CN101442012B - Small window mould sealing cutting method and formed packaging structure - Google Patents
Small window mould sealing cutting method and formed packaging structure Download PDFInfo
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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Abstract
Description
技术领域technical field
本发明涉及窗口型半导体封装构造的制造技术中的单体化切割技术,特别是涉及一种小窗口模封切割方法及形成的封装构造。The invention relates to a singulation cutting technology in the manufacturing technology of a window-type semiconductor packaging structure, in particular to a small window molding and cutting method and the formed packaging structure.
背景技术Background technique
窗口型球格阵列封装构造(Window BGA)或称微间距球格阵列(fine-pitch ball grid array,FBGA)封装构造为近年来半导体晶片封装产品的主流,其是以一具有窗口的电路基板承载晶片,并以多个金属焊线穿过窗口以电性连接电路基板与晶片。以一封胶体(encapulant)提供半导体晶片与焊线的保护。但在基板的下表面必须形成围绕窗口的局部模封区,若处理不当容易发生压模溢料(molding flash)的问题。但以往窗口型球格阵列封装构造中设在基板的窗口仅为单一且为狭长的中央槽孔,模封区与外接垫之间尚留有一间距,压模溢料尚可获得控制。然在新一代的窗口型半导体封装构造中基板的侧边与角隅会设有多个小窗口,以提高电性密度与符合端子微间距的需求,但这样会导致压模溢料问题更容易发生,又模封区与外接垫之间的间距更小,压模溢料将会影响电性连接品质。Window BGA packaging structure (Window BGA) or fine-pitch ball grid array (FBGA) packaging structure has become the mainstream of semiconductor chip packaging products in recent years. It is carried by a circuit substrate with a window. chip, and a plurality of metal bonding wires pass through the window to electrically connect the circuit substrate and the chip. Provide protection for semiconductor chips and bonding wires with an encapulant. However, a partial molding area surrounding the window must be formed on the lower surface of the substrate. If not handled properly, the problem of molding flash may easily occur. However, in the conventional window-type BGA package structure, the window set on the substrate is only a single and narrow central slot, and there is still a gap between the molding area and the external pads, and the mold flash can still be controlled. However, in the new generation of window-type semiconductor package structures, multiple small windows will be provided on the sides and corners of the substrate to increase the electrical density and meet the needs of fine pitch terminals, but this will make the problem of mold flashing easier Occurs, and the distance between the molding area and the external pad is smaller, and the molding flash will affect the quality of the electrical connection.
如图1所示,现有具有小窗口的半导体封装构造100,主要包含有一基板单元110、一晶片120、多个电性连接元件130以及一封胶体140。该基板单元110是由一基板条切割形成,该基板单元110具有一粘晶表面111、一外接表面112以及多个贯穿该基板单元110的小窗口113。如图2所示,该些小窗口113形成于该基板单元110的侧边或角隅,并且该外接表面112包含有多个窗口模封区114,其围绕该些小窗口113但不延伸至该基板单元110的对应侧边与角隅。该基板单元110更具有一中央槽孔115,其形成于该基板单元110的中央区域,并且该外接表面112包含有一下模封区117,其围绕该中央槽孔115。此外,如图1所示,该基板单元110更具有多个形成于该外接表面112的外接垫116,可用于设置多个外接端子150,常见为焊球。As shown in FIG. 1 , an existing
再如图1所示,借由一粘晶胶160的粘贴,该晶片120设置于该基板单元110的该粘晶表面111,并具有多个位于主动面的焊垫121。现有利用打线形成的该些电性连接元件130形成于该些小窗口113及该中央槽孔115内,利用该些电性连接元件130通过该些小窗口113及该中央槽孔115,以将该晶片120的该些焊垫121电性连接至该基板单元110。该封胶体140形成于该基板单元110的黏晶表面111与外接表面112,以密封该晶片120及该些电性连接元件130。在该外接表面112的模封面积必须尽量控制在该些窗口模封区114与该下模封区117之内。现有地,由于该些小窗口113的数量众多,超过该些窗口模封区114的模封溢胶极容易污染到该些外接垫116,导致该些外接端子150无法顺利接合到所有的该些外接垫116。此外,在进行基板条切单作业时易使基板单元侧边或角隅的线路及防焊层发生剥离分层的现象,影响封装产品的品质与可靠性。As shown in FIG. 1 , by sticking a die-
再者,当现有窗口型半导体封装制程中已完成黏晶及打线作业之后,在进行模压制程时,下模具必须依据该基板单元110的该中央槽孔115与该些小窗口113位置进行设计而开设有对应的下模穴,因而,当该基板单元110的小窗口数量愈多,将使得下模具的设计将更为复杂,成本更高且模封溢胶的问题越显严重。Furthermore, after the die-bonding and wire-bonding operations have been completed in the existing window-type semiconductor packaging process, the lower mold must be designed according to the positions of the
发明内容Contents of the invention
本发明的主要目的在于,克服现有技术存在的缺陷,而提供一种小窗口模封切割方法及形成的封装构造,所要解决的技术问题是使其除了可以减少位于基板单元侧边或角隅的小窗口发生模封溢胶的机率,更可在进行基板条切单作业时,可减少基板单元的线路及防焊层发生剥离分层的现象,借此提高封装产品的品质与可靠性,非常适于实用。The main purpose of the present invention is to overcome the defects in the prior art, and provide a small window molding and cutting method and the formed packaging structure. The probability of mold overflow in the small window can be reduced, and the peeling and delamination of the circuit and solder mask layer of the substrate unit can be reduced when the substrate strip is cut, thereby improving the quality and reliability of the packaged product. Very practical.
本发明的另一目的在于,克服现有技术存在的缺陷,而提供一种新的小窗口模封切割方法及形成的封装构造,所要解决的技术问题是使其可以简化压模下模具的设计,降低封装治具的成本,从而更加适于实用。Another object of the present invention is to overcome the defects in the prior art, and provide a new small window molding and cutting method and the formed packaging structure. The technical problem to be solved is to simplify the design of the mold under the die , to reduce the cost of packaging fixtures, so that it is more suitable for practical use.
本发明的还一目的在于,克服现有技术存在的缺陷,而提供一种小窗口模封切割方法,所要解决的技术问题是使其可以控制与改变可能模封溢胶的区域到基板条的切割道,以提高制程良率,从而更加适于实用。Another object of the present invention is to overcome the defects in the prior art and provide a method for molding and cutting small windows. The technical problem to be solved is to make it possible to control and change the distance between the area of possible mold overflow and the substrate strip. The dicing line is used to improve the yield rate of the process, so that it is more suitable for practical use.
本发明的目的及解决其技术问题是采用以下技术方案来实现的。依据本发明提出的一种小窗口模封切割方法,其包含:提供一基板条,包含有多个基板单元以及多个形成在该些基板单元之间的切割道,该基板条具有一粘晶表面、一外接表面以及多个贯穿该基板条的小窗口,该些小窗口形成于该些基板单元的侧边或角隅,并且该外接表面包含有多个窗口模封区,其围绕该些小窗口并延伸至该些基板单元的侧边或角隅,其中在基板条的外接表面形成有一溢胶槽道,其对准于切割道内并穿过上述窗口模封区;设置多个晶片于该基板条的该粘晶表面,上述晶片位于上述基板单元内而不覆盖至上述切割道;形成多个电性连接元件于上述小窗口内,以电性连接上述晶片至该基板条;形成一封胶体于该基板条的上述窗口模封区,以密封上述电性连接元件更延伸至上述切割道;以及沿着上述切割道切割该基板条以及该封胶体在上述窗口模封区的部分,以使上述基板单元分离。The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions. A small window molding and cutting method proposed according to the present invention, which includes: providing a substrate strip, including a plurality of substrate units and a plurality of dicing lines formed between the substrate units, the substrate strip has a die-bonding surface, an external surface and a plurality of small windows through the substrate strip, the small windows are formed on the sides or corners of the substrate units, and the external surface includes a plurality of window molding areas surrounding the small windows And extend to the side or corner of these substrate units, wherein a glue overflow channel is formed on the outer surface of the substrate strip, which is aligned in the cutting line and passes through the above-mentioned window molding area; a plurality of chips are arranged on the substrate On the sticking surface of the strip, the above-mentioned chip is located in the above-mentioned substrate unit and does not cover the above-mentioned dicing line; a plurality of electrical connection elements are formed in the above-mentioned small window to electrically connect the above-mentioned chip to the substrate strip; form a colloid In the above-mentioned window molding area of the substrate strip, to seal the above-mentioned electrical connection element and further extend to the above-mentioned cutting line; and cutting the substrate strip and the part of the sealant in the above-mentioned window molding area along the above-mentioned cutting line, so that The above-mentioned substrate unit is separated.
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
前述的小窗口模封切割方法,其中每一窗口模封区围绕至少两个相邻近于侧边的小窗口并包含位于上述小窗口之间的切割道部位。In the aforementioned small window molding and cutting method, each window molding area surrounds at least two small windows adjacent to the sides and includes a cutting line between the small windows.
前述的小窗口模封切割方法,其中每一窗口模封区围绕至少四个相邻近于角隅的小窗口并包含位于上述小窗口之间的切割道交错部位。In the aforementioned small window molding and cutting method, each window molding area surrounds at least four small windows adjacent to the corners and includes intersections of cutting lines between the small windows.
前述的小窗口模封切割方法,其中在相邻基板单元且同一窗口模封区内的小窗口为连通。In the aforementioned small window molding and cutting method, the small windows in adjacent substrate units and in the same window molding area are connected.
前述的小窗口模封切割方法,其中所述的晶片具有多个焊垫,其对准于上述小窗口内,以供上述电性连接元件的连接。In the aforementioned small window molding and cutting method, wherein the wafer has a plurality of pads aligned in the small window for connection of the electrical connection elements.
前述的小窗口模封切割方法,其中所述的晶片在该基板条上的设置面积不小于对应基板单元的粘晶表面面积百分之七十,以供制成晶片尺寸封装构造。In the aforementioned small window molding and cutting method, the area of the chip on the substrate strip is not less than 70% of the bonding surface area of the corresponding substrate unit, so as to form a chip size package structure.
前述的小窗口模封切割方法,其中所述的电性连接元件包含多个焊线。In the aforementioned small window molding and cutting method, wherein the electrical connection element includes a plurality of welding wires.
前述的小窗口模封切割方法,其中所述的基板条更具有多个贯穿该基板条的中央槽孔,其形成于上述基板单元的中央区域。In the aforementioned small window molding and cutting method, the substrate strip further has a plurality of central slots passing through the substrate strip, which are formed in the central area of the substrate unit.
前述的小窗口模封切割方法,其中所述的封胶体更形成于该基板条的上述中央槽孔。In the aforementioned small window molding and cutting method, wherein the encapsulant is further formed in the central slot of the substrate strip.
前述的小窗口模封切割方法,其中所述的封胶体更形成于该基板条的该粘晶表面,以密封上述晶片的至少一部分。In the aforementioned small window molding and cutting method, the encapsulant is further formed on the die-bonding surface of the substrate strip to seal at least a part of the chip.
前述的小窗口模封切割方法,其中所述的基板条更具有多个形成于该外接表面的外接垫。In the aforementioned small window molding and cutting method, the substrate strip further has a plurality of external pads formed on the external surface.
前述的小窗口模封切割方法,其包含的步骤有:设置多个外接端子于上述外接垫。The aforementioned small window molding and cutting method includes the steps of: arranging a plurality of external terminals on the above-mentioned external pads.
本发明的目的及解决其技术问题还采用以下技术方案来实现。依据本发明提出的一种小窗口模封切割方法所形成的封装构造,其包含:一基板单元,由一基板条切割形成,该基板单元具有一粘晶表面、一外接表面以及多个贯穿该基板单元的小窗口,上述小窗口形成于该基板单元的侧边或角隅,并且该外接表面包含有多个窗口模封区,其围绕上述小窗口并延伸至该基板单元的侧边或角隅;一晶片,设置于该粘晶表面,该晶片位于该基板单元内而不覆盖至该基板单元的侧边或角隅;多个电性连接元件,形成于上述小窗口内,以电性连接上述晶片至该基板单元;以及一封胶体,形成于该基板单元的上述窗口模封区,以密封上述电性连接元件,该封胶体具有一突出于该外接表面的第一切割侧面,其切齐于该基板单元的侧边或角隅,其中在基板条的外接表面形成有一溢胶槽道,其对准于切割道内并穿过上述窗口模封区。The purpose of the present invention and the solution to its technical problem also adopt the following technical solutions to achieve. According to the packaging structure formed by a small window molding and cutting method proposed in the present invention, it includes: a substrate unit, which is formed by cutting a substrate strip, and the substrate unit has a die-bonding surface, an external surface, and a plurality of The small window of the substrate unit, the above-mentioned small window is formed on the side or corner of the substrate unit, and the external surface includes a plurality of window molding areas, which surround the above-mentioned small window and extend to the side or corner of the substrate unit Corner; a chip is arranged on the bonding surface, and the chip is located in the substrate unit and does not cover the side or corner of the substrate unit; a plurality of electrical connection elements are formed in the above-mentioned small window to electrically connecting the above-mentioned chip to the substrate unit; and an encapsulation body formed on the above-mentioned window molding area of the substrate unit to seal the above-mentioned electrical connection element, the encapsulation body has a first cutting side protruding from the outer surface, and The edge or corner of the substrate unit is aligned, wherein a glue overflow channel is formed on the outer surface of the substrate strip, which is aligned in the cutting line and passes through the above-mentioned window molding area.
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
前述的小窗口模封切割方法所形成的封装构造,其中所述的小窗口连通至该基板单元的侧边或角隅。In the packaging structure formed by the aforementioned small window molding and cutting method, the small window is connected to the side or corner of the substrate unit.
前述的小窗口模封切割方法所形成的封装构造,其中所述的晶片具有多个焊垫,其对准于上述小窗口内,以供上述电性连接元件的连接。In the packaging structure formed by the aforementioned small window molding and cutting method, the chip has a plurality of pads aligned in the small window for the connection of the electrical connection elements.
前述的小窗口模封切割方法所形成的封装构造,其中所述的晶片在该基板单元上的设置面积不小于该基板单元的粘晶表面面积百分之七十,以构成一晶片尺寸封装构造。The packaging structure formed by the aforementioned small window molding and cutting method, wherein the area where the chip is placed on the substrate unit is not less than 70% of the bonding surface area of the substrate unit, so as to form a chip size packaging structure .
前述的小窗口模封切割方法所形成的封装构造,其中所述的电性连接元件包含多个焊线。In the packaging structure formed by the aforementioned small window molding and cutting method, the electrical connection elements include a plurality of welding wires.
前述的小窗口模封切割方法所形成的封装构造,其中所述的基板单元更具有一中央槽孔,其形成于该基板单元的中央区域。In the packaging structure formed by the aforementioned small window molding and cutting method, the substrate unit further has a central slot formed in the central area of the substrate unit.
前述的小窗口模封切割方法所形成的封装构造,其中所述的封胶体更形成于该基板单元的该中央槽孔。In the packaging structure formed by the aforementioned small window molding and cutting method, the encapsulant is further formed in the central slot of the substrate unit.
前述的小窗口模封切割方法所形成的封装构造,其中所述的封胶体更形成于该基板单元的该粘晶表面,以密封该晶片的至少一部分。In the package structure formed by the aforementioned small window molding and cutting method, the encapsulant is further formed on the die-bonding surface of the substrate unit to seal at least a part of the chip.
前述的小窗口模封切割方法所形成的封装构造,其中所述的封胶体具有一连接该粘晶表面的第二切割侧面,其切齐于该基板单元的侧边或角隅。In the packaging structure formed by the aforementioned small window molding and cutting method, the encapsulant has a second cutting side connected to the die-bonding surface, which is aligned with the side or corner of the substrate unit.
前述的小窗口模封切割方法所形成的封装构造,其中所述的基板单元更具有多个形成于该外接表面的外接垫。In the packaging structure formed by the aforementioned small window molding and cutting method, the substrate unit further has a plurality of external pads formed on the external surface.
前述的小窗口模封切割方法所形成的封装构造,其另包含有多个外接端子,设置于上述外接垫。The packaging structure formed by the aforementioned small window molding and cutting method further includes a plurality of external terminals disposed on the external pads.
本发明与现有技术相比具有明显的优点和有益效果。由以上技术方案可知,本发明的主要技术内容如下:Compared with the prior art, the present invention has obvious advantages and beneficial effects. As can be seen from above technical scheme, main technical content of the present invention is as follows:
依据本发明的一种小窗口模封切割方法,包含提供一基板条,包含有多个基板单元以及多个形成在该些基板单元之间的切割道,该基板条具有一粘晶表面、一外接表面以及多个贯穿该基板条的小窗口,该些小窗口形成于该些基板单元的侧边或角隅,并且该外接表面包含有多个窗口模封区,其围绕该些小窗口并延伸至该些切割道。之后,设置多个晶片于该基板条的该粘晶表面,该些晶片位于该些基板单元内而不覆盖至该些切割道。接着,形成多个电性连接元件于该些小窗口内,以电性连接该些晶片至该基板条。然后,形成一封胶体于该基板条的该些窗口模封区,以密封该些电性连接元件更延伸至该些切割道。最后,沿着该些切割道切割该基板条以及该封胶体在该些窗口模封区处的部分,以使该些基板单元分离。另揭示依前述方法所形成的封装构造。A method for molding and cutting a small window according to the present invention includes providing a substrate strip comprising a plurality of substrate units and a plurality of dicing lines formed between the substrate units, the substrate strip has a die-bonding surface, a The external surface and a plurality of small windows passing through the substrate strip, the small windows are formed on the sides or corners of the substrate units, and the external surface includes a plurality of window molding areas, which surround the small windows and extend to The cuts. Afterwards, a plurality of wafers are arranged on the die-bonding surface of the substrate strip, and the wafers are located in the substrate units without covering the dicing lines. Then, forming a plurality of electrical connection elements in the small windows to electrically connect the chips to the substrate strip. Then, an encapsulant is formed on the window molding areas of the substrate strip to seal the electrical connection elements extending to the cutting lines. Finally, the substrate strip and the portion of the encapsulant at the window molding regions are cut along the cutting lines to separate the substrate units. Also disclosed is the packaging structure formed according to the aforementioned method.
借由上述技术方案,本发明小窗口模封切割方法及形成的封装构造至少具有下列优点及有益效果:With the above technical solution, the small window molding and cutting method and the formed packaging structure of the present invention have at least the following advantages and beneficial effects:
1、本发明除了可以减少位于基板单元侧边或角隅的小窗口发生模封溢胶的机率,更可在进行基板条切单作业时,可减少基板单元的线路及防焊层发生剥离分层的现象,借此提高封装产品的品质与可靠性。1. The present invention can not only reduce the probability of mold glue spillage in the small window located on the side or corner of the substrate unit, but also reduce the peeling and separation of the circuit and solder mask layer of the substrate unit during the substrate strip cutting operation. Layer phenomenon, thereby improving the quality and reliability of packaged products.
2、本发明可以简化压模下模具的设计,降低封装治具的成本。2. The present invention can simplify the design of the lower mold of the compression mold and reduce the cost of packaging fixtures.
3、本发明可以控制与改变可能模封溢胶的区域到基板条的切割道,以提高制程良率。3. The present invention can control and change the cutting line from the area where the molding glue may overflow to the substrate strip, so as to improve the process yield.
4、本发明可以减少基板切割侧面的外露面积,以提高半导体封装构造的侧边抗湿性。4. The present invention can reduce the exposed area of the cutting side of the substrate, so as to improve the moisture resistance of the side of the semiconductor packaging structure.
综上所述,本发明揭示一种小窗口模封切割方法及形成的封装构造。依据该方法,一基板条具有多个在侧边或角隅的小窗口,并且该基板条的一外接表面包含有多个窗口模封区,其围绕该些小窗口并延伸至切割道。多个晶片设置于该基板条上,并形成多个电性连接元件于该些小窗口内。之后,形成一封胶体于该基板条的该些窗口模封区上及该些小窗口内,以密封该些电性连接元件更延伸至该些切割道。在单体化分离时,同时切割到该封胶体在该些窗口模封区处的部分。因此,可有效降低该些小窗口周边发生溢胶的问题,并借由增加封胶体对基板条的结合面积可防止基板单元的线路及防焊层发生剥离。本发明具有上述诸多优点及实用价值,其不论在产品结构、方法或功能上皆有较大的改进,在技术上有显著的进步,并产生了好用及实用的效果,且较现有技术具有增进的突出功效,从而更加适于实用。To sum up, the present invention discloses a small window molding and cutting method and the formed packaging structure. According to the method, a substrate strip has a plurality of small windows on the sides or corners, and an outer surface of the substrate strip includes a plurality of window molding areas surrounding the small windows and extending to the scribe line. A plurality of chips are arranged on the substrate strip, and a plurality of electrical connection elements are formed in the small windows. Afterwards, an encapsulant is formed on the window molding areas of the substrate strip and in the small windows to seal the electrical connection elements and extend to the cutting lines. When singulating and separating, the part of the sealant at the window molding areas is cut at the same time. Therefore, the problem of glue overflowing around the small windows can be effectively reduced, and the peeling of the circuit and the solder resist layer of the substrate unit can be prevented by increasing the bonding area of the sealant to the substrate strip. The present invention has the above-mentioned many advantages and practical value, and it has great improvement no matter in product structure, method or function, has significant progress in technology, and has produced easy-to-use and practical effects, and is superior to the prior art It has enhanced outstanding efficacy, and thus is more suitable for practical use.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其他目的、特征和优点能够更明显易懂,以下特举较佳实施例,并配合附图,详细说明如下。The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the following preferred embodiments are specifically cited below, and are described in detail as follows in conjunction with the accompanying drawings.
附图说明Description of drawings
图1:一种现有球格阵列封装构造的截面示意图。Figure 1: A schematic cross-sectional view of a conventional BGA package structure.
图2:现有球格阵列封装构造的基板单元外接表面的示意图。Figure 2: Schematic diagram of the external surface of the substrate unit of the conventional ball grid array package structure.
图3:依据本发明的第一具体实施例,一种半导体封装构造所使用的基板条的外接表面以及其中一基板单元的局部放大的示意图。FIG. 3 is a partially enlarged schematic view of the external surface of a substrate strip and one of the substrate units used in a semiconductor package structure according to the first embodiment of the present invention.
图4A至图4F:依据本发明的第一具体实施例,该基板条在该半导体封装构造的制造方法中的局部截面示意图。4A to 4F : according to the first embodiment of the present invention, the partial cross-sectional views of the substrate bar in the manufacturing method of the semiconductor package structure.
图5:依据本发明的第一具体实施例,在模封后该基板单元的外接表面的示意图。Fig. 5: A schematic diagram of the external surface of the substrate unit after molding according to the first embodiment of the present invention.
图6:依据本发明的第一具体实施例,该半导体封装构造的截面示意图。FIG. 6 is a schematic cross-sectional view of the semiconductor package structure according to the first embodiment of the present invention.
图7:依据本发明的第二具体实施例,另一种半导体封装构造所使用的基板单元的外接表面的示意图。FIG. 7 is a schematic diagram of an external surface of a substrate unit used in another semiconductor package structure according to the second embodiment of the present invention.
图8:依据本发明的第二具体实施例,该半导体封装构造的截面示意图。FIG. 8 is a schematic cross-sectional view of the semiconductor package structure according to the second embodiment of the present invention.
20:基板条 21:切割道20: Substrate strip 21: Cutting lane
30:基板条 31:切割道30: Substrate Strip 31: Cutting Road
32:溢胶槽道 40:切割工具32: Glue overflow channel 40: Cutting tool
100:半导体封装构造 110:基板单元100: Semiconductor package structure 110: Substrate unit
111:黏晶表面 112:外接表面111: sticky crystal surface 112: external surface
113:小窗口 114:窗口模封区113: Small window 114: Window molding area
115:中央槽孔 116:外接垫115: central slot 116: outer pad
117:下模封区 120:晶片117: Lower mold sealing area 120: Wafer
121:焊垫 130:电性连接元件121: Welding pad 130: Electrical connection components
140:封胶体 150:外接端子140: Sealing body 150: External terminal
160:粘晶胶 200:半导体封装构造160: Crystal adhesive 200: Semiconductor packaging structure
210:基板单元 211:黏晶表面210: substrate unit 211: sticky crystal surface
212:外接表面 213:小窗口212: external surface 213: small window
214:窗口模封区 215:中央槽孔214: Window molding area 215: Central slot
216:外接垫 217:下模封区216: External pad 217: Lower mold sealing area
220:晶片 221:焊垫220: Chip 221: Welding pad
230:电性连接元件 240:封胶体230: Electrical connection components 240: Sealant
241:窗口模封部 242:第一切割侧面241: Window molding part 242: First cutting side
243:第二切割侧面 250:外接端子243: Second cut side 250: External terminal
260:粘晶胶 300:半导体封装构造260: Crystal adhesive 300: Semiconductor packaging structure
310:基板单元 311:黏晶表面310: substrate unit 311: sticky crystal surface
312:外接表面 313:小窗口312: external surface 313: small window
314:窗口模封区 315:中央槽孔314: Window molding area 315: Central slot
316:外接垫 317:下模封区316: External pad 317: Lower mold sealing area
320:晶片 321:焊垫320: Chip 321: Welding pad
330:电性连接元件 340:封胶体330: Electrical connection components 340: Sealant
341:窗口模封部 342:第一切割侧面341: Window molding part 342: First cutting side
343:第二切割侧面 350:外接端子343: Second cut side 350: External terminal
具体实施方式Detailed ways
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及较佳实施例,对依据本发明提出的小窗口模封切割方法及形成的封装构造其具体实施方式、结构、方法、步骤、特征及其功效,详细说明如后。In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation of the small window molding and cutting method and the packaging structure formed according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. , structure, method, step, feature and effect thereof, detailed description is as follows.
依据本发明的第一具体实施例,提供一种小窗口模封切割方法及形成的封装构造。According to the first embodiment of the present invention, a small window molding and cutting method and the resulting packaging structure are provided.
图3为一种半导体封装构造所使用的基板条的外接表面以及其中一基板单元的局部放大的示意图。图4A至图4F为该基板条在该半导体封装构造的制造方法中的局部截面示意图。首先,如图3及图4A所示,该小窗口模封切割方法包含提供一基板条20,其包含有多个基板单元210以及多个形成在该些基板单元210之间的切割道21。通常该些基板单元210可为记忆卡、球格阵列封装(BGA)或是平面阵列封装(LGA)的晶片载板。该基板条20具有一粘晶表面211、一外接表面212以及多个贯穿该基板条20的小窗口213。该些小窗口213形成于该些基板单元210的侧边或角隅,并由该黏晶表面211连通至该外接表面212,并且该外接表面212包含有多个窗口模封区214,其围绕该些小窗口213并延伸至该些切割道21。FIG. 3 is a partially enlarged schematic view of an external surface of a substrate strip used in a semiconductor package structure and a substrate unit. 4A to 4F are partial cross-sectional schematic views of the substrate strip in the manufacturing method of the semiconductor package structure. First, as shown in FIG. 3 and FIG. 4A , the small window molding and cutting method includes providing a
此外,该基板条20更可具有多个形成于该外接表面212的外接垫216,以供接合该些外接端子250(如图6所示)。在本实施例中,该基板条20更可具有多个贯穿该基板条20的中央槽孔215,其形成于该些基板单元210的中央区域。并且该外接表面212包含有多个下模封区217,其围绕该些中央槽孔215。在本实施例中,相邻基板单元210的下模封区217可相互连接。In addition, the
之后,如图4B所示,设置多个晶片220于该基板条20的该粘晶表面211,该些晶片220位于该些基板单元210内而不覆盖至该些切割道21,并具有多个位于该主动面的焊垫221,通常是排列在晶片主动面的周边,亦可同时排列在晶片主动面的周边与中央。例如可利用一如B阶(B-stage)印刷胶层或是PI(polyimide,聚亚酰胺)胶带的粘晶胶260的黏着,而将该晶片220的主动面贴附于该基板条20的该粘晶表面211。其中,该些焊垫221对准于该些小窗口214与该中央槽孔215,以便于进行后续的电性连接。并且,较佳地,该些晶片220在该基板条20上的设置面积可不小于对应基板单元210的该粘晶表面211面积百分之七十,以供制成晶片尺寸封装构造。Afterwards, as shown in FIG. 4B, a plurality of
之后,如图4C所示,形成多个电性连接元件230于该些小窗口213内,甚至于部分的该些电性连接元件230可形成于该些中央槽孔215内。该些电性连接元件230通过该些小窗口213以及该些中央槽孔215,以将该些晶片220的该些焊垫221电性连接至该基板条20。在本实例中,该些电性连接元件230为打线形成的焊线。After that, as shown in FIG. 4C , a plurality of
之后,如图4D所示,形成一封胶体240于该基板条20的该些窗口模封区214内(如图3所示),以密封该些电性连接元件230。在本实施例中,该封胶体240更形成于该些下模封区217内并覆盖该些晶片220的背面,以密封其余的该些电性连接元件230以及该些晶片220。因此,如图5所示,该封胶体240更延伸穿过该些切割道21。如图3所示,在该基板单元210的侧边位置,每一窗口模封区214可围绕至少两个相邻近于侧边的小窗口213并包含位在该些小窗口213之间的切割道21部位。在该基板单元210的角隅位置,每一窗口模封区214可围绕至少四个相邻近于角隅的小窗口213并包含位在该些小窗口213之间的切割道21交错部位。在本实施例中,该封胶体240为一环氧模封化合物(Epoxy Molding Compound,EMC),借由压模时上下模具夹压该基板条20,将预热好的树脂挤入模中,待树脂充填硬化后可形成该封胶体240,再开模取出成品。Afterwards, as shown in FIG. 4D , an
如图4E所示,在上述的小窗口模封切割方法中,可另包含一步骤:设置多个外接端子250于该些外接垫216。该些外接端子250可包含多个金属球、锡膏、接触垫或接触针等等。在本实施中,该些外接端子250为焊球,借以组成小窗口型球格阵列封装,并使载设于该基板条20的该些晶片220得与该些外接端子250达成电性连接关系,以供表面接合一外部印刷电路板(printed circuit board,PCB)。As shown in FIG. 4E , in the above-mentioned small window molding and cutting method, an additional step may be included: disposing a plurality of
最后,如图4F所示,以切割刀具40沿着该些切割道21切割该基板条20,以单体化分离出多个半导体封装构造200(如图6所示)。除了切割到该基板条20,同时在切割过程会切割到该封胶体240在该些窗口模封区214内穿过该些切割道21的部位。在进行基板条切单作业时,即该些基板单元210分离的过程,该封胶体240在该些窗口模封区214内穿过该些切割道21的部位可以发挥有如切割保护垫片的功能,可减少该些基板单元210的线路及防焊层发生剥离分层的现象,借此提高封装产品的品质与可靠性。此外,该封胶体240在该外接表面212的可能溢胶区域更包含了切割道21,这样能降低模封溢胶在该些基板单元210内的面积与风险,大幅降低模封溢胶污染到该些外接垫216的可能。Finally, as shown in FIG. 4F , the
另外,本发明揭示一种由上述小窗口模封切割方法所形成的封装构造。如图6所示,该封装构造200主要包含一基板单元210、一晶片220、多个电性连接元件230以及一封胶体240。该基板单元210是板条20(如图3所示)切割形成,该基板单元210具有多个贯穿该粘晶表面211至该外接表面212的小窗口213。该些小窗口213形成于该基板单元210的侧边或角隅。在本实施例中,该些小窗口213邻近于而可不连通至该基板单元210的侧边或角隅。并且如图3所示,该外接表面212包含有多个窗口模封区214,其围绕该些小窗口213并延伸至该基板单元210的侧边或角隅。该晶片220设置于该粘晶表面211。该些电性连接元件230形成于该些小窗口213内,以电性连接该晶片220与该基板单元210。In addition, the present invention discloses a packaging structure formed by the above small window molding and cutting method. As shown in FIG. 6 , the
此外,该封胶体240形成于该基板单元210的该些窗口模封区214,以密封该些电性连接元件230,该封胶体240具有一连接该外接表面212的第一切割侧面242,其单体化分离该基板单元210时同时形成,并切齐于该基板单元210的侧边或角隅,该第一切割侧面242具有一突出于该外接表面212的防护厚度,以致使该基板单元210的线路及防焊层不会发生剥离分层的现象。此外,该封胶体240具有一连接该粘晶表面211的第二切割侧面243,其切齐于该基板单元210的侧边或角隅。因此,该封胶体240具有多个窗口模封部241,其形成于该些窗口模封区214内并具有该第一切割侧面242。In addition, the
因此,本发明揭示一种小窗口模封切割方法及其结构,该封胶体240的该些窗口模封部241延伸并覆盖至该基板条20在外接表面212的切割道21,解决现有位于该些基板单元210侧边或角隅的小窗口213容易发生溢胶的现象。此外,在进行该基板条20切单作业时,借由该些窗口模封部241提供突出于该外接表面212的第一切割侧面242,以保护该基板单元210的线路及防焊层不会发生剥离分层的现象,可提高该些基板单元210侧边或角隅的结合力并可维持基板结构的强度,以提高封装产品的品质与可靠性。Therefore, the present invention discloses a small window molding and cutting method and its structure. The
在本发明的第二具体实施例,揭示另一种小窗口模封切割方法所形成的封装构造。请参阅图7及图8所示,图7为另一种半导体封装构造的基板单元外接表面的示意图。图8是半导体封装构造的截面示意图。该半导体封装构造300主要包含一基板单元310、一晶片320、多个电性连接元件330以及一封胶体340。该基板单元310具有一粘晶表面311、一外接表面312以及多个贯穿该基板单元310的小窗口313。该基板单元310是由一基板条30(如图7所示)所切割形成,在相邻的基板单元310的外接表面312之间设有切割道31。该晶片320设置于该粘晶表面311,。该些电性连接元件330形成于该些小窗口313内,以电性连接该些晶片320至该基板单元310。In the second specific embodiment of the present invention, another packaging structure formed by a small window molding and cutting method is disclosed. Please refer to FIG. 7 and FIG. 8 . FIG. 7 is a schematic diagram of an external surface of a substrate unit of another semiconductor package structure. 8 is a schematic cross-sectional view of a semiconductor package structure. The
如图7所示,该些小窗口313形成于该基板单元310的侧边或角隅,并且该外接表面312包含有多个窗口模封区314,其围绕该些小窗口313并延伸至该基板单元310的侧边或角隅。在本实施例中,在相邻基板单元310且同一窗口模封区314内的小窗口313为连通,借以减少该基板条30被切割侧面的面积,具有防止该些基板单元310切割时发生剥离分层的增益性与提升产品抗湿性的功效。此外,该基板单元310更可具有多个贯穿该基板单元310的中央槽孔315,其形成于该些基板单元310的中央区域,并且该外接表面312包含有一下模封区317,其围绕该些中央槽孔315,但可不延伸至该些切割道31。另外,该基板条30更可具有多个形成于该外接表面312的外接垫316,可用于设置多个外接端子350,该晶片320经由该基板单元310电性连接至该些外接端子350,以供该半导体封装构造300可表面接合至一外部印刷电路板(图中未绘出)。As shown in FIG. 7, the
该封胶体340形成于该基板单元310的该些窗口模封区314,以密封该些电性连接元件330。该封胶体340具有一突出于该外接表面312的第一切割侧面342,其切齐于该基板单元310的侧边或角隅。此外,该封胶体340具有一突出且连接于该粘晶表面311的第二切割侧面343,其切齐于该基板单元310的侧边或角隅。由于该些小窗口313连通至该基板单元310的对应侧边或角隅,故第一切割侧面342与第二切割侧面343在该些小窗口313处为一体连接,在其余部位则以该基板单元310的侧边分隔之。封胶后,该封胶体340在每一窗口模封区314可形成一窗口模封部341。The
由于切割后该些小窗口313连通至该基板单元310的侧边或角隅,形成为侧边ㄇ形或角隅L形的缺口,可简化模封下模具的设计,进一步节封装制程中的治具成本。Since the
较佳地,如图7所示,该基板条30于外接表面312可预留有一溢胶槽道32,其对准于该些切割道31内并穿过该些窗口模封区314,故将能使原欲被切除的切割道314作为溢胶预定区,避免在该基板单元310内产生可能污染至该些外接垫316的模封溢胶。Preferably, as shown in FIG. 7, the
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,本发明技术方案范围当依所附申请专利范围为准。任何熟悉本专业的技术人员可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. The scope of the technical solution of the present invention should be based on the scope of the attached patent application. Any skilled person familiar with this profession can use the technical content disclosed above to make some changes or modify the equivalent embodiments of equivalent changes, but all the content that does not deviate from the technical solution of the present invention, the above embodiments are modified according to the technical essence of the present invention Any simple modifications, equivalent changes and modifications still fall within the scope of the technical solution of the present invention.
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| US6048755A (en) * | 1998-11-12 | 2000-04-11 | Micron Technology, Inc. | Method for fabricating BGA package using substrate with patterned solder mask open in die attach area |
| CN1819129A (en) * | 2005-02-07 | 2006-08-16 | 矽品精密工业股份有限公司 | Semiconductor package of stacked chips and its manufacturing method |
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| CN1819129A (en) * | 2005-02-07 | 2006-08-16 | 矽品精密工业股份有限公司 | Semiconductor package of stacked chips and its manufacturing method |
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