CN101090077A - Semiconductor package and its manufacturing method - Google Patents
Semiconductor package and its manufacturing method Download PDFInfo
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- CN101090077A CN101090077A CNA2006100918502A CN200610091850A CN101090077A CN 101090077 A CN101090077 A CN 101090077A CN A2006100918502 A CNA2006100918502 A CN A2006100918502A CN 200610091850 A CN200610091850 A CN 200610091850A CN 101090077 A CN101090077 A CN 101090077A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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Abstract
Description
技术领域technical field
本发明是关于一种半导体封装件及其制法,特别是关于一种可提供额外电性接点的半导体封装件及其制法。The present invention relates to a semiconductor package and its manufacturing method, in particular to a semiconductor package capable of providing additional electrical contacts and its manufacturing method.
背景技术Background technique
由于通讯、网络及计算机等各式便携(Portable)产品的大幅增长,可缩小集成电路(IC)面积且具有高密度与多管脚化特性的球栅阵列(BGA)封装件已日渐成为封装市场上的主流,并常与微处理器、芯片组、绘图芯片等高性能芯片搭配,发挥更高速的运算功能。其中,球栅阵列(BGA)是一种先进的半导体芯片封装技术,其特点在于采用一基片安置半导体芯片,并在该基片背面设置多个成栅状阵列排列的焊球(Solder Ball),使相同单位面积的半导体芯片载体上可以容纳更多的输入/输出连接端(I/O Connection),符合高度集成化(Integration)半导体芯片所需,通过这些焊球将整个封装单元焊接及电性连接到外部装置。Due to the substantial growth of various portable products such as communication, network and computer, ball grid array (BGA) package, which can reduce the area of integrated circuit (IC) and has high density and multi-pin characteristics, has gradually become the packaging market. It is the mainstream of the Internet, and is often matched with high-performance chips such as microprocessors, chipsets, and graphics chips to perform higher-speed computing functions. Among them, ball grid array (BGA) is an advanced semiconductor chip packaging technology, which is characterized in that a semiconductor chip is placed on a substrate, and a plurality of solder balls (Solder Ball) arranged in a grid array are arranged on the back of the substrate. , so that more input/output connection terminals (I/O Connection) can be accommodated on the semiconductor chip carrier of the same unit area, which meets the requirements of highly integrated semiconductor chips. The entire package unit is welded and electrically connected through these solder balls connection to external devices.
再者,为提高半导体封装件产能并节省工序成本,现今微型半导体封装件的制作多采成批方式,即在一整片芯片载体(chip carrier)表面通过多条格栅状交错的封装分界,预先定义出多条呈矩阵排列的封装单元,经过上片(Die bond)、焊接(Wire bond)及胶体封装(Encapsulation)等程序,并以切割作业(Singulation)去除任相邻半导体封装单元间的连接部,形成多个独立的半导体封装件。例如为满足电子产品轻薄短小的设计需求,业界发展出一种可提供整体尺寸更小的薄型球栅阵列(TFBGA)封装件或平面栅格阵列(Land Grid Array;LGA)封装件,它主要以成批方式建立在同一基片上,该基片预先划分出多条封装区域,分别定义出个别TFBGA封装单元位置,经过上晶、打线、模压等步骤,最后再进行切割工序(Singulation process),将各个封装区域及安置其上的半导体芯片切割开来,形成多条LGA封装件,或在基片上设置焊球形成TFBGA封装件。相关技术可参阅美国专利第5776798、6593658、6281047等案。Furthermore, in order to increase the production capacity of semiconductor packages and save process costs, today’s miniature semiconductor packages are mostly produced in batches, that is, on the surface of a whole chip carrier (chip carrier) through multiple grid-like staggered package boundaries, A plurality of packaging units arranged in a matrix are pre-defined, and after procedures such as die bond, wire bond, and encapsulation, the connection between any adjacent semiconductor packaging units is removed by cutting operation (Singulation). , forming multiple independent semiconductor packages. For example, in order to meet the design requirements of thin, light and small electronic products, the industry has developed a thin ball grid array (TFBGA) package or a land grid array (Land Grid Array; LGA) package that can provide a smaller overall size. The batch method is established on the same substrate. The substrate is pre-divided into multiple packaging areas, and the positions of individual TFBGA packaging units are defined respectively. After the steps of wafer mounting, wire bonding, and molding, the Singulation process is finally carried out. Divide each packaging area and the semiconductor chip placed on it to form multiple LGA packages, or set solder balls on the substrate to form a TFBGA package. Related technologies can refer to US Patent Nos. 5,776,798, 6,593,658, 6,281,047 and other cases.
另外,业界也发展出一种类似上述TFBGA封装件、以导线架作为芯片载体的四方扁平无管脚(QFN)封装件,它同样是以呈矩阵排列安排导线架,将半导体芯片置于该导线架上并进行打线、封装模压等步骤后,再进行切割工序,形成多条QFN封装件。相关技术是可参阅美国专利第6143981、6399415、6424024等案。In addition, the industry has also developed a quad flat no-pin (QFN) package similar to the above-mentioned TFBGA package, which uses a lead frame as a chip carrier. It also arranges the lead frame in a matrix, and the semiconductor chip is placed on the lead frame. After the steps of wire bonding, package molding and other steps are carried out, the cutting process is carried out to form multiple QFN packages. Related technologies can refer to US Patent No. 6,143,981, 6,399,415, 6,424,024 and other cases.
上述各式轻薄型半导体封装件可应用在便携式电子产品中,例如中国台湾专利号第I242820号的“感测式半导体装置及其制法”即揭示利用TFGBA结构在一封装结构内整合控制芯片及感测芯片,构成一(compact camera module,CCM)封装结构。The above-mentioned various thin and light semiconductor packages can be applied in portable electronic products. For example, the "Sensing Semiconductor Device and Its Manufacturing Method" of Taiwan Patent No. I242820 discloses the use of a TFGBA structure to integrate a control chip and a The sensing chip constitutes a (compact camera module, CCM) package structure.
但是,在上述各式半导体封装件或所应用的CCM封装结构中,该半导体封装件或封装结构的载体(如基片或导线架)只能在下方提供与外界电性连接的电性接点,无法在封装件或封装结构侧面,或上表面(封装胶体部分)提供额外电性接点,这样不仅无法提供电子产品良好的电性功能,同时也将限制电子产品的使用,例如无法进行封装件的堆栈或无法利用插座(socket)将封装件电性连接到外部装置。However, in the above-mentioned various semiconductor packages or the applied CCM package structure, the carrier (such as the substrate or the lead frame) of the semiconductor package or the package structure can only provide electrical contacts electrically connected to the outside below, It is impossible to provide additional electrical contacts on the side of the package or the package structure, or on the upper surface (encapsulation gel part), which will not only fail to provide good electrical functions for electronic products, but will also limit the use of electronic products, such as the inability to carry out packaging. Stacks may not utilize sockets to electrically connect the package to external devices.
因此,如何提供一种可额外提供多个电性接点,避免限制电子产品使用等问题,同时也可提供电子产品良好电性功能的半导体封装件及其制法,已成为目前亟待解决的问题。Therefore, how to provide a semiconductor package and its manufacturing method that can provide multiple electrical contacts, avoid problems such as restricting the use of electronic products, and provide electronic products with good electrical functions has become an urgent problem to be solved.
发明内容Contents of the invention
为克服上述现有技术的缺点,本发明的主要目的在于提供一种半导体封装件及其制法,可额外提供多个电性接点,从而强化电子产品的电性功能及使用范围。In order to overcome the above-mentioned shortcomings of the prior art, the main purpose of the present invention is to provide a semiconductor package and its manufacturing method, which can additionally provide a plurality of electrical contacts, thereby enhancing the electrical function and application range of electronic products.
本发明的另一目的在于提供一种半导体封装件及其制法,可在封装件侧边形成电性接点。Another object of the present invention is to provide a semiconductor package and its manufacturing method, which can form electrical contacts on the side of the package.
本发明的又一目的在于提供一种半导体封装件及其制法,可在封装件侧边及顶面形成电性接点。Another object of the present invention is to provide a semiconductor package and its manufacturing method, which can form electrical contacts on the side and top surface of the package.
本发明的再一目的在于提供一种半导体封装件及其制法,可供进行半导体封装件的直接电性堆栈。Another object of the present invention is to provide a semiconductor package and its manufacturing method, which can be used for direct electrical stacking of semiconductor packages.
本发明的还一目的在于提供一种半导体封装件及其制法,可与插座电性连接。Another object of the present invention is to provide a semiconductor package and its manufacturing method, which can be electrically connected to a socket.
为实现上述及其它目的,本发明的半导体封装件的制法包括:提供一具有多条芯片载体的芯片载体模块片,各该芯片载体上设有多个电性连接点;在该芯片载体模块片上对应各芯片载体间设置导电件,并使该导电件电性连接相邻芯片载体的电性连接点,以及在各该芯片载体上接置并电性连接半导体芯片;进行封装模压作业,在该芯片载体模块片上形成一包覆该半导体芯片及导电件的封装胶体;以及沿各该芯片载体间的封装胶体及导电件进行切割,分离设置于相邻芯片载体上的导电件,并使该导电件部分表面露出该封装胶体,从而分离各该芯片载体。In order to achieve the above and other objects, the manufacturing method of the semiconductor package of the present invention includes: providing a chip carrier module sheet with a plurality of chip carriers, each of which is provided with a plurality of electrical connection points; Conductive parts are arranged on the chip corresponding to each chip carrier, and the conductive parts are electrically connected to the electrical connection points of adjacent chip carriers, and the semiconductor chips are connected and electrically connected to each chip carrier; packaging and molding operations are performed. An encapsulant encapsulating the semiconductor chip and the conductive elements is formed on the chip carrier module sheet; and cutting along the encapsulant and the conductive elements between the chip carriers separates the conductive elements disposed on the adjacent chip carriers, and makes the Part of the surface of the conductive member exposes the encapsulant, thereby separating each of the chip carriers.
该导电件上表面还可在封装模压后直接露出该封装胶体,也可将该封装胶体进行薄化作业,露出该导电件上表面,接着再切割该封装胶体及导电件,使该导电件侧表面露出该封装胶体,这样可利用露出该导电件的上表面及侧表面作为与外界电性连接的电性接点。The upper surface of the conductive member can also directly expose the encapsulating gel after packaging and molding, or the encapsulating gel can be thinned to expose the upper surface of the conductive member, and then the encapsulating gel and the conductive member are cut to make the conductive member side The encapsulation compound is exposed on the surface, so that the upper surface and the side surface of the conductive member can be used as electrical contacts for electrical connection with the outside.
通过上述制法,本发明也提供一种半导体封装件,该半导体封装件包括:一芯片载体,该芯片载体上设有多个电性连接点;至少一半导体芯片,接置并电性连接到该芯片载体;多条导电件,接置并电性连接到该电性连接点;以及一封装胶体,形成于该芯片载体上,包覆该半导体芯片及导电件,并至少使该导电件侧表面露出该封装胶体。Through the above manufacturing method, the present invention also provides a semiconductor package, which includes: a chip carrier with a plurality of electrical connection points; at least one semiconductor chip connected and electrically connected to The chip carrier; a plurality of conductive elements connected and electrically connected to the electrical connection point; and an encapsulant formed on the chip carrier, covering the semiconductor chip and the conductive elements, and making at least one side of the conductive elements The packaging colloid is exposed on the surface.
因此,本发明的半导体封装件及其制法是在一具有多条芯片载体的芯片载体模块片上,对应各芯片载体间设置导电件,并使该导电件电性连接相邻芯片载体的电性连接点,且在各该芯片载体上接置并电性连接半导体芯片,再进行模压作业,形成一包覆该半导体芯片及导电件的封装胶体,接着沿各该芯片载体间进行切割,分离设置于相邻芯片载体上的导电件,使该导电件的部分表面露出该封装胶体,其中,该导电件上表面可在模压后直接露出该封装胶体,也可将该封装胶体进行薄化作业,露出该导电件的上表面,接着在露出该封装胶体的导电件表面形成一如镍/金电镀层,提供后续与外界电性连接,然后再分离各该芯片载体,利用露出该封装胶体的导电件提供额外的电性接点,供后续进行封装件的堆栈,或利用插座(socket)将封装件电性连接到外部装置,避免限制电子产品的使用等问题,同时也可提供电子产品良好的电性功能。Therefore, the semiconductor package of the present invention and its manufacturing method are to arrange conductive parts between corresponding chip carriers on a chip carrier module sheet with multiple chip carriers, and make the conductive parts electrically connect the electrical properties of adjacent chip carriers. connection points, and connect and electrically connect semiconductor chips on each chip carrier, and then carry out molding operation to form an encapsulant covering the semiconductor chip and conductive parts, and then cut along each chip carrier to separate them The conductive element on the adjacent chip carrier exposes part of the surface of the conductive element to the encapsulant, wherein the upper surface of the conductive element can directly expose the encapsulant after molding, or the encapsulant can be thinned. Exposing the upper surface of the conductive member, and then forming a nickel/gold plating layer on the surface of the conductive member exposing the packaging colloid, providing subsequent electrical connection with the outside world, and then separating each chip carrier, utilizing the conductive material of the packaging colloid exposed The components provide additional electrical contacts for subsequent stacking of the packages, or use sockets to electrically connect the packages to external devices, avoiding problems such as limiting the use of electronic products, and can also provide good electrical power for electronic products sexual function.
附图说明Description of drawings
图1A至图1H是本发明半导体封装件及其制法实施例1示意图;1A to 1H are schematic diagrams of Embodiment 1 of a semiconductor package and its manufacturing method of the present invention;
图2A至图2E是本发明的半导体封装件及其制法实施例2示意图;2A to 2E are schematic diagrams of Embodiment 2 of the semiconductor package and its manufacturing method of the present invention;
图2B’是以研磨方式去除部分封装胶体的示意图;Fig. 2B' is a schematic diagram of removing part of the encapsulation colloid by grinding;
图3是本发明半导体封装件及其制法实施例3中使用的基片模块片示意图;Fig. 3 is a schematic diagram of the substrate module used in the semiconductor package of the present invention and Embodiment 3 of its manufacturing method;
图4A至图4E是本发明半导体封装件及其制法实施例4示意图;4A to 4E are schematic diagrams of Embodiment 4 of the semiconductor package and its manufacturing method of the present invention;
图5A至图5C是本发明半导体封装件应用的示意图。5A to 5C are schematic views of the application of the semiconductor package of the present invention.
具体实施方式Detailed ways
实施例1Example 1
图1A至图1H是本发明半导体封装件及其制法实施例1的示意图。1A to 1H are schematic diagrams of Embodiment 1 of the semiconductor package and its manufacturing method of the present invention.
如图1A所示,首先,提供一具有多条芯片载体的芯片载体模块片,各该芯片载体上设有多个电性连接点,同时配合参阅图1B,它是对应图1A芯片载体模块片的剖面示意图,在本实施例中该芯片载体模块片是基片模块片100,各该芯片载体是薄型球栅阵列(TFBGA)或平面栅格阵列(LGA)基片10,各该基片10由多条横向和直向切割线(如虚线所示)划分,同时在该横向和直向的切割线处,对应基片模块片100上、下表面上形成电镀总线11,使该电镀总线11环设于该基片10上、下表面间,且该电镀总线11是延伸电性连接到基片10表面的线路结构,其中,在各该基片10的上表面设有多个如第一电性连接垫(pad)101及第二电性连接垫102,以及在该基片10下表面设有第三电性连接垫103等电性连接点,其中,该第一电性连接垫101可通过导电贯孔(via)104电性连通到该第三电性连接垫103,且该第一、第二及第三电性连接垫101、102、103可通过导电线路电性连接到该电镀总线11。该第三电性连接垫103对应薄型球栅阵列(TFBGA)或平面栅格阵列(LGA)基片是焊球垫(ball pad)或电性连接端(terminal),该第一电性连接垫101可例如是焊指(bonding finger),第二电性连接垫可例如是接触焊垫102,但是不以此为限,例如该第一电性连接垫101可以是倒装芯片焊垫(bumppad)等。As shown in Figure 1A, at first, provide a chip carrier module sheet with a plurality of chip carriers, each chip carrier is provided with a plurality of electrical connection points, refer to Figure 1B at the same time, it is the chip carrier module sheet corresponding to Figure 1A The cross-sectional schematic diagram, in this embodiment, the chip carrier module is a
如图1C所示,在该基片模块片100上对应各基片10间设置导电件12,并使该导电件12电性连接相邻基片10的第二电性连接垫102,以及在各该基片10上接置并电性连接半导体芯片13;请配合参阅图1D,它是对应图1C的剖面示意图,其中该导电件12是例如铜柱或铜球等金属,利用如焊锡等导电材料电性连接到相邻基片10的第二电性连接垫102,或该导电件12可直接使用焊球等焊锡材料,另外,该半导体芯片13以打线方式电性连接到该基片10的第一电性连接垫101。当然也可利用倒装芯片方式将半导体芯片电性连接到该基片,且该导电件的接置作业可配合置晶方式在置晶步骤前后进行。As shown in FIG. 1C , on the
如图1E所示,在该基片模块片100上形成一包覆该半导体芯片13及导电件12的封装胶体14。As shown in FIG. 1E , an
如图1F所示,沿各该基片10间切割该封装胶体14及导电件12,分离设置在相邻基片10上的导电件12,并使该导电件12侧表面露出该封装胶体14,其中该切割深度至少使该导电件12与电镀总线11仍保有电性连接关系,以在后续电镀工序中,通过该电镀总线11将镍/金沉积在该露出封装胶体的导电件12上。As shown in FIG. 1F , cut the
如图1G所示,在切割分离各该基片10上的导电件12后,由于残留在各该基片10上的导电件12,仍可通过第二电性连接垫102及导电贯孔104电性连接到该电镀总线11,因此可通过电镀方式在露出该封装胶体14的导电件12侧表面上形成例如镍/金的金属层15。As shown in FIG. 1G, after cutting and separating the
如图1H所示,之后再进行切割作业,分离各该基片10,形成可在封装胶体侧面提供多个额外电性接点的半导体封装件。As shown in FIG. 1H , a dicing operation is then performed to separate each of the
因此,通过上述制法,本发明提供一种半导体封装件,该半导体封装件包括:一例如基片10的芯片载体,该基片10上设有多个如第一、第二及第三电性连接垫101、102、103的电性连接点;至少一半导体芯片13,以打线或倒装芯片方式电性连接到该基片10;多条导电件12,接置并电性连接到该如第二电性连接垫102的电性连接点;以及一封装胶体14,形成于该基片10上,用来包覆该半导体芯片13及导电件12,并至少使该导电件12侧表面露出该封装胶体14。Therefore, through the above manufacturing method, the present invention provides a semiconductor package, which includes: a chip carrier such as a
实施例2Example 2
图2A至图2E是本发明半导体封装件及其制法实施例2的示意图,本实施例与上述实施例大致相同,因此相同元件不再描述。2A to 2E are schematic diagrams of Embodiment 2 of the semiconductor package and its manufacturing method of the present invention. This embodiment is substantially the same as the above embodiment, so the same components will not be described again.
如图2A所示,首先提供具有多条基片20的基片模块片200,各该基片20上、下表面间环设有电镀总线21,且该电镀总线21是延伸电性连接到基片20的表面线路结构,其中在各该基片20的上表面设有多个如第一电性连接垫201及第二电性连接垫202的电性连接点,以及在该基片20的下表面设有第三电性连接垫203,该第一电性连接垫201可通过导电贯孔(via)204电性连通到该第三电性连接垫203,且该第一、第二及第三电性连接垫201、202、203可通过导电线路电性连接到该电镀总线21。As shown in FIG. 2A , first provide a
接着,在该基片模块片200上对应各基片20间设置导电件22,并使该导电件22电性连接相邻基片20的第二电性连接垫202,以及在各该基片20上接置并电性连接半导体芯片23,该半导体芯片23可通过焊线电性连接到该基片。Next, on the
如图2B及2C所示,进行封装模压作业,在该基片模块片200上形成一包覆该半导体芯片23及导电件22的封装胶体24,其中该导电件22的高度大于该半导体芯片23及其上焊线的高度,在进行封装模压作业时,使该导电件22顶抵在封装模具(未标出)的模穴顶部,在完成封装模压作业后,直接使该导电件22的上表面露出该封装胶体24;也可如图2B’所示,该导电件22未顶抵于封装模具的模穴顶部,使封装胶体24先覆盖该导电件22,再对该封装胶体24进行如研磨的薄化作业,使该封装胶体24的上表面与该导电件22的上表面齐平,从而使该导电件22上表面露出该封装胶体24。同时沿各该基片20间进行切割,切割该封装胶体24及导电件22,分离设置在相邻基片20上的导电件22,并使该导电件22侧表面露出该封装胶体24,其中该切割深度至少使该导电件22与电镀总线21仍保持电性连接关系,在后续电镀工序中,通过该电镀总线21将镍/金沉积在该露出封装胶体的导电件22上。As shown in FIGS. 2B and 2C, the encapsulation and molding operation is performed to form an
如图2D所示,通过电镀总线21利用电镀方式在露出该封装胶体24的导电件22侧表面及上表面上形成例如镍/金的金属层25。As shown in FIG. 2D , a metal layer 25 such as nickel/gold is formed on the side surface and the upper surface of the
如图2E所示,之后再进行切割作业,分离各该基片20,形成可在封装胶体侧面及顶面提供多个额外电性接点的半导体封装件。As shown in FIG. 2E , a dicing operation is then performed to separate each of the
实施例3Example 3
图3是本发明半导体封装件及其制法实施例3中使用的基片模块片示意图。FIG. 3 is a schematic diagram of a substrate module used in Embodiment 3 of the semiconductor package and its manufacturing method of the present invention.
如图所示,本实施例与上述实施例大致相同,主要差异在于该基片模块片300具有多个基片30,各该基片30的上、下表面间环设有电镀总线31,且各该基片30的上表面设有多个如第一电性连接垫301及第二电性连接垫302的电性连接点,其中该相邻基片30间的第二电性连接垫302连在一起,且该第一、第二电性连接垫301、302电性连接到该电镀总线31。As shown in the figure, this embodiment is substantially the same as the above-mentioned embodiment, the main difference is that the
后续可利用如上述实施例的方法,将导电件接置并电性连接到相邻基片间的第二电性连接垫上,以及进行置晶、形成覆盖芯片及导电件的封装胶体、切割分离各基片间的封装胶体与导电件、在露出封装胶体的导电件上电镀金属层以及分离各基片等工序,形成可提供多个露出封装胶体电性接点的半导体封装件。Subsequent methods such as the above-mentioned embodiments can be used to connect and electrically connect the conductive elements to the second electrical connection pads between adjacent substrates, and carry out chip placement, formation of encapsulant covering the chip and the conductive elements, and cutting and separation. The encapsulation compound and conductive parts between the substrates, the electroplating metal layer on the conductive parts exposing the encapsulation colloid, and the separation of the substrates form a semiconductor package that can provide multiple electrical contacts exposed to the encapsulation colloid.
实施例4Example 4
图4A至图4E是本发明半导体封装件及其制法实施例4的示意图。本实施例的半导体封装件与制法与上述实施例大致相同,主要差异在在本实施例中使用导线架作为芯片载体。4A to 4E are schematic diagrams of Embodiment 4 of the semiconductor package and its manufacturing method of the present invention. The semiconductor package and the manufacturing method of this embodiment are substantially the same as those of the above embodiments, the main difference is that the lead frame is used as the chip carrier in this embodiment.
如图4A所示,首先,提供一具有多条导线架40的导线架模块片400,各该导线架40具有芯片座401以及环设在该芯片座401周围多条如管脚402的电性连接点,其中该导线架40可例如是QFN导线架,且各该导线架40以连接总线(connecting bus)41相接。As shown in FIG. 4A , at first, a lead
如图4B所示,在该导线架模块片上对应于相邻导线架40的管脚402间设置导电件42,并使该导电件42电性连接相邻导线架40的管脚402,以及在各该导线架40的芯片座401上接置半导体芯片43,并使该半导体芯片43通过多条焊线电性连接到该管脚402。接着,可在该导线架模块片上形成一包覆该半导体芯片43及导电件42,且使该导电件42上表面露出封装胶体44。As shown in FIG. 4B, a
如图4C所示,切割分离相邻导线架40上的封装胶体44及导电件42,使该导电件42侧表面露出该封装胶体44;其中,在切割该封装胶体44及导电件42时,该切割深度至少使该导电件42与该连接总线41仍保持电性连接关系。As shown in FIG. 4C, the
如图4D所示,通过连接各该导线架40管脚402的连接总线41,以电镀方式在露出该封装胶体44的导电件42侧表面及上表面上形成例如镍/金的金属层45。As shown in FIG. 4D , through the
如图4E所示,之后再进行切割作业,分离各该导线架40,形成可在封装胶体侧表面及上表面提供多个额外电性接点的半导体封装件。As shown in FIG. 4E , dicing is then performed to separate the lead frames 40 to form a semiconductor package that can provide multiple additional electrical contacts on the side surface and the upper surface of the encapsulant.
图5A至图5C是本发明半导体封装件应用的示意图;如图5A所示,本发明的半导体封装件5a可利用露出封装胶体54的导电件52表面作为电性接点,与插座(socket)接触端56电性连接,提供可装载于插座的CCM封装结构;如图5B及图5C所示,本发明的半导体封装件5b、5c也可利用露出封装胶体54的导电件52表面作为电性接点,在其上电性堆栈第二半导体封装件57、58,其中该第二半导体封装件57、58可以是球栅阵列半导体封装件(如图5B所示)或导线架半导体封装件(如图5C所示)。5A to 5C are schematic diagrams of the application of the semiconductor package of the present invention; as shown in FIG. 5A, the
综上所述,本发明的半导体封装件及其制法是在具有多条芯片载体的芯片载体模块片上,对应各芯片载体间设置导电件,并使该导电件电性连接相邻芯片载体的电性连接点,且在各该芯片载体上接置并电性连接半导体芯片,再进行模压作业,形成一包覆该半导体芯片及导电件的封装胶体,接着沿各该芯片载体间进行切割,分离设置在相邻芯片载体上的导电件,使该导电件的部分表面露出该封装胶体,其中,该导电件上表面可在模压后直接露出该封装胶体,也可将该封装胶体进行薄化作业,露出该导电件的上表面,接着在露出该封装胶体的导电件表面形成一如镍/金电镀层,提供后续与外界的电性连接,然后再分离各该芯片载体,利用露出该封装胶体的导电件提供额外的电性接点,供后续能够进行封装件的堆栈,或利用插座(socket)将封装件电性连接到外部装置,避免限制电子产品的使用等问题,同时也可使电子产品具有良好的电性功能。To sum up, the semiconductor package of the present invention and its manufacturing method are to arrange conductive parts between corresponding chip carriers on the chip carrier module sheet with multiple chip carriers, and make the conductive parts electrically connect adjacent chip carriers. electrical connection points, and place and electrically connect semiconductor chips on each of the chip carriers, and then carry out molding operations to form an encapsulation compound covering the semiconductor chips and conductive parts, and then cut along each of the chip carriers, Separating the conductive element arranged on the adjacent chip carrier, so that part of the surface of the conductive element exposes the encapsulation compound, wherein, the upper surface of the conductive element can directly expose the encapsulation compound after molding, or the encapsulation compound can be thinned operation, exposing the upper surface of the conductive member, and then forming a nickel/gold plating layer on the surface of the conductive member exposing the packaging colloid, providing subsequent electrical connection with the outside world, and then separating the chip carriers, using the exposed package The conductive parts of the colloid provide additional electrical contacts for subsequent stacking of packages, or use sockets (sockets) to electrically connect the packages to external devices, avoiding problems such as limiting the use of electronic products, and at the same time enabling electronic The product has good electrical function.
Claims (21)
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102664170A (en) * | 2012-04-19 | 2012-09-12 | 日月光半导体制造股份有限公司 | Semiconductor package structure and manufacturing method thereof |
| CN104392968A (en) * | 2008-11-21 | 2015-03-04 | 先进封装技术私人有限公司 | Semiconductor substrate |
| CN104505351A (en) * | 2014-12-30 | 2015-04-08 | 中国科学院微电子研究所 | A method for preparing a stacked packaging structure with lateral interconnection |
| CN105513976A (en) * | 2015-12-02 | 2016-04-20 | 上海凯虹电子有限公司 | Semiconductor packaging method, packaging body and packaging unit |
| CN110349857A (en) * | 2019-08-01 | 2019-10-18 | 合肥矽迈微电子科技有限公司 | Side wall reveals copper encapsulating structure and its manufacture craft |
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2006
- 2006-06-12 CN CNA2006100918502A patent/CN101090077A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104392968A (en) * | 2008-11-21 | 2015-03-04 | 先进封装技术私人有限公司 | Semiconductor substrate |
| US9847268B2 (en) | 2008-11-21 | 2017-12-19 | Advanpack Solutions Pte. Ltd. | Semiconductor package and manufacturing method thereof |
| CN102664170A (en) * | 2012-04-19 | 2012-09-12 | 日月光半导体制造股份有限公司 | Semiconductor package structure and manufacturing method thereof |
| CN102664170B (en) * | 2012-04-19 | 2015-06-17 | 日月光半导体制造股份有限公司 | Semiconductor package structure and manufacturing method thereof |
| CN104505351A (en) * | 2014-12-30 | 2015-04-08 | 中国科学院微电子研究所 | A method for preparing a stacked packaging structure with lateral interconnection |
| CN105513976A (en) * | 2015-12-02 | 2016-04-20 | 上海凯虹电子有限公司 | Semiconductor packaging method, packaging body and packaging unit |
| CN105513976B (en) * | 2015-12-02 | 2018-04-17 | 上海凯虹电子有限公司 | Method for packaging semiconductor, packaging body and encapsulation unit |
| CN110349857A (en) * | 2019-08-01 | 2019-10-18 | 合肥矽迈微电子科技有限公司 | Side wall reveals copper encapsulating structure and its manufacture craft |
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