚酯酰亚胺。As the thermoplastic polyimide contained in the thermoplastic polyimide layer, thermoplastic polyimide, thermoplastic polyamideimide, thermoplastic polyetherimide, thermoplastic polyesterimide, etc. can be preferably used. Among them, thermoplastic polyester imide is particularly preferably used from the viewpoint of low hygroscopicity.

本发明所述的热塑性聚酰亚胺层中含有的热塑性聚酰亚胺可以通过由其的前体聚酰胺酸的转化反应而得到。作为该聚酰胺酸的制造方法,与高耐热性聚酰亚胺层的前体一样,可以使用公知的任何方法。The thermoplastic polyimide contained in the thermoplastic polyimide layer of this invention can be obtained by the conversion reaction of the precursor polyamic acid from it. As a method for producing the polyamic acid, any known method can be used in the same manner as the precursor of the highly heat-resistant polyimide layer.

另外,可以用原有的装置进行层压,且从所得粘有金属的层叠板的耐热性不受损的角度考虑,本发明中的热塑性聚酰亚胺优选具有150~300℃的玻璃化温度(Tg)。Tg可以由用动态粘弹性测定装置(DMA)测得的贮藏弹性率的拐点值来求出。In addition, lamination can be performed with existing equipment, and the thermoplastic polyimide in the present invention preferably has a vitrification temperature of 150 to 300° C. temperature (Tg). Tg can be obtained from the inflection point value of the storage elastic modulus measured with a dynamic viscoelasticity measuring device (DMA).

本发明中使用的热塑性聚酰亚胺的前体的聚酰胺酸也没有特别的限定,可以使用公知的任意聚酰胺酸。关于聚酰胺酸溶液的制造,也可以完全相同地使用上述原料和上述制造条件等。The polyamic acid which is the precursor of the thermoplastic polyimide used in the present invention is also not particularly limited, and any known polyamic acid can be used. Also about manufacture of a polyamic-acid solution, the said raw material, the said manufacture conditions, etc. can be used in the same manner.

热塑性聚酰亚胺可以通过将使用的原料进行各种组合来调节各种特性,一般而言,刚直构造的二胺使用比率变大,则玻璃化温度变高和/或热时的贮藏弹性率变大,粘合性、加工性变低,因而不优选。刚直构造的二胺比率优选为40mol%以下,进一步优选为30mol%以下,特别优选为20mol%以下。Various properties of thermoplastic polyimide can be adjusted by various combinations of raw materials used. In general, the higher the ratio of diamines with a rigid structure, the higher the glass transition temperature and/or the storage elastic modulus when heated. If it becomes large, adhesiveness and processability will become low, and it is unpreferable. The diamine ratio of the rigid structure is preferably 40 mol% or less, more preferably 30 mol% or less, particularly preferably 20 mol% or less.

优选的热塑性聚酰亚胺树脂的具体例,可以举出使包括联苯四甲酸二酐类的酸二酐与具有氨基苯氧基的二胺进行聚合反应而得到的物质。Specific examples of preferable thermoplastic polyimide resins include those obtained by polymerizing acid dianhydrides including biphenyltetracarboxylic dianhydrides and diamines having aminophenoxy groups.

进而,为了控制本发明所述的粘合膜的特性,根据需要,可以添加无机或有机物的填料,进而还可以添加其他树脂。Further, in order to control the properties of the adhesive film according to the present invention, if necessary, inorganic or organic fillers may be added, and further other resins may be added.

<各层中的聚酰亚胺分子的组合><Combination of polyimide molecules in each layer>

在本发明中,高耐热性聚酰亚胺层或粘合层的任意一方必须以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分。在高耐热性聚酰亚胺层的两面有粘合层的情况下,可以只在一面的粘合层、或只在高耐热性聚酰亚胺层、或分别在各层以含有显示特征性红外线波长吸收波长的官能团的聚酰亚胺树脂为主要成分。在本发明中,显示特征性红外线吸收波长的官能团是指,只要在照射波数为400cm-1到4000cm-1的红外线时、具有可以用膜厚测定装置明确检测出的吸收量的官能团即可,没有特别的限定,但如果考虑最终得到的粘合膜的特性,则特别优选为甲基、磺基、氟代甲基中的任意一个。In the present invention, either the highly heat-resistant polyimide layer or the adhesive layer must contain a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength as a main component. In the case of an adhesive layer on both sides of the high heat-resistant polyimide layer, the adhesive layer can be only on one side, or only on the high heat-resistant polyimide layer, or on each layer separately to contain A polyimide resin with a functional group that absorbs wavelengths characteristic of infrared rays is the main component. In the present invention, the functional group exhibiting a characteristic infrared absorption wavelength is any functional group as long as it has an absorption amount that can be clearly detected by a film thickness measuring device when irradiated with infrared rays having a wavenumber of 400 cm-1 to 4000 cm-1. It is not particularly limited, but in consideration of the properties of the finally obtained adhesive film, any one of a methyl group, a sulfo group, and a fluoromethyl group is particularly preferable.

作为使显示特征性红外线吸收波长的官能团在聚酰亚胺树脂中含有的方法,可例示如下:As a method of including a functional group exhibiting a characteristic infrared absorption wavelength in a polyimide resin, the following can be exemplified:

1)作为形成聚酰亚胺树脂的单体,使用具有该官能团的单体的方法;1) A method of using a monomer having the functional group as a monomer forming a polyimide resin;

2)使其接枝于聚酰亚胺树脂或其的前体聚酰胺酸的方法;2) a method for grafting it to polyimide resin or its precursor polyamic acid;

但如果考虑制造成本,则特别优选使用1)的方法。在使用1)的方法时,优选使用的单体可以例示如下,作为酸二酐,例示有2,2-双(3,4-二羧基苯基)丙烷二酐、二(3,4-二羧基苯基)砜二酐、5,5’-2,2,2-三氟-1-(三氟甲基)亚乙基-双-1,3-异苯并呋喃二酮;作为二胺,例示有2,2-双[4-(4-氨基苯氧基)苯基]丙烷、2,2-双[4-(4-氨基苯氧基)苯基]砜、4,4’-二氨基-2,2’-二甲基联苯基、4,4’-二氨基-2,2’-六氟二甲基联苯基等。However, in consideration of production cost, the method of 1) is particularly preferably used. When the method of 1) is used, the monomers preferably used can be exemplified as follows. Examples of acid dianhydrides include 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, bis(3,4-dicarboxyphenyl) Carboxyphenyl)sulfone dianhydride, 5,5'-2,2,2-trifluoro-1-(trifluoromethyl)ethylene-bis-1,3-isobenzofurandione; as diamine , exemplified by 2,2-bis[4-(4-aminophenoxy)phenyl]propane, 2,2-bis[4-(4-aminophenoxy)phenyl]sulfone, 4,4'- Diamino-2,2'-dimethylbiphenyl, 4,4'-diamino-2,2'-hexafluorodimethylbiphenyl and the like.

对于含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂,从可以确保S/N比、可以高精密度地测定各层的膜厚的观点出发,优选以单体的二胺或酸二酐为基准,含有50摩尔%以上、优选70摩尔%以上、更优选80摩尔%以上的显示特征性红外线吸收波长的官能团。For a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength, it is preferable to use monomeric diamine or acid diamine from the viewpoint that the S/N ratio can be ensured and the film thickness of each layer can be measured with high precision. Based on the anhydride, it contains 50 mol% or more, preferably 70 mol% or more, more preferably 80 mol% or more of functional groups exhibiting characteristic infrared absorption wavelengths.

另外,将具有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂作为主要成分是指,含有90重量%以上的具有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂。In addition, having a polyimide resin having a functional group exhibiting a characteristic infrared absorption wavelength as a main component means containing 90% by weight or more of a polyimide resin having a functional group exhibiting a characteristic infrared absorption wavelength.

<聚酰亚胺多层粘合膜的制造><Manufacture of polyimide multilayer adhesive film>

以下说明得到本发明所述的聚酰亚胺多层粘合膜的方法的一个例子,但并不限定于此。Although an example of the method of obtaining the polyimide multilayer adhesive film of this invention is demonstrated below, it is not limited to this.

得到本发明所述的粘合膜的方法包括如下工序:使用含有聚酰亚胺树脂的溶液和/或含有其前体的二种以上的溶液,使数层的液膜形成于支持物上,然后进行干燥和酰亚胺化的工序。在支持物上形成数层的液膜的方法,可以使用如下方法:使用多层口模的方法、使用滑动模的方法、并用多个单层口模的方法、将单层口模和喷涂、凹版涂布进行组合的方法等以往公知的方法。然而,如果考虑生产性、维护性等,则特别优选使用多层口模的方法。以下,以多层口模为例,示于图1中来进行说明。The method for obtaining the adhesive film of the present invention comprises the following steps: using a solution containing polyimide resin and/or two or more solutions containing its precursor to form several layers of liquid film on the support, Thereafter, drying and imidization are performed. The method of forming several layers of liquid film on the support can use the following methods: the method of using a multi-layer die, the method of using a sliding die, and the method of using a plurality of single-layer dies, combining a single-layer die and spraying, A conventionally known method such as a method of combining gravure coating. However, in consideration of productivity, maintainability, etc., the method of using a multilayer die is particularly preferable. Hereinafter, a multi-layer die is taken as an example, which is shown in FIG. 1 for description.

首先,将含有高耐热性聚酰亚胺前体的溶液、和含有热塑性聚酰亚胺的溶液或含有热塑性聚酰亚胺前体的溶液,供给到二层以上的多层口模40中,从上述多层口模40的挤出口将两种溶液作为数层10的液膜挤出。接着,将从多层口模40挤出的数层10的液膜流延于平滑的支持物21上(图1中为环形带),使上述支持物21上的数层10的液膜的至少一部分溶剂在干燥炉22内挥发,从而可以得到具有自支持性的多层膜10。进而,将该多层膜10从上述支持物21上剥离,最后,将该多层膜10用拉幅炉23在高温(250-600℃)下充分进行加热处理,从而基本上除去溶剂,并进行酰亚胺化,由此可以得到目的聚酰亚胺多层膜10,用卷绕机24进行卷绕。First, a solution containing a highly heat-resistant polyimide precursor, a solution containing a thermoplastic polyimide, or a solution containing a thermoplastic polyimide precursor is supplied to a multilayer die 40 having two or more layers. , the two solutions are extruded as liquid films of several layers 10 from the extrusion port of the above-mentioned multilayer die 40 . Then, the liquid film of several layers 10 extruded from the multilayer die 40 is flow-cast on a smooth support 21 (an endless belt in Fig. 1), so that the liquid film of several layers 10 on the above-mentioned support 21 At least a part of the solvent is volatilized in the drying furnace 22, so that the self-supporting multilayer film 10 can be obtained. Furthermore, the multilayer film 10 is peeled from the above-mentioned support 21, and finally, the multilayer film 10 is sufficiently heat-treated at a high temperature (250-600° C.) in a tenter furnace 23 to substantially remove the solvent, and By performing imidization, the target polyimide multilayer film 10 can be obtained, and it winds up with the winder 24 .

为了改善在拉幅炉23中粘合层的熔融流动性,将拉幅炉23设为低温,或缩短通过拉幅炉内的时间,也可以有意地降低酰亚胺化率和/或使溶剂残留。In order to improve the melt fluidity of the adhesive layer in the tenter furnace 23, set the tenter furnace 23 to a low temperature, or shorten the time of passing through the tenter furnace, and also intentionally reduce the imidization rate and/or make the solvent residual.

即,将含有高耐热性聚酰亚胺前体的溶液、和含有热塑性聚酰亚胺的溶液或含有热塑性聚酰亚胺前体的溶液,供给到二层以上的多层口模中,从上述多层口模的挤出口将两种溶液作为数层的液膜挤出。接着,将从多层口模挤出的数层的液膜流延于平滑的支持物上,使上述支持物上的数层的液膜的至少一部分溶剂挥发,从而可以得到具有自支持性的多层膜。进而,将该多层膜从上述支持物上剥离,最后,将该多层膜在高温(250-600℃)下充分进行加热处理,从而基本上除去溶剂,并进行酰亚胺化,由此可以得到目的粘合膜。另外,为了改善粘合层的熔融流动性,也可以有意地降低酰亚胺化率和/或使溶剂残留。That is, a solution containing a highly heat-resistant polyimide precursor, a solution containing a thermoplastic polyimide, or a solution containing a thermoplastic polyimide precursor is supplied to a multilayer die having two or more layers, The two solutions were extruded as several-layered liquid films from the extrusion port of the above-mentioned multilayer die. Then, the several layers of liquid films extruded from the multi-layer die are cast on a smooth support, and at least a part of the solvent of the several layers of liquid films on the above support is volatilized, thereby obtaining a self-supporting multilayer film. Furthermore, the multilayer film is peeled from the above-mentioned support, and finally, the multilayer film is sufficiently heat-treated at high temperature (250-600° C.) to substantially remove the solvent and imidize, thereby The target adhesive film can be obtained. In addition, in order to improve the melt fluidity of the adhesive layer, the imidation rate may be intentionally reduced and/or the solvent may remain.

一般而言,聚酰亚胺是由聚酰亚胺的前体、即聚酰胺酸的脱水转化反应而得到的。作为进行该转化反应的方法,最广为熟知的是仅通过热进行的热处理法和使用化学固化剂的化学处理法这2种方法。然而,如果考虑制造效率,则更优选化学处理法。Generally, a polyimide is obtained by the dehydration conversion reaction of the polyamic acid which is the precursor of a polyimide. As a method for carrying out this conversion reaction, two methods, namely, a heat treatment method using only heat and a chemical treatment method using a chemical curing agent, are most widely known. However, chemical treatment is more preferable in consideration of manufacturing efficiency.

对于多层口模,已知有多歧管方式、喂料块(feed block)方式、两者的混合等,可以采用任何一种。For the multi-layer die, there are known multi-manifold methods, feed block methods, a mixture of both, and any of them can be used.

作为上述支持物,如果考虑最终得到的粘合膜的用途,则优选尽可能平滑的表面;进而如果考虑生产性,则优选为环形带或滚筒状。As the above-mentioned support, in consideration of the use of the adhesive film to be finally obtained, it is preferably as smooth as possible; further, in consideration of productivity, it is preferably in the form of an endless belt or a roll.

在此,化学固化剂是指含有脱水剂和催化剂的物质。在此所说的脱水剂是指对聚酰胺酸的脱水闭环剂,作为其主要成分,可以优选使用脂肪族酸酐、芳香族酸酐、N,N,-二烷基碳二亚胺、低级脂肪族卤化物、卤代低级脂肪族酸酐、芳基磺酸二卤化物、亚硫酰卤化物或这些物质2种以上的混合物。其中,特别是脂肪族酸酐和芳香族酸酐良好地起作用。另外,催化剂是具有促进固化剂对聚酰胺酸的脱水闭环作用的效果的成分,例如,可以使用脂肪族叔胺、芳香族叔胺、杂环式叔胺。其中,优选咪唑、苯并咪唑、异喹啉、喹啉、或β-甲基吡啶等含氮杂环化合物。进而,可以适当选择在含有脱水剂和催化剂的溶液中导入有机极性溶剂。Here, the chemical curing agent refers to a substance containing a dehydrating agent and a catalyst. The dehydrating agent mentioned here refers to the dehydrating ring-closing agent of polyamic acid, as its main component, can preferably use aliphatic acid anhydride, aromatic acid anhydride, N, N,-dialkylcarbodiimide, lower aliphatic Halides, halogenated lower aliphatic anhydrides, arylsulfonic acid dihalides, thionyl halides, or mixtures of two or more of these substances. Among them, especially aliphatic acid anhydrides and aromatic acid anhydrides work well. In addition, the catalyst is a component that has the effect of accelerating the dehydration and ring closure of the polyamic acid by the curing agent, and for example, aliphatic tertiary amines, aromatic tertiary amines, and heterocyclic tertiary amines can be used. Among them, nitrogen-containing heterocyclic compounds such as imidazole, benzimidazole, isoquinoline, quinoline, or β-picoline are preferable. Furthermore, the introduction of an organic polar solvent into a solution containing a dehydrating agent and a catalyst can be appropriately selected.

关于高耐热性聚酰亚胺的前体溶液、含有热塑性聚酰亚胺的溶液或含有热塑性聚酰亚胺前体的溶液中的溶剂挥发的方法,没有特别限定,但利用加热和/或吹风的方法是最简易的方法。上述加热时的温度如果过高,则溶剂急剧挥发,由于该挥发的痕迹是在最终得到的粘合膜中形成微小缺陷的主要原因,因此优选所使用的溶剂的沸点小于+50℃。There are no particular limitations on the method of volatilizing the solvent in the solution of the precursor solution of the highly heat-resistant polyimide, the solution containing the thermoplastic polyimide, or the solution containing the precursor of the thermoplastic polyimide. The method of blowing is the easiest method. If the heating temperature is too high, the solvent will evaporate rapidly, and since traces of this evaporation are the main cause of microscopic defects in the final adhesive film, it is preferable that the solvent used has a boiling point of less than +50°C.

关于酰亚胺化时间,只要在基本上完成酰亚胺化和干燥方面有充分的时间即可,没有绝对的限定,但一般而言适当设定在1~600秒左右。The imidization time is not absolutely limited as long as there is sufficient time for imidization and drying to be basically completed, but generally, it is appropriately set to about 1 to 600 seconds.

作为酰亚胺化时所施加的张力,优选1kg/m~15kg/m,特别优选5kg/m~10kg/m。张力小于上述范围时,膜输送时有可能出现松弛或蛇行,在卷绕时混入褶皱,出现不能均匀地卷绕等问题。相反,大于上述范围时,由于在施以强张力状态下被高温加热,所以得到的挠性粘金属的层叠板的尺寸特性会恶化。The tension applied at the time of imidization is preferably 1 kg/m to 15 kg/m, particularly preferably 5 kg/m to 10 kg/m. If the tension is less than the above range, the film may slack or meander during conveyance, and wrinkles may be mixed during winding, causing problems such as uneven winding. On the contrary, if the value exceeds the above range, the dimensional characteristics of the obtained flexible metal-bonded laminate will be deteriorated due to heating at a high temperature under a state of strong tension.

接着,说明下述工序:在得到的多层膜的厚度方向上照射红外线,测定红外线吸收波长的分布,由各层的特征性波长范围的红外线吸收量算出各层的膜厚尺寸的工序。Next, the process of irradiating infrared rays in the thickness direction of the obtained multilayer film, measuring the distribution of infrared absorption wavelengths, and calculating the film thickness dimension of each layer from the infrared absorption amount in the characteristic wavelength range of each layer will be described.

在该工序中可以使用的膜厚测定装置的原理为,用红外线吸收方式的膜厚测定装置,将具有400cm-1到4000cm-1的波长的红外线垂直照射于被测定膜的厚度方向,在该物质固有的波长处测定该透过来的红外线对应于膜厚尺寸的吸收量的差异,由该吸收量的差异算出膜厚。The principle of the film thickness measuring device that can be used in this process is to irradiate infrared rays having a wavelength of 400 cm -1 to 4000 cm -1 perpendicularly to the thickness direction of the film to be measured by using an infrared absorption method film thickness measuring device. The difference in the absorption amount of the transmitted infrared rays with respect to the film thickness dimension is measured at a wavelength unique to the substance, and the film thickness is calculated from the difference in the absorption amount.

因此,在本发明中,由于多层膜的至少一层以上以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂作为主要成分,所以由聚酰亚胺树脂所具有的特有波长的红外线吸收量可以算出多层膜整体的膜厚,由含有显示特征性红外吸收波长的官能团的聚酰亚胺树脂层的红外吸收量可以算出该聚酰亚胺树脂层的膜厚。Therefore, in the present invention, since at least one layer or more of the multilayer film contains a polyimide resin having a functional group exhibiting a characteristic infrared absorption wavelength as a main component, the infrared rays having a characteristic wavelength of the polyimide resin The absorption amount can calculate the film thickness of the entire multilayer film, and the film thickness of the polyimide resin layer can be calculated from the infrared absorption amount of the polyimide resin layer containing a functional group exhibiting a characteristic infrared absorption wavelength.

例如,为如下的聚酰亚胺三层膜的情况下,如果用上述的红外线吸收方式的膜厚计测量膜厚,则可以测定聚酰亚胺三层膜整体的膜厚尺寸和该粘合层的各个膜厚尺寸;该聚酰亚胺三层膜的多层膜是由高耐热性聚酰亚胺层和在该高耐热性聚酰亚胺层的两侧表面形成的、含有热塑性聚酰亚胺的粘合层构成的,其中,一方的该粘合层以含有显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分,且另一方的该粘合层以含有别的显示特征性红外线吸收波长的官能团的聚酰亚胺树脂为主要成分。接着,从聚酰亚胺三层膜整体的膜厚尺寸中减去该粘合层的各个膜厚尺寸,很显然可以算出该高耐热性聚酰亚胺层的膜厚尺寸。另外,要求的该粘合层的膜厚尺寸可以是构成的两侧的该粘合层的膜厚尺寸的总和,或仅要求该高耐热性聚酰亚胺层的膜厚尺寸时,只要在该粘合层或该高耐热性聚酰亚胺层的任何一层中含有显示特征性红外线吸收波长的官能团即可。For example, in the case of the following polyimide three-layer film, if the film thickness is measured with the above-mentioned infrared absorption method film thickness gauge, the film thickness dimension and the adhesion of the polyimide three-layer film as a whole can be measured. Each film thickness size of the layer; the multilayer film of the polyimide three-layer film is formed by a high heat-resistant polyimide layer and on both sides of the high heat-resistant polyimide layer, containing An adhesive layer composed of thermoplastic polyimide, wherein one of the adhesive layers contains a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength as a main component, and the other adhesive layer contains a polyimide resin containing Another main component is a polyimide resin having a functional group exhibiting a characteristic infrared absorption wavelength. Next, by subtracting the respective film thicknesses of the adhesive layer from the film thicknesses of the entire polyimide three-layer film, it is clear that the film thicknesses of the highly heat-resistant polyimide layer can be calculated. In addition, the film thickness dimension of the required adhesive layer can be the sum of the film thickness dimensions of the adhesive layer on both sides of the composition, or when only the film thickness dimension of the high heat-resistant polyimide layer is required, as long as It is only necessary to contain a functional group exhibiting a characteristic infrared absorption wavelength in either the adhesive layer or the highly heat-resistant polyimide layer.

就红外线吸收方式的膜厚计31的设置地点来说,只要是能够测定该多层膜的地方都可以设置,预先消除加热收缩量的话,可以设置在多层口模40的挤出口附近或干燥炉22的出口附近,但从高精密度地测定最终的膜厚尺寸的角度讲,在拉幅炉23中结束酰亚胺化、测定被冷却到室温左右的多层膜10为佳,优选设置在拉幅炉23与卷绕机24之间。As far as the installation location of the film thickness meter 31 of the infrared absorption method is concerned, it can be installed as long as the multilayer film can be measured. If the amount of heat shrinkage is eliminated in advance, it can be installed near the extrusion port of the multilayer die 40 or in the drying area. Near the exit of the furnace 22, but from the viewpoint of measuring the final film thickness with high precision, it is better to finish the imidization in the tenter furnace 23 and measure the multilayer film 10 cooled to about room temperature. Between the tenter furnace 23 and the winder 24 .

接着,说明如下工序:将算出的膜厚尺寸数据反馈到多层膜的制作工序,在制作工序中施加调整各层膜厚的操作的工序。Next, a process of feeding back the calculated film thickness dimensional data to the production process of the multilayer film and applying an operation to adjust the film thickness of each layer in the production process will be described.

用膜厚计31测量的、用膜厚控制系统32算出的各层的膜厚尺寸数据被反馈给组装于多层口模40中的膜厚尺寸控制装置33,从而在偏离所期望的膜厚尺寸时,控制在所期望的膜厚尺寸。The film thickness size data of each layer measured by the film thickness gauge 31 and calculated by the film thickness control system 32 are fed back to the film thickness size control device 33 assembled in the multilayer die 40, so that when the film thickness deviates from the desired When dimensioning, control the desired film thickness.

就本发明中可以采用的膜厚尺寸控制装置33来说,可以采用将用上述膜厚计31测得的各层的膜厚尺寸数据反馈、能连续地控制膜厚的各种膜厚尺寸控制装置33。With regard to the film thickness size control device 33 that can be adopted in the present invention, various film thickness size control devices that can continuously control the film thickness by feeding back the film thickness size data of each layer measured by the above-mentioned film thickness gauge 31 can be used. device33.

以多层口模为例来说明本发明的具体的膜厚尺寸调整装置。所使用的多层口模只要是由含有至少两种以上的聚酰亚胺树脂或其前体的溶液来制造聚酰亚胺多层膜,就不特别限定本发明中使用的多层口模的层数及形式。The specific film thickness adjustment device of the present invention will be described by taking the multi-layer die as an example. The multilayer die used is not particularly limited to the multilayer die used in the present invention as long as the polyimide multilayer film is produced from a solution containing at least two or more polyimide resins or their precursors. layers and forms.

以下,将本发明中使用的多歧管式的多层口模的具体例示于图3中来进行说明。Hereinafter, a specific example of the multi-manifold type multilayer die used in the present invention will be described with reference to FIG. 3 .

本发明中,加热元件被用于调整多层膜各层的膜厚。即,由于在共挤压制膜中的歧管以后的口模内部的流路是非常薄的板状的空间,因此对于通过那里的流体产生很大的流体阻力。因此,如果流体的粘度变化,则流体阻力变化,结果导致流体的挤出量变化,结果膜厚尺寸也变化。In the present invention, heating elements are used to adjust the film thickness of each layer of the multilayer film. That is, since the flow path inside the die after the manifold in co-extrusion film production is a very thin plate-shaped space, a large flow resistance is generated for the fluid passing there. Therefore, if the viscosity of the fluid changes, the fluid resistance changes, and as a result, the extrusion amount of the fluid changes, and as a result, the film thickness dimension also changes.

首先,将含有聚酰亚胺树脂或其前体的溶液A、B、C(以下简称为溶液A、B、C)分别通过注入路41a、41b、41c注入到口模内部。各聚酰亚胺树脂溶液由注入路41注入后,在歧管42a、42b、42c处在宽幅方向展开,在该状态下流入流路44。由于一般而言是薄度为数十~数百μm左右的流路44,对于含有聚酰亚胺树脂或其前体的溶液产生很大的流体阻力,因此如果使溶液的粘度降低,则溶液的流量增大。例如,如果用加热元件43a加热流入到流路44a中的溶液A、流路44a的附近,则聚酰亚胺树脂溶液A的粘度降低,结果导致流路44a处的挤出量增大。如果挤出量增大,则合流点45以后的溶液A相对于聚酰亚胺树脂溶液B、C的比例增加,液膜中的聚酰亚胺树脂溶液A的膜厚增大。同样地,流入到流路44c中的溶液C的膜厚可以用加热元件43c来控制。First, solutions A, B, and C (hereinafter simply referred to as solutions A, B, and C) containing polyimide resin or its precursor are injected into the die through injection channels 41a, 41b, and 41c, respectively. After each polyimide resin solution is injected from the injection channel 41, it spreads in the width direction at the manifolds 42a, 42b, and 42c, and flows into the flow channel 44 in this state. Generally speaking, the flow path 44 with a thickness of about several tens to several hundreds of μm generates a large fluid resistance to the solution containing polyimide resin or its precursor, so if the viscosity of the solution is lowered, the solution will flow increases. For example, when the heating element 43a heats the solution A flowing into the flow path 44a and the vicinity of the flow path 44a, the viscosity of the polyimide resin solution A decreases, resulting in an increase in the extrusion rate at the flow path 44a. When the extrusion amount increases, the ratio of the solution A to the polyimide resin solutions B and C after the confluence point 45 increases, and the film thickness of the polyimide resin solution A in the liquid film increases. Likewise, the film thickness of the solution C flowing into the flow path 44c can be controlled by the heating element 43c.

另外,调整多层膜整体膜厚的是凸缘调整机构47,通过用加热元件43a及43c来调整聚酰亚胺树脂溶液A及C的膜厚,用凸缘调整机构47来调整整体的膜厚,由于溶液A和C的膜厚比例不变化,所以聚酰亚胺树脂溶液B的膜厚调整也成为可能。In addition, it is the flange adjustment mechanism 47 that adjusts the overall film thickness of the multilayer film. By adjusting the film thicknesses of the polyimide resin solutions A and C with the heating elements 43a and 43c, the flange adjustment mechanism 47 is used to adjust the overall film thickness. Thick, since the film thickness ratio of solutions A and C does not change, it is also possible to adjust the film thickness of polyimide resin solution B.

凸缘调整机构47中可以采用的方式有如下的方式:物理性地扩展或缩小口模凸缘宽的机构,将加热元件的一端固定于口模,加热元件膨胀而使口模的凸缘可移动的热管式或用发动机等使口模凸缘可移动的方式。The modes that can be adopted in the flange adjustment mechanism 47 have the following modes: physically expand or reduce the mechanism of the flange width of the die, fix one end of the heating element to the die, and expand the heating element so that the flange of the die can be adjusted. A moving heat pipe type or a method in which the die flange can be moved by a motor or the like.

本发明中使用的加热元件只要是工业上或一般可利用的方法,就可以没有限制地使用。特别是在金属、碳、无机化合物的电阻元件中流过电流进行加热的类型,容易操作,响应性也良好,因而优选。另外,电磁感应式的加热元件,由于响应性进一步提高而更优选。The heating element used in the present invention can be used without limitation as long as it is an industrial or generally available method. In particular, a type in which electric current is passed through a resistance element of metal, carbon, or an inorganic compound for heating is preferable because it is easy to handle and has good responsiveness. In addition, an electromagnetic induction heating element is more preferable because the responsiveness is further improved.

本发明中的加热元件的配置位置,由于多层膜各层的厚度是分别控制的,因此加热元件设置在各种含有聚酰亚胺树脂或其前体的溶液合流以前的位置当然是重要的。另外,通过对于在宽幅方向展开的流路在宽幅方向上连续地配置加热元件,也可以控制各个膜层的宽幅方向的特定位置的膜厚尺寸。The disposition position of heating element in the present invention, because the thickness of each layer of multilayer film is controlled separately, therefore heating element is arranged in the position before the solution confluence of various containing polyimide resin or its precursor certainly is important . Also, by arranging heating elements continuously in the width direction with respect to the flow path extending in the width direction, it is also possible to control the film thickness dimension at a specific position in the width direction of each film layer.

但是,此时,为了可以获取在宽幅方向上想要控制膜厚计的间距的数据,必须有或者将膜厚计在宽幅方向上设置数台或者使1台膜厚计在宽幅方向上移动,来测量宽幅方向的膜厚尺寸分布的机构,只要将膜的流动方向和宽幅方向的膜厚分布均匀地稳定化,就可以制作高品质的多层膜。However, at this time, in order to obtain data for controlling the pitch of the film thickness gauges in the width direction, it is necessary to either install several film thickness gauges in the width direction or place one film thickness gauge in the width direction. The mechanism that measures the film thickness distribution in the width direction by moving up and down can produce high-quality multilayer films by stabilizing the flow direction of the film and the film thickness distribution in the width direction uniformly.

在连续地配置加热元件时,加热元件的间隔没有特别限制,只要选定控制所必需的充分的间隔即可。一般而言,如果加热元件的间隔过近,则有引起相互干涉的可能,因此,优选以5~50mm的间隔配置加热元件,由于膜厚的均匀性与相互干涉的平衡最佳,而更优选7~20mm的间隔。When the heating elements are arranged consecutively, the intervals of the heating elements are not particularly limited as long as sufficient intervals necessary for control are selected. Generally speaking, if the space between the heating elements is too close, it may cause mutual interference. Therefore, it is preferable to arrange the heating elements at intervals of 5 to 50 mm. Since the balance of film thickness uniformity and mutual interference is the best, it is more preferable 7 ~ 20mm interval.

本发明中,在多层口模的内部设置孔穴使致冷剂流通,也可以有效冷却多层口模。一般而言,聚酰亚胺树脂的前体具有在高温下发生分子内脱水反应而固化的特性,本发明的设置有利用加热元件的膜厚调整机构的多层口模有口模温度慢慢上升的倾向,其结果是,口模内的流路的树脂固化、粘着而使制膜性恶化,或成为固化物混入膜中的原因。In the present invention, holes are provided inside the multilayer die to allow the refrigerant to circulate, and the multilayer die can also be effectively cooled. Generally speaking, the precursor of polyimide resin has the characteristic that the intramolecular dehydration reaction takes place and solidifies at high temperature, and the multi-layer die of the present invention is provided with the film thickness adjustment mechanism that utilizes heating element to have die temperature slowly. As a result, the resin in the flow path in the die is cured and adhered to deteriorate film formability, or cause the cured product to mix into the film.

作为冷却设备,有使致冷剂流通于上述的多层口模内的方法及在多层口模的外侧卷绕管而使致冷剂流通于内部的方法。另外,也可以在多层口模的外侧喷吹空气流,为了提高冷却效果,也可以安装散热片。As a cooling device, there are a method of circulating a refrigerant in the above-mentioned multi-layer die, and a method of winding a tube outside the multi-layer die to allow the refrigerant to flow inside. In addition, it is also possible to blow air flow on the outside of the multi-layer die, and in order to improve the cooling effect, it is also possible to install cooling fins.

经冷却的多层口模的温度优选为室温以下,更优选为10℃以下,最优选为0℃以下。不过,如果温度太过低,则聚酰亚胺类化合物清漆的粘度变得过大而难以操作,因而优选为-15℃以上,更优选为-10℃以上。The temperature of the cooled multilayer die is preferably below room temperature, more preferably below 10°C, most preferably below 0°C. However, if the temperature is too low, the viscosity of the polyimide compound varnish becomes too high and handling becomes difficult, so it is preferably -15°C or higher, more preferably -10°C or higher.

接着,说明如下方法:在含有至少一层以上的含聚酰亚胺树脂的层的膜表面上,涂布含有聚酰胺酸或聚酰亚胺树脂的溶液,进行加热、干燥,如此来制膜的方法。将含有至少1层以上的含高耐热性聚酰亚胺树脂的层的膜作为核心层,在其两侧以涂布的方式涂布含有热塑性聚酰亚胺的溶液或含有热塑性聚酰亚胺前体的溶液作为覆盖层,得到多层的聚酰亚胺多层膜。将该制造方法示于图2中来进行说明。Next, a method for forming a film by applying a solution containing polyamic acid or polyimide resin on the surface of a film containing at least one layer containing polyimide resin, heating, and drying is described. Methods. A film containing at least one layer of high heat-resistant polyimide resin is used as a core layer, and a solution containing thermoplastic polyimide or a solution containing thermoplastic polyimide is coated on both sides by coating. The solution of the amine precursor is used as a cover layer to obtain a multilayer polyimide multilayer film. This manufacturing method is shown in FIG. 2 and demonstrated.

首先,用送出装置25将单层或多层制膜而得的高耐热性聚酰亚胺膜作为核心层送出到涂布装置内,从稳定地涂布的涂布口模51挤出含有热塑性聚酰亚胺的溶液或含有热塑性聚酰亚胺前体的溶液,在该核心层的两侧涂布覆盖层。接着,使覆盖层的液膜的溶剂在干燥炉22内挥发,同时进行酰亚胺化,从而得到目的聚酰亚胺多层膜10,用卷绕机24进行卷绕。First, the high heat-resistant polyimide film obtained by forming a single-layer or multi-layer film is sent out as a core layer into the coating device by the sending device 25, and the film containing A solution of thermoplastic polyimide or a solution containing a precursor of thermoplastic polyimide is coated on both sides of the core layer with cover layers. Next, imidization is performed while volatilizing the solvent of the liquid film of the cover layer in the drying furnace 22 to obtain the target polyimide multilayer film 10 , which is wound up by the winder 24 .

涂布方式除了采用上述的涂布口模之外,还已知有辊涂方式、凹版辊方式、喷涂方式等,可以采用任何一个。As the coating method, other than the above-mentioned coating die, a roll coating method, a gravure roll method, a spray coating method, etc. are known, and any of them may be used.

红外线吸收方式的膜厚计31的设置地点与上述多层口模方式相同,优选设置在干燥炉22与卷绕机24之间。The installation location of the film thickness gauge 31 of the infrared absorption method is the same as that of the above-mentioned multi-layer die method, and is preferably installed between the drying oven 22 and the winding machine 24 .

涂布方式的膜厚控制方式,可以采用通过如下方式来控制涂布膜厚尺寸的方法:用供给树脂的泵来控制涂布口模的挤出量,或在利用辊涂机的涂布法中控制基材膜与辊涂机之间的间隙。The film thickness control method of the coating method can be controlled by the method of controlling the coating film thickness in the following way: using the pump that supplies the resin to control the extrusion amount of the coating die, or the coating method using a roll coater. Control the gap between the substrate film and the roller coater.

实施例Example

以下,举出本发明方法的实施例来进行具体说明,但本发明并不限于本实施例。Hereinafter, an example of the method of the present invention will be given and described in detail, but the present invention is not limited to this example.

(合成例1:合成作为高耐热性聚酰亚胺类化合物的前体的聚酰胺酸)(Synthesis Example 1: Synthesis of polyamic acid as a precursor of highly heat-resistant polyimide compounds)

加入76.2kg冷却到10℃的DMF、3.7kg对亚苯基二胺(PDA),在氮气环境下,边搅拌边缓慢添加9.8kg的3,3’,4,4’-联苯四甲酸二酐(BPDA),搅拌30分钟。另外调制将300g的BPDA溶解于2kg的DMF而得的溶液,在注意粘度的同时将其缓慢地添加至上述反应溶液中,进行搅拌。在粘度达到3500泊时,停止添加和搅拌,得到高耐热性聚酰亚胺类化合物的前体的聚酰胺酸的溶液。Add 76.2kg of DMF cooled to 10°C, 3.7kg of p-phenylenediamine (PDA), and slowly add 9.8kg of 3,3',4,4'-biphenyltetracarboxylic acid di Anhydride (BPDA), stirred for 30 minutes. Separately, a solution obtained by dissolving 300 g of BPDA in 2 kg of DMF was prepared, and this was slowly added to the above-mentioned reaction solution while paying attention to the viscosity, followed by stirring. When the viscosity reached 3500 poise, the addition and stirring were stopped to obtain a solution of polyamic acid which is a precursor of a highly heat-resistant polyimide compound.

在该合成例中,用红外线吸收方式来测定各层的厚度时,没有显示特征性红外吸收波长的官能团。In this synthesis example, when the thickness of each layer was measured by an infrared absorption method, there was no functional group exhibiting a characteristic infrared absorption wavelength.

(合成例2:合成作为高耐热性聚酰亚胺类化合物的前体的聚酰胺酸)(Synthesis Example 2: Synthesis of polyamic acid as a precursor of highly heat-resistant polyimide compounds)

将6.9kg的4,4’-氧二苯胺(以下也称为ODA)、6.2kg的对亚苯基二胺(以下也称为p-PDA)、9.4kg的2,2-双[4-(4-氨基苯氧基)苯基]丙烷(以下也称为BAPP)溶解于239kg的冷却到10℃的N,N-二甲基甲酰胺(以下也称为DMF)之后,添加10.4kg的均苯四甲酸二酐(以下也称为PMDA),搅拌1小时使其溶解。向其中添加20.3kg的二苯甲酮四甲酸二酐(以下也称为BTDA),搅拌1小时使其溶解。6.9kg of 4,4'-oxydianiline (hereinafter also referred to as ODA), 6.2kg of p-phenylenediamine (hereinafter also referred to as p-PDA), 9.4kg of 2,2-bis[4- (4-Aminophenoxy) phenyl] propane (hereinafter also referred to as BAPP) was dissolved in 239 kg of N, N-dimethylformamide (hereinafter also referred to as DMF) cooled to 10 ° C, and 10.4 kg of Pyromellitic dianhydride (hereinafter also referred to as PMDA) was stirred for 1 hour and dissolved. 20.3 kg of benzophenone tetracarboxylic dianhydride (hereinafter also referred to as BTDA) was added there, and stirred for 1 hour to dissolve it.

向上述反应液中缓慢添加另外调制好的PMDA的DMF溶液(PMDA∶DMF=0.9kg∶7.0kg),在粘度达到3000泊左右时,停止添加。进行1小时搅拌,得到固体成分浓度为18重量%、在23℃下的旋转粘度为3500泊的高耐热性聚酰亚胺类化合物的前体的聚酰胺酸的溶液。The DMF solution of PMDA prepared separately (PMDA:DMF=0.9kg:7.0kg) was slowly added to the above reaction solution, and the addition was stopped when the viscosity reached about 3000 poise. Stirring was performed for 1 hour to obtain a solution of polyamic acid which is a precursor of a highly heat-resistant polyimide compound having a solid content concentration of 18% by weight and a rotational viscosity at 23° C. of 3,500 poise.

在该合成例中,用红外线吸收方式测定各层的厚度时,显示特征性红外吸收波长的官能团是来自BAPP的甲基。In this synthesis example, when the thickness of each layer was measured by an infrared absorption method, the functional group exhibiting a characteristic infrared absorption wavelength was a methyl group derived from BAPP.

(合成例3:合成作为热塑性聚酰亚胺类化合物的前体的聚酰胺酸)(Synthesis Example 3: Synthesis of Polyamic Acid as a Precursor of Thermoplastic Polyimide Compounds)

加入78kg冷却到10℃的DMF、11.56kg的2,2-双[4-(4-氨基苯氧基)苯基]丙烷(BAPS),在氮气环境下,边搅拌边缓慢添加7.87kg的3,3’,4,4’-联苯四甲酸二酐(BPDA)。接着,添加380g亚乙基双(偏苯三酸单酯酸酐)(TMEG),搅拌30分钟。另外调制将300g的TMEG溶解于3kg的DMF中而得的溶液,在注意粘度的同时将其缓慢地添加到上述反应溶液中,进行搅拌。在粘度达到3000泊时,停止添加和搅拌,得到热塑性聚酰亚胺类化合物的前体的聚酰胺酸的溶液。Add 78kg of DMF cooled to 10°C, 11.56kg of 2,2-bis[4-(4-aminophenoxy)phenyl]propane (BAPS), and slowly add 7.87kg of 3 , 3',4,4'-Biphenyltetracarboxylic dianhydride (BPDA). Next, 380 g of ethylene bis(trimellitic acid monoester anhydride) (TMEG) was added, and it stirred for 30 minutes. Separately, a solution obtained by dissolving 300 g of TMEG in 3 kg of DMF was prepared, and this was slowly added to the above reaction solution while paying attention to the viscosity, followed by stirring. When the viscosity reached 3000 poise, the addition and stirring were stopped to obtain a solution of polyamic acid which is a precursor of a thermoplastic polyimide compound.

在该合成例中,用红外线吸收方式测定各层的厚度时,显示特征性红外吸收波长的官能团是来自BAPP的甲基。In this synthesis example, when the thickness of each layer was measured by an infrared absorption method, the functional group exhibiting a characteristic infrared absorption wavelength was a methyl group derived from BAPP.

(合成例4:合成作为热塑性聚酰亚胺类化合物的前体的聚酰胺酸)(Synthesis Example 4: Synthesis of Polyamic Acid as a Precursor of Thermoplastic Polyimide Compounds)

加入82.1kg冷却到10℃的DMF、12.18kg的2,2-双[4-(4-氨基苯氧基)苯基]砜(BAPS),在氮气环境下,边搅拌边缓慢添加7.87kg的3,3’,4,4’-联苯四甲酸二酐(BPDA)。接着,添加380g亚乙基双(偏苯三酸单酯酸酐)(TMEG),搅拌30分钟。另外调制将300g的TMEG溶解于3kg的DMF中而得的溶液,在注意粘度的同时将其缓慢地添加到上述反应溶液中,进行搅拌。在粘度达到3000泊时,停止添加和搅拌,得到热塑性聚酰亚胺类化合物的前体的聚酰胺酸的溶液。Add 82.1kg of DMF cooled to 10°C, 12.18kg of 2,2-bis[4-(4-aminophenoxy)phenyl]sulfone (BAPS), and slowly add 7.87kg of 3,3',4,4'-Biphenyltetracarboxylic dianhydride (BPDA). Next, 380 g of ethylene bis(trimellitic acid monoester anhydride) (TMEG) was added, and it stirred for 30 minutes. Separately, a solution obtained by dissolving 300 g of TMEG in 3 kg of DMF was prepared, and this was slowly added to the above reaction solution while paying attention to the viscosity, followed by stirring. When the viscosity reached 3000 poise, the addition and stirring were stopped to obtain a solution of polyamic acid which is a precursor of a thermoplastic polyimide compound.

在该合成例中,用红外线吸收方式测定各层的厚度时,显示特征性红外吸收波长的官能团是来自BAPS的磺基。In this synthesis example, when the thickness of each layer was measured by an infrared absorption method, the functional group exhibiting a characteristic infrared absorption wavelength was a sulfo group derived from BAPS.

(合成例5:合成作为热塑性聚酰亚胺类化合物的前体的聚酰胺酸)(Synthesis Example 5: Synthesis of Polyamic Acid as a Precursor of Thermoplastic Polyimide Compounds)

加入86.2kg冷却到10℃的DMF、6.6kg的1,3-双(4-氨基苯氧基)苯(TPE-R),在氮气环境下,边搅拌边缓慢添加6.9kg的2,3’,3,4’-联苯四甲酸二酐(a-BPDA)。另外调制将300g的TPE-R溶解于3kg的DMF中而得的溶液,在注意粘度的同时将其缓慢地添加到上述反应溶液中,进行搅拌。在粘度达到3000泊时,停止添加和搅拌,得到热塑性聚酰亚胺类化合物的前体的聚酰胺酸的溶液。Add 86.2kg of DMF cooled to 10°C, 6.6kg of 1,3-bis(4-aminophenoxy)benzene (TPE-R), and slowly add 6.9kg of 2,3' while stirring under nitrogen atmosphere , 3,4'-biphenyltetracarboxylic dianhydride (a-BPDA). Separately, a solution obtained by dissolving 300 g of TPE-R in 3 kg of DMF was prepared, and this was slowly added to the above reaction solution while paying attention to the viscosity, followed by stirring. When the viscosity reached 3000 poise, the addition and stirring were stopped to obtain a solution of polyamic acid which is a precursor of a thermoplastic polyimide compound.

在该合成例中,用红外线吸收方式测定各层的厚度时,没有显示特征性红外吸收波长的官能团。In this synthesis example, when the thickness of each layer was measured by an infrared absorption method, there was no functional group exhibiting a characteristic infrared absorption wavelength.

合成例(1)~(5)中的树脂和特征性红外吸收官能团示于表2中。Table 2 shows the resins and characteristic infrared absorbing functional groups in Synthesis Examples (1) to (5).

(测定粘合膜各层的厚度)(Measurement of the thickness of each layer of the adhesive film)

使用KURABO公司制的多层膜厚测定装置KE-500ML,测定膜各层的膜厚。能识别为多层膜、能测定各层的膜厚的情况评价为○,不能识别为多层膜、无法测定各层膜厚的情况评价为×。The film thickness of each layer of the film was measured using a multilayer film thickness measuring device KE-500ML manufactured by Kurabo Corporation. A case where a multilayer film could be recognized and the film thickness of each layer could be measured was rated as ○, and a case where a multilayer film was not recognized and the film thickness of each layer could not be measured was rated as ×.

(实施例1)(Example 1)

使合成例1中得到的高耐热性聚酰亚胺的前体的聚酰胺酸的溶液中含有以下的化学脱水剂和催化剂。The solution of the polyamic acid which is the precursor of the highly heat-resistant polyimide obtained in the synthesis example 1 contained the following chemical dehydrating agent and catalyst.

1.化学脱水剂:相对于作为高耐热性聚酰亚胺的前体的聚酰胺酸的酰胺酸单元1摩尔,乙酸酐为2.0摩尔。1. Chemical dehydrating agent: 2.0 mol of acetic anhydride with respect to 1 mol of amic acid units of the polyamic acid which is the precursor of a highly heat-resistant polyimide.

2.催化剂:相对于作为高耐热性聚酰亚胺的前体的聚酰胺酸的酰胺酸单元1摩尔,异喹啉为0.3摩尔。2. Catalyst: 0.3 mol of isoquinoline with respect to 1 mol of amic acid units of polyamic acid which is a precursor of a highly heat-resistant polyimide.

接着,从凸缘宽为650mm的多歧管式的3层共挤压多层口模连续地挤压出多层膜,该多层膜是以外层为合成例3中得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液、内层为高耐热性聚酰亚胺溶液的前体的聚酰胺酸溶液的顺序形成的,流延在该T型口模之下移动20mm的不锈钢制的环形带上。接着,通过在130℃×100秒的条件下加热该多层膜,使之向自支持性的凝胶膜转化。在该凝胶膜中,观察不到层间剥离,是外观良好的形状的凝胶膜。进而,从环形带上剥离自支持性的凝胶膜,固定于拉幅机的夹子,在300℃×30秒、400℃×50秒、450℃×10的条件下使之干燥、酰亚胺化,得到粘合膜。Then, the multi-layer film is continuously extruded from a multi-manifold type 3-layer co-extrusion multi-layer die with a flange width of 650 mm. The multi-layer film is the thermoplastic polyimide obtained in Synthesis Example 3. The polyamic acid solution of the precursor of the amine, and the polyamic acid solution of the precursor of the highly heat-resistant polyimide solution for the inner layer are sequentially formed, and the cast is made of stainless steel that moves 20 mm below the T-shaped die. on the ring belt. Next, the multilayer film was transformed into a self-supporting gel film by heating at 130° C. for 100 seconds. In this gel film, delamination was not observed, and it was a gel film with a good appearance. Furthermore, the self-supporting gel film was peeled off from the endless belt, fixed to the clips of the tenter, and dried under the conditions of 300° C.×30 seconds, 400° C.×50 seconds, and 450° C.×10 seconds. to obtain an adhesive film.

用KURABO公司制的多层膜厚测定装置KE-500ML测定该聚酰亚胺粘合膜的各层的膜厚,结果为,由作为聚酰亚胺树脂的特征的波数1700cm-1附近的红外线吸收量可以测量三层膜的总膜厚尺寸,由作为甲基的特征的波数2900cm-1附近的红外吸收量可以测定覆盖层1的膜厚尺寸,由作为磺基的特征的波数1300cm-1附近的红外吸收量可以测定覆盖层2的膜厚尺寸,所以,在从拉幅炉出来后的工序中,设置上述膜厚计。膜厚计是可以在多层膜的宽幅方向上以120mm/秒的速度边移动边测定膜厚的机构。膜厚计测定的多层膜的各层的膜厚尺寸和膜的宽幅方向的位置被逐次向控制系统转送,为了得到所希望的膜厚尺寸,控制系统以1次/5秒的间隔对加热元件输送通电电流或通电时间的至少1个以上的通电信号,以1次/5秒的间隔对凸缘可移动发动机输送作为发动机旋转角度的旋转信号,来进行膜厚尺寸的控制。The film thickness of each layer of the polyimide adhesive film was measured with a multilayer film thickness measuring device KE-500ML manufactured by KURABO Co., Ltd. As a result, the infrared ray with a wave number near 1700 cm -1 , which is a characteristic of polyimide resin, The absorption can measure the total film thickness of the three-layer film, and the infrared absorption near the wave number 2900cm -1 characteristic of the methyl group can measure the film thickness of the cover layer 1, and the wave number 1300cm -1 characteristic of the sulfo group The infrared absorption in the vicinity can measure the film thickness dimension of the cover layer 2, so the above-mentioned film thickness meter is installed in the process after leaving the tenter furnace. The film thickness gauge is a mechanism that can measure the film thickness while moving at a speed of 120mm/sec in the width direction of the multilayer film. The film thickness of each layer of the multi-layer film measured by the film thickness gauge and the position of the width direction of the film are successively transmitted to the control system. In order to obtain the desired film thickness, the control system controls the The heating element sends at least one energization signal of energization current or energization time, and sends a rotation signal as a motor rotation angle to the flange movable motor at intervals of once/5 seconds to control the film thickness dimension.

在得到的膜的机械传送方向和宽幅方向,用KURABO公司制的多层膜厚测定装置KE-500ML以10mm的间距进行测定,求出膜厚偏差,结果为各层的膜厚偏差在8%以下。In the mechanical conveyance direction and the width direction of the obtained film, the multilayer film thickness measuring device KE-500ML manufactured by KURABO Co., Ltd. was used to measure at a pitch of 10 mm, and the film thickness deviation was obtained. As a result, the film thickness deviation of each layer was 8 %the following.

(实施例2)(Example 2)

除了使用合成例4所得到的作为热塑性聚酰亚胺的前体的聚酰胺酸溶液来代替合成例3所得到的作为热塑性聚酰亚胺的前体的聚酰胺酸溶液之外,与实施例1同样地制作粘合膜。各层的膜厚偏差在7%以下。In addition to using the polyamic acid solution obtained in Synthesis Example 4 as a precursor of thermoplastic polyimide instead of the polyamic acid solution obtained in Synthesis Example 3 as a precursor of thermoplastic polyimide, the same as in Example 1 An adhesive film is produced in the same manner. The film thickness variation of each layer is 7% or less.

(实施例3)(Example 3)

使用合成例2所得到的作为高耐热性聚酰亚胺的前体的聚酰胺酸溶液来代替合成例1所得到的作为高耐热性聚酰亚胺的前体的聚酰胺酸溶液,使用合成例5所得到的作为热塑性聚酰亚胺的前体的聚酰胺酸溶液来代替合成例3所得到的作为热塑性聚酰亚胺的前体的聚酰胺酸溶液,除此之外,与实施例1同样地制作粘合膜。各层的膜厚偏差在7%以下。The polyamic acid solution obtained as the precursor of the high heat-resistant polyimide obtained in Synthesis Example 2 is used to replace the polyamic acid solution obtained in Synthesis Example 1 as the precursor of the highly heat-resistant polyimide, Using the polyamic acid solution obtained in Synthesis Example 5 as a precursor of thermoplastic polyimide instead of the polyamic acid solution obtained in Synthesis Example 3 as a precursor of thermoplastic polyimide, in addition, with An adhesive film was produced in the same manner as in Example 1. The film thickness variation of each layer is 7% or less.

(比较例1)(comparative example 1)

除了使用合成例5所得到的作为热塑性聚酰亚胺的前体的聚酰胺酸溶液来代替合成例3所得到的作为热塑性聚酰亚胺的前体的聚酰胺酸溶液之外,与实施例1同样地制作粘合膜。In addition to using the polyamic acid solution obtained in Synthesis Example 5 as a precursor of thermoplastic polyimide instead of the polyamic acid solution obtained in Synthesis Example 3 as a precursor of thermoplastic polyimide, the same as in Example 1 An adhesive film is produced in the same manner.

(比较例2)(comparative example 2)

除了使用合成例2所得到的作为高耐热性聚酰亚胺的前体的聚酰胺酸溶液来代替合成例1所得到的作为高耐热性聚酰亚胺的前体的聚酰胺酸溶液之外,与实施例1同样地制作粘合膜。In addition to using the polyamic acid solution obtained in Synthesis Example 2 as a precursor of high heat-resistant polyimide instead of the polyamic acid solution obtained in Synthesis Example 1 as a precursor of high heat-resistant polyimide Except for this, an adhesive film was produced in the same manner as in Example 1.

实施例1~3、比较例1、2的各层的树脂构成和层厚测定结果示于表1中。Table 1 shows the resin composition and layer thickness measurement results of each layer in Examples 1 to 3 and Comparative Examples 1 and 2.

表1Table 1

  高耐热性聚酰亚胺层 High heat resistance polyimide layer   粘合层 adhesive layer   测定结果 The measurement results   酸二酐/摩尔% Acid dianhydride/mol%   二胺/摩尔% Diamine/mol%   酸二酐/摩尔% Acid dianhydride/mol%   二胺/摩尔% Diamine/mol%  实施例1 Example 1   BPDA/100 BPDA/100   PDA/100 PDA/100   BPDA/95    TMEG/5 BPDA/95 TMEG/5   BAPP/100 BAPP/100   ○  实施例2 Example 2   BPDA/100 BPDA/100   PDA/100 PDA/100   BPDA/95    TMEG/5 BPDA/95 TMEG/5   BAPS/100 BAPS/100   ○  实施例3 Example 3   PMDA/45   BTDA/55 PMDA/45 BTDA/55   PDA/50  BAPP/20  ODA/30 PDA/50 BAPP/20 ODA/30   a-BPDA/100 a-BPDA/100   TPE-R/100 TPE-R/100   ○  比较例1 Comparative example 1   BPDA/100 BPDA/100   PDA/100 PDA/100   a-BPDA/100 a-BPDA/100   TPE-R/100 TPE-R/100   × ×  比较例2 Comparative example 2   PMDA/45   BTDA/55 PMDA/45 BTDA/55   PDA/50  BAPP/20  ODA/30 PDA/50 BAPP/20 ODA/30   BPDA/95    TMEG/5 BPDA/95 TMEG/5   BAPP/100 BAPP/100   × ×

如实施例所示,高耐热性聚酰亚胺层或粘合层的任意一方以含有显示特征性红外吸收波长的官能团的聚酰亚胺树脂为主要成分时,可以用红外线吸收方式的厚度测定装置来正确地检测各层的厚度。As shown in the examples, when either the high heat-resistant polyimide layer or the adhesive layer is mainly composed of a polyimide resin containing a functional group exhibiting a characteristic infrared absorption wavelength, the thickness of the infrared absorption method can be used. Measuring device to correctly detect the thickness of each layer.

(实施例4)(Example 4)

图3所示的多歧管式的多层口模40使用安装有加热元件43的形式的三层共挤压口模,实施聚酰亚胺三层膜的共挤压制作。核心层、覆盖层的聚酰亚胺树脂组成示于表3中。The multi-manifold multi-layer die 40 shown in FIG. 3 uses a three-layer co-extrusion die equipped with a heating element 43 to perform co-extrusion production of a polyimide three-layer film. Table 3 shows the polyimide resin compositions of the core layer and the cover layer.

该三层共挤压口模的外层(为覆盖层1和2)两侧的流路44的一部分可以用加热元件43(直径6.5mm、电护套加热器)进行加热。另外,口模的凸缘间隔为0.8mm,凸缘的宽幅调整机构47为能够用发动机以10μm的精密度可动地调整凸缘间隔的机构。这些膜厚尺寸调整机构在多层口模的宽幅方向上以12.5mm的间隔设置。多层口模的宽幅为600mm,使致冷剂流通于设置在多层口模的致冷剂用流通孔46,在0℃下进行冷却。A part of the flow path 44 on both sides of the outer layer (covering layers 1 and 2) of the three-layer co-extrusion die can be heated with a heating element 43 (diameter 6.5 mm, electric sheath heater). In addition, the flange interval of the die is 0.8 mm, and the flange width adjustment mechanism 47 is a mechanism capable of movably adjusting the flange interval with a precision of 10 μm by a motor. These film thickness dimension adjustment mechanisms were provided at intervals of 12.5 mm in the width direction of the multilayer die. The multilayer die has a width of 600 mm, and cooling is performed at 0° C. by allowing the refrigerant to flow through the refrigerant circulation holes 46 provided in the multilayer die.

使合成例1中得到的作为高耐热性聚酰亚胺的前体的聚酰胺酸溶液中含有以下的化学脱水剂和催化剂。The following chemical dehydrating agent and catalyst were contained in the polyamic-acid solution which is the precursor of the highly heat-resistant polyimide obtained in the synthesis example 1.

1.化学脱水剂:相对于作为高耐热性聚酰亚胺的前体的聚酰胺酸的酰胺酸单元1摩尔,乙酸酐为2.0摩尔。1. Chemical dehydrating agent: 2.0 mol of acetic anhydride with respect to 1 mol of amic acid units of the polyamic acid which is the precursor of a highly heat-resistant polyimide.

2.催化剂:相对于作为高耐热性聚酰亚胺的前体的聚酰胺酸的酰胺酸单元1摩尔,异喹啉为0.3摩尔。2. Catalyst: 0.3 mol of isoquinoline with respect to 1 mol of amic acid units of polyamic acid which is a precursor of a highly heat-resistant polyimide.

接着,将上述高耐热性聚酰亚胺树脂溶液的前体的聚酰胺酸溶液作为核心层,将合成例3中得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液作为覆盖层1,将合成例4中得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液作为覆盖层2,从上述三层共挤压口模中连续地挤压出多层膜,流延于以15m/分的速度移动的不锈钢制的环形带上。接着,通过在130℃×100秒的条件下加热该多层膜,使之向自支持性的凝胶膜转化。在该凝胶膜中,观察不到层间剥离,是外观良好的形状的凝胶膜。进而,从环形带上剥离自支持性的凝胶膜,固定于拉幅机的夹子,在拉幅炉内以300℃×30秒、400℃×50秒、450℃×10的条件使之干燥、酰亚胺化,得到两外层的覆盖层为热塑性聚酰亚胺类化合物、中央的核心层为高耐热性聚酰亚胺类化合物形成的聚酰亚胺三层膜。Next, the polyamic acid solution which is the precursor of the above-mentioned highly heat-resistant polyimide resin solution is used as the core layer, and the polyamic acid solution which is the precursor of the thermoplastic polyimide obtained in Synthesis Example 3 is used as the cover layer 1 , the polyamic acid solution of the precursor of the thermoplastic polyimide obtained in Synthesis Example 4 is used as the cover layer 2, and the multilayer film is continuously extruded from the above-mentioned three-layer co-extrusion die, and cast on a 15m / min speed on the stainless steel endless belt. Next, the multilayer film was transformed into a self-supporting gel film by heating at 130° C. for 100 seconds. In this gel film, delamination was not observed, and it was a gel film with a good appearance. Furthermore, the self-supporting gel film was peeled off from the endless belt, fixed to the clips of the tenter, and dried in a tenter oven under the conditions of 300°C x 30 seconds, 400°C x 50 seconds, and 450°C x 10 seconds. and imidization to obtain a polyimide three-layer film in which the covering layers of the two outer layers are thermoplastic polyimide compounds, and the central core layer is formed of high heat-resistant polyimide compounds.

用KURABO公司制的多层膜厚测定装置KE-500ML测定所得聚酰亚胺三层膜的各层的膜厚,结果为,由作为聚酰亚胺树脂的特征的吸收波长1700cm-1附近的红外线吸收量可以测量三层膜的总膜厚尺寸,由作为甲基的特征的吸收波长2900cm-1附近的红外吸收量可以测定覆盖层1的膜厚尺寸,由作为磺基的特征的吸收波长1300cm-1附近的红外吸收量可以测定覆盖层2的膜厚尺寸,所以,在从拉幅炉出来后的工序中,设置上述膜厚计。膜厚计是可以在多层膜的宽幅方向上以120mm/秒的速度边移动边测定膜厚的机构。膜厚计测定的多层膜各层的膜厚尺寸和膜的宽幅方向的位置被逐次向控制系统转送,为了得到所希望的膜厚尺寸,控制系统以1次/5秒的间隔对加热元件输送通电电流或通电时间的至少1个以上的通电信号,以1次/5秒的间隔对凸缘可移动发动机输送作为发动机旋转角度的旋转信号,来进行膜厚尺寸的控制。The film thickness of each layer of the obtained polyimide three-layer film was measured with a multilayer film thickness measuring device KE-500ML manufactured by KURABO Corporation. As a result, the characteristic absorption wavelength of polyimide resin near 1700 cm The infrared absorption can measure the total film thickness of the three-layer film, and the infrared absorption around 2900cm - 1, which is the characteristic of the methyl group, can measure the film thickness of the cover layer 1, and the characteristic of the sulfonic group. The infrared absorption near 1300 cm −1 can measure the film thickness of the cover layer 2 , so the above-mentioned film thickness meter is installed in the process after leaving the tenter furnace. The film thickness gauge is a mechanism that can measure the film thickness while moving at a speed of 120mm/sec in the width direction of the multilayer film. The film thickness of each layer of the multilayer film measured by the film thickness gauge and the position of the width direction of the film are successively transmitted to the control system. In order to obtain the desired film thickness, the control system heats the The element transmits at least one energization signal of energization current or energization time, and transmits a rotation signal as a motor rotation angle to the flange movable motor at intervals of once/5 seconds to control the film thickness dimension.

其结果为,在控制系统中不进行膜厚尺寸控制时的各层膜厚尺寸的偏差为20%,与此相对,进行膜厚尺寸控制时的各层膜厚尺寸的偏差为1%以内。对于所得膜的机械传送方向和宽幅方向的膜厚尺寸的偏差,用KURABO公司制的多层膜厚测定装置KE-500ML以10mm的间距来测定求出。As a result, the variation in the thickness of each layer was 20% when the control system did not control the thickness of the layer, while the variation in the thickness of each layer was within 1% when the thickness was controlled. The deviation of the film thickness dimension in the mechanical conveyance direction and the width direction of the obtained film was measured and determined at a pitch of 10 mm with a multilayer film thickness measuring device KE-500ML manufactured by KURABO Corporation.

(实施例5)(Example 5)

将合成例5所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液用于覆盖层1来代替将合成例3所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液用于覆盖层1,将合成例2所得到的高耐热性聚酰亚胺的前体的聚酰胺酸溶液用于核心层来代替将合成例1所得到的高耐热性聚酰亚胺的前体的聚酰胺酸溶液用于核心层,除此之外,用与实施例1同样的装置制作聚酰亚胺三层膜。核心层、覆盖层的聚酰亚胺树脂组成示于表3中。The polyamic acid solution of the precursor of the thermoplastic polyimide obtained in Synthesis Example 5 was used for the cover layer 1 instead of the polyamic acid solution of the precursor of the thermoplastic polyimide obtained in Synthesis Example 3 for the cover layer 1. In layer 1, the polyamic acid solution of the precursor of the highly heat-resistant polyimide obtained in Synthesis Example 2 was used for the core layer instead of the precursor of the highly heat-resistant polyimide obtained in Synthesis Example 1. The polyamic acid solution was used for the core layer, except that, a polyimide three-layer film was produced with the same device as in Example 1. Table 3 shows the polyimide resin compositions of the core layer and the cover layer.

其结果为,在控制系统中不进行膜厚尺寸控制时的各层膜厚尺寸的偏差为20%,与此相对,进行膜厚尺寸控制时的各层膜厚尺寸的偏差为1%以内。As a result, the variation in the thickness of each layer was 20% when the control system did not control the thickness of the layer, while the variation in the thickness of each layer was within 1% when the thickness was controlled.

(实施例6)(Example 6)

除了将合成例3所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液用于覆盖层1及覆盖层2来代替将合成例4所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液用于覆盖层2之外,用与实施例1同样的装置制作聚酰亚胺三层膜。核心层、覆盖层的聚酰亚胺树脂组成示于表3中。Except that the polyamic acid solution of the precursor of the thermoplastic polyimide obtained in Synthesis Example 3 was used for the cover layer 1 and the cover layer 2 instead of the polyamide of the precursor of the thermoplastic polyimide obtained in Synthesis Example 4. Except that the acid solution was used for the cover layer 2, a polyimide three-layer film was produced with the same apparatus as in Example 1. Table 3 shows the polyimide resin compositions of the core layer and the cover layer.

其结果为,在控制系统中不进行膜厚尺寸控制时的各层膜厚尺寸的偏差为20%,与此相对,进行膜厚尺寸控制时的核心层的膜厚尺寸的偏差为1%以内,覆盖层的各层的膜厚尺寸偏差为2%以内。As a result, the variation in the film thickness of each layer was 20% when the control system did not control the film thickness, while the variation in the film thickness of the core layer was within 1% when the film thickness was controlled. , the film thickness dimensional deviation of each layer of the cover layer is within 2%.

(比较例3)(comparative example 3)

除了将合成例5所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液用于覆盖层1及覆盖层2来代替使用合成例2所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液之外,与实施例1同样地制作聚酰亚胺三层膜。核心层、覆盖层的聚酰亚胺树脂组成示于表3中。Except that the polyamic acid solution of the precursor of the thermoplastic polyimide obtained in Synthesis Example 5 is used for the cover layer 1 and the cover layer 2 instead of the polyamide of the precursor of the thermoplastic polyimide obtained in Synthesis Example 2 Except for the acid solution, a polyimide three-layer film was produced in the same manner as in Example 1. Table 3 shows the polyimide resin compositions of the core layer and the cover layer.

用KURABO公司制的多层膜厚测定装置KE-500ML测定所得聚酰亚胺三层膜的各层的膜厚,结果为,由作为聚酰亚胺树脂的特征的吸收波长的红外线吸收量可以测量三层膜的总膜厚尺寸,但不能测定各层的膜厚尺寸,不能控制各层的膜厚。The film thickness of each layer of the obtained polyimide three-layer film was measured with a multilayer film thickness measuring device KE-500ML manufactured by KURABO Corporation. The total film thickness of the three-layer film is measured, but the film thickness of each layer cannot be measured, and the film thickness of each layer cannot be controlled.

(比较例4)(comparative example 4)

将合成例2所得到的高耐热性聚酰亚胺的前体的聚酰胺酸溶液用于核心层来代替使用合成例1所得到的高耐热性聚酰亚胺的前体的聚酰胺酸溶液,将合成例3所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液用于覆盖层2来代替使用合成例4所得到的热塑性聚酰亚胺的前体的聚酰胺酸溶液,除此之外,用与实施例1同样的装置制作聚酰亚胺三层膜。核心层、覆盖层的聚酰亚胺树脂组成示于表3中。The polyamic acid solution of the precursor of the highly heat-resistant polyimide obtained in Synthesis Example 2 was used for the core layer instead of the polyamide using the precursor of the highly heat-resistant polyimide obtained in Synthesis Example 1 Acid solution, using the polyamic acid solution of the precursor of thermoplastic polyimide obtained in Synthesis Example 3 for the cover layer 2 instead of the polyamic acid solution of the precursor of thermoplastic polyimide obtained in Synthesis Example 4 , except that, a polyimide three-layer film was produced with the same apparatus as in Example 1. Table 3 shows the polyimide resin compositions of the core layer and the cover layer.

用KURABO公司制的多层膜厚测定装置KE-500ML测定所得聚酰亚胺三层膜的各层的膜厚,结果为,由作为聚酰亚胺树脂的特征的吸收波长的红外线吸收量可以测量三层膜的总膜厚尺寸,但不能测定各层的膜厚尺寸,不能控制各层的膜厚。The film thickness of each layer of the obtained polyimide three-layer film was measured with a multilayer film thickness measuring device KE-500ML manufactured by KURABO Corporation. The total film thickness of the three-layer film is measured, but the film thickness of each layer cannot be measured, and the film thickness of each layer cannot be controlled.

表2Table 2

  合成例 Synthetic example   树脂 Resin   特征性红外吸收官能团 Characteristic infrared absorbing functional groups   合成1 Synthesis 1   高耐热性聚酰亚胺类化合物 High heat resistance polyimide compound   无 none   合成2 Synthesis 2   ↑   甲基 Methyl   合成3 Synthesis 3   热塑性聚酰亚胺类化合物 Thermoplastic polyimide compounds   甲基 Methyl   合成4 Synthesis 4   ↑   磺基 Sulfur   合成5 Synthesis 5   ↑   无 none

表3   实施例   覆盖1   核心   覆盖2   实施例4   合成3   合成1   合成4   实施例5   合成5   合成2   合成4   实施例6   合成3   合成1   合成3   比较例3   合成5   合成1   合成5   比较例4   合成3   合成2   合成3 table 3 Example cover 1 core cover 2 Example 4 Synthesis 3 synthesis 1 Synthesis 4 Example 5 Synthesis 5 synthesis 2 Synthesis 4 Example 6 Synthesis 3 synthesis 1 Synthesis 3 Comparative example 3 Synthesis 5 synthesis 1 Synthesis 5 Comparative example 4 Synthesis 3 synthesis 2 Synthesis 3

Claims (8)

1. polyimide multilayered adhesive film, adhesive layer that it is formed with high-fire resistance polyimide layer and at least one surface of the high-fire resistance polyimide layer, containing thermoplastic polyimide, it is characterized in that, using the polyimide resin of the functional group containing display characteristic infrared ray absorbing wavelength as main component, the film thickness deviation of each layer is ± the 10% or less of each layer average thickness for high-fire resistance polyimide layer or adhesive layer.
2. polyimide multilayered adhesive film, adhesive layer that it is formed with high-fire resistance polyimide layer and at least one surface of the high-fire resistance polyimide layer, containing thermoplastic polyimide, it is characterized in that, the bonding film is manufactured with co-extrusion pressure-cast coating method, also, high-fire resistance polyimide layer or adhesive layer are using the polyimide resin of the functional group containing display characteristic infrared ray absorbing wavelength as main component.
3. polyimide multilayered adhesive film according to claim 1 or 2, its three-decker for containing high-fire resistance polyimides and adhesive layer formed on the two sides of the high-fire resistance polyimide layer, containing thermoplastic polyimide, it is characterized in that at least two or more the layers in described three layers are respectively with the polyimide resin layer as main component of the functional group containing different display characteristic infrared ray absorbing wavelengths.
4. polyimide multilayered adhesive film described in any one of claim 1 to 3, it is characterized in that, the functional group of display characteristic infrared ray absorbing wavelength is methyl, sulfo group, fluoromethyl.
5. the manufacturing method of polyimide multilayered adhesive film, be manufacture at least two layers or more, the method for multilayer film containing polyimide resin, it is characterized in that, including following processes:
The production process of polyimide multilayered adhesive film, layer more than at least one of the polyimide multilayered adhesive film are with the polyimide resin layer as main component of the functional group containing display characteristic infrared ray absorbing wavelength;
Infrared ray is irradiated on the thickness direction of the film to measure the distribution of the absorbing wavelength of infrared ray, the process of the film thickness size of each layer is calculated by the infrared ray absorbing amount of the characteristic wavelength range of each layer;
By the film thickness dimension data feedback of calculating to the production process of multilayer film, apply the process for adjusting the operation of each tunic thickness in production process.
6. the manufacturing method of polyimide multilayered adhesive film according to claim 5, it is characterized in that, the Polymeric multilayer is formed by the layer containing high-fire resistance polyimide resin and the layer containing thermoplastic polyimide resin.
7. the manufacturing method of polyimide multilayered adhesive film according to claim 6, wherein the structure of the Polymeric multilayer is, on the two sides of the layer containing high-fire resistance polyimide resin, configured with the layer containing thermoplastic resin polyimide resin.
8. the manufacturing method of the polyimide multilayered adhesive film according to any one of claim 5~7, it is characterized in that, in the production process of the polyimide multilayered adhesive film, in the film surface containing the layer containing polyimide resin more than at least one layer, it is coated with the solution containing polyamic acid or polyimide resin, it heated, dried, is film-made by method so.
CN 200580043088 2004-12-17 2005-12-07 Polyimide multilayer adhesive film and its manufacturing method Pending CN101080471A (en)

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CN102725114A (en) * 2010-01-26 2012-10-10 宇部兴产株式会社 Process and equipment for production of polyimide film
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CN105479713A (en) * 2014-10-06 2016-04-13 莱芬豪舍机械制造两合公司 Coextrusion device, single layer extrusion device, and method for measuring a coating thickness
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CN102405137A (en) * 2007-11-30 2012-04-04 日东电工株式会社 Viscoelastic member with polymer layer containing localized elastomer
CN102405137B (en) * 2007-11-30 2014-09-03 日东电工株式会社 Viscoelastic member with polymer layer containing localized elastomer
CN102725114B (en) * 2010-01-26 2014-10-08 宇部兴产株式会社 Process and equipment for production of polyimide film
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EP2589626A4 (en) * 2011-03-07 2014-01-29 Mitsubishi Gas Chemical Co RESIN COMPOSITION FOR PRINTED CIRCUIT BOARD
CN104837601B (en) * 2012-11-29 2016-06-29 株式会社钟化 The manufacture method of thin film, apparatus for manufacturing thin film and control utensil
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CN103191789B (en) * 2013-04-07 2015-07-29 无锡威孚环保催化剂有限公司 Integer catalyzer coated probe and application thereof
CN103191789A (en) * 2013-04-07 2013-07-10 无锡威孚环保催化剂有限公司 Monolithic catalyst coating probe and application thereof
CN105479713A (en) * 2014-10-06 2016-04-13 莱芬豪舍机械制造两合公司 Coextrusion device, single layer extrusion device, and method for measuring a coating thickness
CN110744764A (en) * 2019-10-15 2020-02-04 苏州工业职业技术学院 Corona-resistant polyimide film preparation method, corona-resistant polyimide film and preparation system thereof
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