CN101951237A - Laminated sheet type filter and preparation method thereof - Google Patents

Laminated sheet type filter and preparation method thereof Download PDF

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CN101951237A
CN101951237A CN 201010236818 CN201010236818A CN101951237A CN 101951237 A CN101951237 A CN 101951237A CN 201010236818 CN201010236818 CN 201010236818 CN 201010236818 A CN201010236818 A CN 201010236818A CN 101951237 A CN101951237 A CN 101951237A
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diaphragm
filter
chip
ferrite
multilayer chip
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CN101951237B (en
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徐自强
曾志毅
尉旭波
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Chengdu Electronic & Information Technology Engineering Co Ltd
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University of Electronic Science and Technology of China
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Abstract

The invention discloses a laminated sheet type filter and a preparation method thereof, belonging to the technical field of electron component. The filter is formed by compounding a laminated sheet type capacitance and a laminated sheet type magnetic core inductance, wherein the laminated sheet type capacitance is laminated and sintered by multiple layers of ferrite diaphragms of which the surface is printed with conductor wires, composite medium material is arranged between the terminal electrode contained by the laminated sheet type capacitance and a ground electrode, and the composite medium material comprises ferrite material and columnar ceramic arrays distributed in the ferrite material. The preparation method comprises the following steps: burdening, casting, pulping, forming arrays/ interconnecting holes, filling ceramics/ conductor paste, printing conduction band, laminating, equalizing pressure of hot water, cutting, burning, blocking and the like. The invention increases the equivalent dielectric constant in common ferrite structure by adding the columnar ceramic array structure in the capacitance part of the laminated sheet type filter, improves Q value and capacity and effectively lowers the off frequency of the filter and improves the out of band rejection characteristic of the filter.

Description

一种叠层片式滤波器及其制备方法 A kind of multilayer chip filter and its preparation method

技术领域technical field

本发明属于电子元器件技术领域,涉及片式滤波器,特别是含有介电陶瓷柱状阵列的叠层片式铁氧体滤波器及其制备方法。The invention belongs to the technical field of electronic components, and relates to a chip filter, in particular to a laminated chip ferrite filter containing a dielectric ceramic columnar array and a preparation method thereof.

背景技术Background technique

随着整机和系统对电子元器件体积和重量的要求越来越高,滤波器作为系统和整机中大量使用的无源元件,减小其体积和重量非常重要,特别是抗电磁干扰应用的滤波器,研究体积小、可靠性高的抗电磁干扰滤波器更是成为当前的关注热点。为此,国内外厂家通过采用多层片式结构的形式来研制和生产小型化、低截止频率的抗电磁干扰滤波器。As the whole machine and system have higher and higher requirements on the size and weight of electronic components, the filter is a passive component widely used in the system and the whole machine, so it is very important to reduce its size and weight, especially for anti-electromagnetic interference applications The research of the anti-electromagnetic interference filter with small size and high reliability has become a current focus of attention. For this reason, manufacturers at home and abroad develop and produce miniaturized, low cut-off frequency anti-electromagnetic interference filters in the form of multi-layer chip structures.

目前叠层片式结构的抗电磁干扰滤波器,其电路和结构形式有采用单一介电陶瓷材料的并联对地电容的C型电容形式或单一铁氧体多层电感的纯电感形式,这些结构形式的抗电磁干扰滤波器具有带外抑制性能不高,矩形度差等缺点。为了解决滤波器的带外抑制特性差的缺点,滤波器生产厂商通过采用多层LC型电路结构来提高滤波器的频带特性。常见的结构有采用单一介电陶瓷材料构成的LC型滤波器,此种结构的滤波器改善了带外抑制特性,但要满足较低截止频率的应用需求,就需要增加滤波器的容值和感值,由于介电陶瓷的磁导率很小,只能通过增加电感层数来增加感值,从而大大增加了滤波器的体积和重量。也有采用单一铁氧体材料构成的LC型滤波器,同样由于铁氧体材料的介电常数很小,虽如要提高容值来满足较低截止频率的需求,只能通过增加电容层数来实现,也会大大增加了滤波器的体积和重量;同时单一铁氧体材料由于其谐振频率不高,使得滤波器的工作频率范围通常低于500MHz。另外一种滤波器就是采用电感部分有铁氧体材料叠层形成,电容部分由介电陶瓷材料叠层形成,再将两部分结合为一体形成错层式LC滤波器,此类滤波器虽然提高了滤波器的带外特性,但由于陶瓷层和铁氧体层之间存在界面效应,且两种材料晶体粒度和收缩率不同,在排胶烧结时会在界面产生大量的应力,两种材料收缩速率和方向的差异加速了应力的累积,这种产生的界面应力加上材料层间的收缩失配往往会造成滤波器内部的裂纹、分层和翘曲,严重时会造成瓷体开裂,大大降低了滤波器的可靠性。At present, the anti-electromagnetic interference filter of the laminated chip structure has a circuit and a structural form of a C-type capacitor form of a parallel capacitor to ground using a single dielectric ceramic material or a pure inductive form of a single ferrite multilayer inductor. These structures The form of anti-electromagnetic interference filter has the disadvantages of low out-of-band suppression performance and poor squareness. In order to solve the disadvantage of poor out-of-band suppression characteristics of filters, filter manufacturers improve the frequency band characteristics of filters by adopting multi-layer LC circuit structures. A common structure is an LC filter made of a single dielectric ceramic material. The filter with this structure improves the out-of-band rejection characteristics, but to meet the application requirements of a lower cut-off frequency, it is necessary to increase the capacitance of the filter and Inductance value, since the magnetic permeability of dielectric ceramics is very small, the inductance value can only be increased by increasing the number of inductance layers, thus greatly increasing the volume and weight of the filter. There are also LC-type filters made of a single ferrite material. Also because the dielectric constant of the ferrite material is very small, if you want to increase the capacitance to meet the requirements of a lower cut-off frequency, you can only increase the number of capacitor layers. Realization will also greatly increase the volume and weight of the filter; at the same time, the operating frequency range of the filter is usually lower than 500MHz due to the low resonance frequency of a single ferrite material. Another type of filter is formed by stacking the inductance part with ferrite materials, and the capacitor part is formed by stacking dielectric ceramic materials, and then combining the two parts into one to form a split-layer LC filter. Although this type of filter improves The out-of-band characteristics of the filter are improved, but due to the interface effect between the ceramic layer and the ferrite layer, and the crystal grain size and shrinkage rate of the two materials are different, a large amount of stress will be generated at the interface during debinding and sintering. The two materials The difference in shrinkage rate and direction accelerates the accumulation of stress. This interface stress plus the shrinkage mismatch between material layers often causes cracks, delamination and warping inside the filter, and in severe cases, it will cause cracking of the ceramic body. Greatly reduces the reliability of the filter.

发明内容Contents of the invention

针对以上问题,本发明的任务是提供一种新型叠层片式滤波器及其制备方法,该滤波器具有截止频率低、带外抑制高、矩形系数好、工作频率范围宽等优点;在制备本发明提供的片式滤波器时,无需对现有设备进行改造,其制备工艺与常规片式元器件工艺及LTCC工艺相兼容。In view of the above problems, the task of the present invention is to provide a novel multilayer chip filter and its preparation method, the filter has the advantages of low cut-off frequency, high out-of-band rejection, good squareness coefficient, wide operating frequency range, etc.; The chip filter provided by the invention does not need to modify the existing equipment, and its preparation technology is compatible with the conventional chip component technology and LTCC technology.

本发明在现有的LC型铁氧体片式滤波器中引入陶瓷柱状阵列,有效提高滤波器的容值,由于柱状阵列均匀分布,作为主体结构的铁氧体材料可以有效控制柱状阵列中每一单独柱体的收缩,减少瓷体内部应力,缓解异质材料界面效应,从而整体提高瓷体的可靠性。The present invention introduces a ceramic columnar array into the existing LC-type ferrite chip filter to effectively increase the capacitance of the filter. Since the columnar array is uniformly distributed, the ferrite material used as the main structure can effectively control each element in the columnar array. The shrinkage of a single cylinder reduces the internal stress of the porcelain body and alleviates the interface effect of heterogeneous materials, thereby improving the reliability of the porcelain body as a whole.

本发明采取的技术方案如下:The technical scheme that the present invention takes is as follows:

一种叠层片式滤波器,如图1所示,由叠层片式电容和叠层片式磁芯电感复合而成,具有叠层片式结构。所述叠层片式磁芯电感由多层表面印刷了导体线的铁氧体膜片层叠烧结而成,多层铁氧体膜片表面的导体线相互连通并形成一个电感线圈,该电感线圈的一个引出端与整个滤波器的一个端电极相连,另一个引出端与整个滤波器的另一个端电极相连。所述叠层片式电容包括两个端电极板和一个地电极板,其中一个端电极板与整个滤波器的一个端电极相连,另一个端电极板与整个滤波器的另一个端电极相连,地电极板与整个滤波器的地电极相连;在端电极与地电极之间是复合介质材料,所述复合介质材料包括铁氧体材料和分布于铁氧体材料中的柱状陶瓷阵列。A multilayer chip filter, as shown in Figure 1, is composed of a multilayer chip capacitor and a multilayer chip magnetic core inductor, and has a multilayer chip structure. The multi-layer chip core inductor is formed by stacking and sintering ferrite diaphragms with conductor lines printed on the surface of multiple layers. The conductor lines on the surface of the multi-layer ferrite diaphragms are connected to each other and form an inductance coil. The inductance coil One lead-out end is connected to one end electrode of the whole filter, and the other lead-out end is connected to the other end electrode of the whole filter. The laminated chip capacitor includes two terminal electrode plates and a ground electrode plate, wherein one terminal electrode plate is connected to one terminal electrode of the whole filter, and the other terminal electrode plate is connected to the other terminal electrode of the whole filter, The ground electrode plate is connected to the ground electrode of the whole filter; between the terminal electrode and the ground electrode is a composite dielectric material, which includes ferrite material and columnar ceramic array distributed in the ferrite material.

本发明提供的叠层片式滤波器,还可以拓展成周期性结构。如图2所示本发明提供的具有周期性拓展结构的叠层片式滤波器,该滤波器由多个所述叠层片式电容和多个所述叠层片式磁芯电感相互间隔地层叠在一起。The laminated chip filter provided by the present invention can also be expanded into a periodic structure. As shown in Figure 2, the multilayer chip filter with periodic expansion structure provided by the present invention, the filter is separated from each other by a plurality of said multilayer chip capacitors and a plurality of said multilayer chip magnetic core inductors layered together.

与现有的C型、阻容型、纯感型片式滤波器相比(各种形式滤波器的插损-频率曲线如图4所示),本发明提供的滤波器具有以下优点:Compared with the existing C-type, resistance-capacitance type, and pure inductance type chip filters (the insertion loss-frequency curves of various types of filters are shown in Figure 4), the filter provided by the present invention has the following advantages:

(1)滤波器中的电感部分具有感值大、等效串联电阻小、寄生参数小等优点,提高了滤波器通带内的传输性能;(1) The inductance part in the filter has the advantages of large inductance value, small equivalent series resistance, and small parasitic parameters, which improves the transmission performance in the passband of the filter;

(2)通过在电容部分膜片中填入低介高频陶瓷材料,经过多层叠加后形成柱状阵列,有效的增加了滤波器中电容部分的容值和Q值,缩小了滤波器的体积和重量,同时增强了滤波器的带外抑制特性和高频特性,削弱了滤波器带外抑制随着频率增加而变差的“翘尾”现象,扩展了滤波器的工作频率应用范围。(2) By filling the diaphragm of the capacitor part with low-dielectric and high-frequency ceramic materials, a columnar array is formed after multi-layer stacking, which effectively increases the capacitance and Q value of the capacitor part in the filter, and reduces the volume of the filter And weight, while enhancing the out-of-band rejection characteristics and high-frequency characteristics of the filter, weakening the "tail lift" phenomenon that the out-of-band rejection of the filter becomes worse as the frequency increases, and expanding the application range of the filter's operating frequency.

(3)本发明在实际的制备过程中,通过通孔填充介电陶瓷材料,多层叠加后形成的柱状阵列分布均匀,阵列中的每一单独柱体陶瓷材料,均被作为主体结构的铁氧体材料紧紧环绕控制,从而有效分解瓷体内部应力,缓解异质材料之间的界面效应,大大降低共烧时的收缩失配,解决瓷体共烧时可能出现的分层开裂现象,整体提高滤波器的可靠性,此方法简单高效,批量一致性好。(3) In the actual preparation process of the present invention, the dielectric ceramic material is filled through the through holes, and the columnar array formed after multi-layer stacking is evenly distributed, and each individual columnar ceramic material in the array is used as the iron core of the main structure Oxygen materials are closely surrounded and controlled, so as to effectively decompose the internal stress of the porcelain body, relieve the interface effect between heterogeneous materials, greatly reduce the shrinkage mismatch during co-firing, and solve the layered cracking phenomenon that may occur during co-firing of the porcelain body. The reliability of the filter is improved as a whole. This method is simple and efficient, and the batch consistency is good.

附图说明Description of drawings

图1是本发明提供的叠层片式滤波器的纵向剖面结构示意图。Fig. 1 is a schematic diagram of a vertical cross-sectional structure of a multilayer chip filter provided by the present invention.

图2是本发明提供的具有周期性拓展结构的叠层片式滤波器的纵向剖面结构示意图。Fig. 2 is a schematic view of the vertical cross-section of the multilayer chip filter with a periodically expanded structure provided by the present invention.

图3是本发明提供的柱状陶瓷阵列结构平面示意图。Fig. 3 is a schematic plan view of the columnar ceramic array structure provided by the present invention.

图4是本发明提供的叠层片式滤波器与相关滤波器的插入损耗-频率曲线对比图。Fig. 4 is a comparison diagram of the insertion loss-frequency curves of the multilayer chip filter provided by the present invention and the related filter.

具体实施方式Detailed ways

一种叠层片式滤波器,如图1所示,由叠层片式电容和叠层片式磁芯电感复合而成,具有叠层片式结构。所述叠层片式磁芯电感由多层表面印刷了导体线的铁氧体膜片层叠烧结而成,多层铁氧体膜片表面的导体线相互连通并形成一个电感线圈,该电感线圈的一个引出端与整个滤波器的一个端电极相连,另一个引出端与整个滤波器的另一个端电极相连。所述叠层片式电容包括两个端电极板和一个地电极板,其中一个端电极板与整个滤波器的一个端电极相连,另一个端电极板与整个滤波器的另一个端电极相连,地电极板与整个滤波器的地电极相连;在端电极与地电极之间是复合介质材料,所述复合介质材料包括铁氧体材料和分布于铁氧体材料中的柱状陶瓷阵列。A multilayer chip filter, as shown in Figure 1, is composed of a multilayer chip capacitor and a multilayer chip magnetic core inductor, and has a multilayer chip structure. The multi-layer chip core inductor is formed by stacking and sintering ferrite diaphragms with conductor lines printed on the surface of multiple layers. The conductor lines on the surface of the multi-layer ferrite diaphragms are connected to each other and form an inductance coil. The inductance coil One lead-out end is connected to one end electrode of the whole filter, and the other lead-out end is connected to the other end electrode of the whole filter. The laminated chip capacitor includes two terminal electrode plates and a ground electrode plate, wherein one terminal electrode plate is connected to one terminal electrode of the whole filter, and the other terminal electrode plate is connected to the other terminal electrode of the whole filter, The ground electrode plate is connected to the ground electrode of the whole filter; between the terminal electrode and the ground electrode is a composite dielectric material, which includes ferrite material and columnar ceramic array distributed in the ferrite material.

本发明提供的叠层片式滤波器,还可以拓展成周期性结构。如图2所示本发明提供的具有周期性拓展结构的叠层片式滤波器,该滤波器由多个所述叠层片式电容和多个所述叠层片式磁芯电感相互间隔地层叠在一起,从而实现电感和电容并联的结构形式,满足各种应用领域的需求。The laminated chip filter provided by the present invention can also be expanded into a periodic structure. As shown in Figure 2, the multilayer chip filter with periodic expansion structure provided by the present invention, the filter is separated from each other by a plurality of said multilayer chip capacitors and a plurality of said multilayer chip magnetic core inductors Stacked together, so as to realize the structure form of parallel connection of inductors and capacitors, to meet the needs of various application fields.

一种叠层片式滤波器的制备方法,包括以下步骤:A method for preparing a laminated chip filter, comprising the following steps:

步骤1:制备铁氧体生瓷膜片。选取初始磁导率在100~1000之间的铁氧体粉料,经球磨均匀混合后,制成铁氧体浆料,然后通过干法流延方式制备出铁氧体生瓷膜片,记为膜片A。单层膜片A的厚度控制在10um~100um之间。Step 1: Prepare a ferrite green ceramic diaphragm. Select ferrite powder with an initial magnetic permeability between 100 and 1000, mix it uniformly by ball milling to make a ferrite slurry, and then prepare a ferrite green ceramic diaphragm by dry casting, record For diaphragm A. The thickness of the single-layer diaphragm A is controlled between 10 um and 100 um.

步骤2:制备陶瓷浆料。选取介电常数在10~100之间的陶瓷粉料,加入助剂后经球磨均匀混合,得到陶瓷浆料。所述助剂包括粘合剂、分散剂、酒精和甲苯。Step 2: Prepare ceramic slurry. Select ceramic powder with a dielectric constant between 10 and 100, add additives and uniformly mix through ball milling to obtain ceramic slurry. The auxiliary agent includes binder, dispersant, alcohol and toluene.

步骤3:打阵列孔。选取相应数量用于制备叠层片式电容的膜片A,打等距阵列孔,孔直径为0.2mm,孔间中心距离为0.6mm,将打好阵列孔的膜片A记为膜片B。Step 3: Punch array holes. Select the corresponding number of diaphragms A for the preparation of multilayer chip capacitors, and drill equidistant array holes, the diameter of the holes is 0.2mm, and the center distance between the holes is 0.6mm, and the diaphragm A with the array holes is marked as diaphragm B .

步骤4:填陶瓷浆料。将步骤2制备的陶瓷浆料填入膜片B的阵列孔中,得到膜片D。Step 4: Fill ceramic slurry. Fill the ceramic slurry prepared in step 2 into the array holes of the diaphragm B to obtain the diaphragm D.

步骤5:打互连孔。选取相应数量用于制备叠层片式磁芯电感的膜片A,在制备电感需要进行导线互连的位置打上互连孔,互连孔直径为0.2mm,将打好互连孔的膜片A记为膜片C。Step 5: Drill interconnection holes. Select the corresponding number of diaphragms A for the preparation of laminated chip core inductors, and make interconnection holes at the positions where the wires need to be interconnected in the preparation of the inductors. The diameter of the interconnection holes is 0.2mm, and the diaphragms with the interconnection holes A is recorded as diaphragm C.

步骤6:填导体浆料。将导体浆料填入膜片C的互连孔中,得到膜片E。Step 6: Fill the conductive paste. The conductive paste was filled into the interconnection holes of the diaphragm C to obtain the diaphragm E.

步骤7:印刷。采用导体浆料在部分膜片B表面印刷叠层片式电容器所需地电极或端电极图形,得到膜片F;同样地,采用导体浆料在膜片C表面印刷叠层片式磁芯电感所需导线图形,得到膜片G。Step 7: Printing. Use conductive paste to print the electrode or terminal electrode pattern required by the multilayer chip capacitor on the surface of part of the diaphragm B to obtain the diaphragm F; similarly, use the conductive paste to print the multilayer chip magnetic core inductor on the surface of the diaphragm C Diaphragm G is obtained by the required wire pattern.

步骤8:叠层、热水均压,选取一定数量的膜片A,膜片F和膜片G,按照滤波器结构逐一叠层。叠层后通过热水均压的方式形成致密的巴块。Step 8: Lamination, hot water pressure equalization, select a certain number of diaphragms A, diaphragm F and diaphragm G, and stack them one by one according to the filter structure. After lamination, dense blocks are formed by means of hot water pressure equalization.

步骤9:切割、排胶、烧结和封端。将步骤8形成的巴块通过切割的方式,形成大小一致的长方体芯片,并放入排胶炉、烧结炉中进行排胶和烧结,形成大小相同、致密均匀的成瓷芯片。将芯片进行封端,最终得到本发明中的叠层片式滤波器。Step 9: Cutting, debinding, sintering and capping. The blocks formed in step 8 are cut to form rectangular parallelepiped chips of the same size, and placed in a debinding furnace and a sintering furnace for debinding and sintering to form dense and uniform ceramic chips of the same size. The chip is sealed to finally obtain the multilayer chip filter of the present invention.

Claims (3)

1.一种叠层片式滤波器,由叠层片式电容和叠层片式磁芯电感复合而成,具有叠层片式结构;其特征在于:所述叠层片式磁芯电感由多层表面印刷了导体线的铁氧体膜片层叠烧结而成,多层铁氧体膜片表面的导体线相互连通并形成一个电感线圈,该电感线圈的一个引出端与整个滤波器的一个端电极相连,另一个引出端与整个滤波器的另一个端电极相连;所述叠层片式电容包括两个端电极板和一个地电极板,其中一个端电极板与整个滤波器的一个端电极相连,另一个端电极板与整个滤波器的另一个端电极相连,地电极板与整个滤波器的地电极相连;在端电极与地电极之间是复合介质材料,所述复合介质材料包括铁氧体材料和分布于铁氧体材料中的柱状陶瓷阵列。1. A multilayer chip filter, which is composited by a multilayer chip capacitor and a multilayer chip magnetic core inductor, has a multilayer chip structure; it is characterized in that: the multilayer chip magnetic core inductor is composed of The ferrite diaphragm with conductor lines printed on the multi-layer surface is stacked and sintered. The conductor lines on the surface of the multi-layer ferrite diaphragm are connected to each other and form an inductance coil. One lead end of the inductance coil is connected to one of the entire filter. The terminal electrodes are connected, and the other lead-out terminal is connected to the other terminal electrode of the whole filter; the laminated chip capacitor includes two terminal electrode plates and a ground electrode plate, one of which is connected to one terminal electrode of the entire filter The other terminal electrode plate is connected to the other terminal electrode of the whole filter, and the ground electrode plate is connected to the ground electrode of the whole filter; between the terminal electrode and the ground electrode is a composite dielectric material, which includes A ferrite material and a columnar ceramic array distributed in the ferrite material. 2.根据权利要求1所述的叠层片式滤波器,其特征在于,所述叠层片式滤波器具有周期性结构,由多个所述叠层片式电容和多个所述叠层片式磁芯电感相互间隔地层叠在一起。2. The multilayer chip filter according to claim 1, wherein the multilayer chip filter has a periodic structure, and a plurality of the multilayer chip capacitors and a plurality of the stacked Chip core inductors are stacked at intervals. 3.一种叠层片式滤波器的制备方法,包括以下步骤:3. A method for preparing a laminated chip filter, comprising the following steps: 步骤1:制备铁氧体生瓷膜片;选取初始磁导率在100~1000之间的铁氧体粉料,经球磨均匀混合后,制成铁氧体浆料,然后通过干法流延方式制备出铁氧体生瓷膜片,记为膜片A;单层膜片A的厚度控制在10um~100um之间;Step 1: Prepare ferrite green ceramic diaphragm; select ferrite powder with initial magnetic permeability between 100 and 1000, mix it uniformly through ball milling, make ferrite slurry, and then cast it by dry method The ferrite green ceramic diaphragm is prepared by this method, which is denoted as diaphragm A; the thickness of the single-layer diaphragm A is controlled between 10um and 100um; 步骤2:制备陶瓷浆料;选取介电常数在10~100之间的陶瓷粉料,加入助剂后经球磨均匀混合,得到陶瓷浆料;所述助剂包括粘合剂、分散剂、酒精和甲苯。Step 2: Prepare ceramic slurry; select ceramic powder with a dielectric constant between 10 and 100, add additives and mix uniformly through ball milling to obtain ceramic slurry; the additives include binders, dispersants, alcohols and toluene. 步骤3:打阵列孔;选取相应数量用于制备叠层片式电容的膜片A,打等距阵列孔,孔直径为0.2mm,孔间中心距离为0.6mm,将打好阵列孔的膜片A记为膜片B;Step 3: Drill array holes; select the corresponding number of diaphragms A for the preparation of multilayer chip capacitors, and punch equidistant array holes with a diameter of 0.2 mm and a center distance between holes of 0.6 mm. Sheet A is denoted as diaphragm B; 步骤4:填陶瓷浆料;将步骤2制备的陶瓷浆料填入膜片B的阵列孔中,得到膜片D;Step 4: filling ceramic slurry; filling the ceramic slurry prepared in step 2 into the array holes of diaphragm B to obtain diaphragm D; 步骤5:打互连孔;选取相应数量用于制备叠层片式磁芯电感的膜片A,在制备电感需要进行导线互连的位置打上互连孔,互连孔直径为0.2mm,将打好互连孔的膜片A记为膜片C:Step 5: Make interconnection holes; select the corresponding number of diaphragms A for the preparation of laminated chip core inductors, and punch interconnection holes at the positions where wire interconnection is required for the preparation of inductors. The diameter of the interconnection holes is 0.2 mm, and the Diaphragm A with interconnected holes is marked as diaphragm C: 步骤6:填导体浆料;将导体浆料填入膜片C的互连孔中,得到膜片E;Step 6: Filling the conductive paste; filling the conductive paste into the interconnection holes of the diaphragm C to obtain the diaphragm E; 步骤7:印刷;采用导体浆料在部分膜片B表面印刷叠层片式电容器所需地电极或端电极图形,得到膜片F;同样地,采用导体浆料在膜片C表面印刷叠层片式磁芯电感所需导线图形,得到膜片G;Step 7: Printing; use conductive paste to print the electrode or terminal electrode pattern required for the laminated chip capacitor on the surface of part of the diaphragm B to obtain the diaphragm F; similarly, use the conductive paste to print the laminate on the surface of the diaphragm C Diaphragm G is obtained from the wire pattern required by the chip core inductor; 步骤8:叠层、热水均压,选取一定数量的膜片A,膜片F和膜片G,按照滤波器结构逐一叠层;叠层后通过热水均压的方式形成致密的巴块;Step 8: Lamination, hot water pressure equalization, select a certain number of diaphragms A, diaphragm F and diaphragm G, and stack them one by one according to the filter structure; after lamination, a dense block is formed by means of hot water pressure equalization ; 步骤9:切割、排胶、烧结和封端;将步骤8形成的巴块通过切割的方式,形成大小一致的长方体芯片,并放入排胶炉、烧结炉中进行排胶和烧结,形成大小相同、致密均匀的成瓷芯片。将芯片进行封端,最终得到本发明中的叠层片式滤波器。Step 9: Cutting, debinding, sintering and capping; cut the block formed in step 8 to form a cuboid chip of the same size, and put it into a debinding furnace and a sintering furnace for debinding and sintering to form a size The same, dense and uniform ceramic chip. The chip is sealed to finally obtain the multilayer chip filter of the present invention.
CN2010102368185A 2010-07-23 2010-07-23 Laminated sheet type filter and preparation method thereof Expired - Fee Related CN101951237B (en)

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CN105281698A (en) * 2015-09-17 2016-01-27 浙江大学 Mobile communication terminal LTCC nine-order harmonic suppression filter and mobile communication terminal
CN107332531A (en) * 2017-06-29 2017-11-07 电子科技大学 A kind of preparation method of lamination tunable filter and adjustable core inductance
CN107591256A (en) * 2017-07-14 2018-01-16 电子科技大学 A kind of board-like array capacitor chip of Large Copacity gradient and preparation method thereof
CN110492731A (en) * 2019-09-11 2019-11-22 成都宏科电子科技有限公司 A kind of ceramics water type power adapter and manufacturing method
CN115565759A (en) * 2022-10-25 2023-01-03 惠州铂科磁材有限公司 A capacitor-inductor dual-function device and its manufacturing method

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