CN101815873B - 多级蚌壳式真空泵 - Google Patents

多级蚌壳式真空泵 Download PDF

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Publication number
CN101815873B
CN101815873B CN2008801099252A CN200880109925A CN101815873B CN 101815873 B CN101815873 B CN 101815873B CN 2008801099252 A CN2008801099252 A CN 2008801099252A CN 200880109925 A CN200880109925 A CN 200880109925A CN 101815873 B CN101815873 B CN 101815873B
Authority
CN
China
Prior art keywords
vacuum pump
fluid
channel
chamber
channels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2008801099252A
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English (en)
Chinese (zh)
Other versions
CN101815873A (zh
Inventor
N·P·肖菲尔德
S·道德斯威尔
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Edwards Ltd
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Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of CN101815873A publication Critical patent/CN101815873A/zh
Application granted granted Critical
Publication of CN101815873B publication Critical patent/CN101815873B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/14—Sealings between relatively-stationary surfaces by means of granular or plastic material, or fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN2008801099252A 2007-10-04 2008-10-01 多级蚌壳式真空泵 Active CN101815873B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0719394.9 2007-10-04
GBGB0719394.9A GB0719394D0 (en) 2007-10-04 2007-10-04 A multi stage clam shell vacuum pump
PCT/GB2008/050886 WO2009044197A2 (fr) 2007-10-04 2008-10-01 Pompe à vide à étages multiples et à carter en deux parties

Publications (2)

Publication Number Publication Date
CN101815873A CN101815873A (zh) 2010-08-25
CN101815873B true CN101815873B (zh) 2013-05-29

Family

ID=38739125

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008801099252A Active CN101815873B (zh) 2007-10-04 2008-10-01 多级蚌壳式真空泵

Country Status (10)

Country Link
US (1) US9279426B2 (fr)
EP (1) EP2193276B1 (fr)
JP (1) JP5496895B2 (fr)
KR (1) KR101458935B1 (fr)
CN (1) CN101815873B (fr)
BR (1) BRPI0816844A2 (fr)
CA (1) CA2698452A1 (fr)
GB (1) GB0719394D0 (fr)
RU (1) RU2470186C2 (fr)
WO (1) WO2009044197A2 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100883783B1 (ko) * 2007-09-06 2009-02-18 김영애 음식물쓰레기 파쇄 선별기
DE202010015439U1 (de) * 2010-11-16 2012-02-17 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe und Gehäuse-Halbschale für selbige
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
US9470228B2 (en) * 2012-07-03 2016-10-18 Brian J. O'Connor Multiple segment lobe pump
GB2508405B (en) * 2012-11-30 2015-09-02 Edwards Ltd Vacuum pump
DE102012222753B4 (de) 2012-12-11 2016-08-04 Schwäbische Hüttenwerke Automotive GmbH Gaspumpe mit abdichtender Ölnut
GB2528451A (en) * 2014-07-21 2016-01-27 Edwards Ltd Vacuum pump
GB2528450A (en) * 2014-07-21 2016-01-27 Edwards Ltd Vacuum pump
GB2540999A (en) * 2015-08-04 2017-02-08 Edwards Ltd Vacuum Pump
CA2998448C (fr) 2015-10-02 2023-09-26 Leybold Gmbh Pompe a palettes multicellulaire
DE202015006922U1 (de) * 2015-10-02 2017-01-03 Leybold Gmbh Mehrstufige Drehschieberpumpe
GB2558954B (en) * 2017-01-24 2019-10-30 Edwards Ltd Pump sealing
GB2559136B (en) * 2017-01-25 2020-04-15 Edwards Ltd Vacuum pump with biased stator seals and method of manufacture thereof
GB2559134B (en) * 2017-01-25 2020-07-29 Edwards Ltd Pump assemblies with stator joint seals
GB2561899B (en) * 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
GB2575987A (en) * 2018-07-30 2020-02-05 Edwards Ltd Seal assembly
GB2588424B (en) 2019-10-23 2022-01-26 Edwards Ltd Pump apparatus
FR3106630B1 (fr) * 2020-01-24 2022-01-28 Pfeiffer Vacuum Technology AG Pompe à vide sèche
GB2592030B (en) * 2020-02-12 2022-03-09 Edwards Ltd Multiple stage vacuum pump
FR3107575B1 (fr) * 2020-02-20 2022-03-25 Pfeiffer Vacuum Technology AG Pompe à vide sèche
CN114593059A (zh) * 2020-12-07 2022-06-07 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的定子部件
GB2614285B (en) * 2021-12-23 2024-03-06 Edwards Ltd Vacuum pump with reduced seal requirements
GB2623108B (en) * 2022-10-06 2024-10-16 Edwards Ltd Multistage vacuum pump and a stator for a multistage pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1050699A2 (fr) * 1999-05-06 2000-11-08 BBP Environment GmbH Raccord à brides assurant l'étanchéité de réservoirs comprenant au moins deux éléments
US20020155014A1 (en) * 2000-08-21 2002-10-24 Pascal Durand Pressure seal for a vacuum pump
CN1784546A (zh) * 2003-05-08 2006-06-07 英国氧气集团有限公司 密封组件的改进

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246295A (en) * 1991-10-30 1993-09-21 Ide Russell D Non-contacting mechanical face seal of the gap-type
FR2638788B1 (fr) * 1988-11-07 1994-01-28 Alcatel Cit Pompe a vide du type roots multietage
FR2653831A1 (fr) * 1989-11-02 1991-05-03 Cit Alcatel Pompe volumetrique.
US5769604A (en) * 1995-05-04 1998-06-23 Eg&G Sealol, Inc. Face seal device having high angular compliance
GB2306672B (en) * 1995-11-01 2000-03-22 Framo Eng As Monitoring system for high pressure fluid flow connector
JP2000205148A (ja) * 1999-01-11 2000-07-25 Toyota Autom Loom Works Ltd 多段ル―ツポンプ及び多段ル―ツポンプのロ―タハウジング製作方法
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
GB0515905D0 (en) * 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
GB0519742D0 (en) * 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1050699A2 (fr) * 1999-05-06 2000-11-08 BBP Environment GmbH Raccord à brides assurant l'étanchéité de réservoirs comprenant au moins deux éléments
US20020155014A1 (en) * 2000-08-21 2002-10-24 Pascal Durand Pressure seal for a vacuum pump
CN1784546A (zh) * 2003-05-08 2006-06-07 英国氧气集团有限公司 密封组件的改进

Also Published As

Publication number Publication date
RU2010117367A (ru) 2011-11-10
WO2009044197A2 (fr) 2009-04-09
GB0719394D0 (en) 2007-11-14
US9279426B2 (en) 2016-03-08
EP2193276A2 (fr) 2010-06-09
CA2698452A1 (fr) 2009-04-09
KR101458935B1 (ko) 2014-11-07
JP5496895B2 (ja) 2014-05-21
EP2193276B1 (fr) 2016-03-16
BRPI0816844A2 (pt) 2015-03-17
CN101815873A (zh) 2010-08-25
US20100226808A1 (en) 2010-09-09
KR20100093036A (ko) 2010-08-24
RU2470186C2 (ru) 2012-12-20
JP2010540832A (ja) 2010-12-24
WO2009044197A3 (fr) 2009-05-22

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